DOI: 10.1016/j.ccr.2013.04.010. Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials

Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials

10.1016/j.ccr.2013.04.010

Crossref journal-article

Elsevier BV

Coordination Chemistry Reviews (78)

Bibliography

Lee, S. W., Choi, B. J., Eom, T., Han, J. H., Kim, S. K., Song, S. J., Lee, W., & Hwang, C. S. (2013). Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials. Coordination Chemistry Reviews, 257(23â24), 3154â3176.

Authors 8

Sang Woon Lee (first)
Byung Joon Choi (additional)
Taeyong Eom (additional)
Jeong Hwan Han (additional)
Seong Keun Kim (additional)
Seul Ji Song (additional)
Woongkyu Lee (additional)
Cheol Seong Hwang (additional)

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Dates

Type	When
Created	12 years, 3 months ago (April 28, 2013, 9:30 a.m.)
Deposited	6 years, 10 months ago (Oct. 16, 2018, 5:22 a.m.)
Indexed	4 months, 4 weeks ago (March 27, 2025, 4:59 p.m.)
Issued	11 years, 8 months ago (Dec. 1, 2013)
Published	11 years, 8 months ago (Dec. 1, 2013)
Published Print	11 years, 8 months ago (Dec. 1, 2013)

Funders 1

National Research Foundation 10.13039/501100001321
Region: Africa
gov (Trusts, charities, foundations (both public and private))
Labels3
1. South Africa’s National Research Foundation
2. National Research Foundation (South Africa)
3. NRF

BibTeX

@article{Lee_2013, title={Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials}, volume={257}, ISSN={0010-8545}, url={http://dx.doi.org/10.1016/j.ccr.2013.04.010}, DOI={10.1016/j.ccr.2013.04.010}, number={23–24}, journal={Coordination Chemistry Reviews}, publisher={Elsevier BV}, author={Lee, Sang Woon and Choi, Byung Joon and Eom, Taeyong and Han, Jeong Hwan and Kim, Seong Keun and Song, Seul Ji and Lee, Woongkyu and Hwang, Cheol Seong}, year={2013}, month=dec, pages={3154–3176} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        3,
        27
      ]
    ],
    "date-time": "2025-03-27T20:59:53Z",
    "timestamp": 1743109193274
  },
  "reference-count": 119,
  "publisher": "Elsevier BV",
  "issue": "23-24",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2013,
            12,
            1
          ]
        ],
        "date-time": "2013-12-01T00:00:00Z",
        "timestamp": 1385856000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "funder": [
    {
      "DOI": "10.13039/501100001321",
      "name": "National Research Foundation",
      "doi-asserted-by": "crossref",
      "id": [
        {
          "id": "10.13039/501100001321",
          "id-type": "DOI",
          "asserted-by": "crossref"
        }
      ]
    }
  ],
  "content-domain": {
    "domain": [
      "elsevier.com",
      "sciencedirect.com"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2013,
        12
      ]
    ]
  },
  "DOI": "10.1016/j.ccr.2013.04.010",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2013,
        4,
        28
      ]
    ],
    "date-time": "2013-04-28T13:30:41Z",
    "timestamp": 1367155841000
  },
  "page": "3154-3176",
  "update-policy": "http://dx.doi.org/10.1016/elsevier_cm_policy",
  "source": "Crossref",
  "is-referenced-by-count": 50,
  "title": "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials",
  "prefix": "10.1016",
  "volume": "257",
  "author": [
    {
      "given": "Sang Woon",
      "family": "Lee",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Byung Joon",
      "family": "Choi",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Taeyong",
      "family": "Eom",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Jeong Hwan",
      "family": "Han",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Seong Keun",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Seul Ji",
      "family": "Song",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Woongkyu",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Cheol Seong",
      "family": "Hwang",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.ccr.2013.04.010_bib0005",
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      "unstructured": "C. Dussarrat, U.S. Patent application publication, US 2009/0074652 A1 (2009) March 19."
    }
  ],
  "container-title": "Coordination Chemistry Reviews",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0010854513000933?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0010854513000933?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2018,
        10,
        16
      ]
    ],
    "date-time": "2018-10-16T09:22:01Z",
    "timestamp": 1539681721000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0010854513000933"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2013,
        12
      ]
    ]
  },
  "references-count": 119,
  "journal-issue": {
    "issue": "23-24",
    "published-print": {
      "date-parts": [
        [
          2013,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S0010854513000933"
  ],
  "URL": "http://dx.doi.org/10.1016/j.ccr.2013.04.010",
  "relation": {},
  "ISSN": [
    "0010-8545"
  ],
  "subject": [],
  "container-title-short": "Coordination Chemistry Reviews",
  "published": {
    "date-parts": [
      [
        2013,
        12
      ]
    ]
  },
  "assertion": [
    {
      "value": "Elsevier",
      "name": "publisher",
      "label": "This article is maintained by"
    },
    {
      "value": "Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials",
      "name": "articletitle",
      "label": "Article Title"
    },
    {
      "value": "Coordination Chemistry Reviews",
      "name": "journaltitle",
      "label": "Journal Title"
    },
    {
      "value": "https://doi.org/10.1016/j.ccr.2013.04.010",
      "name": "articlelink",
      "label": "CrossRef DOI link to publisher maintained version"
    },
    {
      "value": "article",
      "name": "content_type",
      "label": "Content Type"
    },
    {
      "value": "Copyright \u00a9 2013 Elsevier B.V. All rights reserved.",
      "name": "copyright",
      "label": "Copyright"
    }
  ]
}