DOI: 10.1016/j.apsusc.2013.06.057. Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering

Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering

10.1016/j.apsusc.2013.06.057

Crossref journal-article

Elsevier BV

Applied Surface Science (78)

Bibliography

Tsai, D.-C., Chang, Z.-C., Kuo, B.-H., Shiao, M.-H., Chang, S.-Y., & Shieu, F.-S. (2013). Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering. Applied Surface Science, 282, 789â797.

Authors 6

Du-Cheng Tsai (first)
Zue-Chin Chang (additional)
Bing-Hau Kuo (additional)
Ming-Hua Shiao (additional)
Shou-Yi Chang (additional)
Fuh-Sheng Shieu (additional)

References 38 Referenced 75

{'year': '1996', 'author': 'Pierson', 'series-title': 'Handbook of Refractory Carbides and Nitrides', 'key': '10.1016/j.apsusc.2013.06.057_bib0005'} / Handbook of Refractory Carbides and Nitrides by Pierson (1996)
10.1016/j.surfcoat.2010.09.023 / Surface and Coatings Technology by Keunecke (2010)
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10.1016/j.surfcoat.2009.11.034 / Surface and Coatings Technology by Cheng (2010)
10.1016/j.jallcom.2012.05.018 / Journal of Alloys and Compounds by Chung (2012)
10.1002/adem.200300567 / Advanced Engineering Materials by Yeh (2004)
10.1002/adem.200300507 / Advanced Engineering Materials by Huang (2004)
10.1016/j.apsusc.2010.08.078 / Applied Surface Science by Tsai (2010)
10.1016/j.apsusc.2011.09.006 / Applied Surface Science by Liang (2011)
10.1016/j.surfcoat.2006.06.048 / Surface and Coatings Technology by Lai (2006)
10.1016/j.surfcoat.2012.07.004 / Surface and Coatings Technology by Tsai (2012)
10.1016/j.apsusc.2011.04.014 / Applied Surface Science by Liang (2011)
10.1088/0022-3727/39/21/019 / Journal of Physics D by Lai (2006)
10.1016/S0040-6090(00)01258-X / Thin Solid Films by Shiao (2000)
{'key': '10.1016/j.apsusc.2013.06.057_bib0075', 'first-page': '163', 'volume': '375', 'author': 'Han', 'year': '2003', 'journal-title': 'Thin Solid Films'} / Thin Solid Films by Han (2003)
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10.1016/j.surfcoat.2006.07.067 / Surface and Coatings Technology by Gassner (2006)
{'year': '1974', 'author': 'Klug', 'series-title': 'X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials', 'key': '10.1016/j.apsusc.2013.06.057_bib0090'} / X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials by Klug (1974)
10.1063/1.1736012 / Journal of Applied Physics by Laegreid (1961)
10.1016/0040-6090(76)90006-7 / Thin Solid Films by Donaghey (1976)
10.1116/1.575584 / Journal of Vacuum Science and Technology A by Yoshitake (1988)
10.1016/0022-5088(84)90420-X / Journal of the Less Common Metals by Maeland (1984)
10.1016/j.apsusc.2010.11.150 / Applied Surface Science by Tsai (2011)
10.1002/adem.200700240 / Advanced Engineering Materials by Zhang (2008)
10.1016/j.tsf.2008.01.019 / Thin Solid Films by Chang (2008)
10.1016/j.surfcoat.2009.10.049 / Surface and Coatings Technology by Braic (2010)
10.1016/S0040-6090(98)01364-9 / Thin Solid Films by Zhou (1999)
10.1016/S0257-8972(03)00040-9 / Surface and Coatings Technology by Kimura (2003)
10.1063/1.370736 / Journal of Applied Physics by Kang (1999)
10.1016/j.jallcom.2010.12.026 / Journal of Alloys and Compounds by Tsai (2011)
10.1063/1.1567797 / Journal of Applied Physics by Gall (2003)
10.1063/1.114845 / Applied Physics Letters by Greene (1995)
10.1063/1.359720 / Journal of Applied Physics by Hultman (1995)
10.1016/j.surfcoat.2004.09.012 / Surface and Coatings Technology by Mahieu (2006)
10.1016/j.surfcoat.2009.01.016 / Surface and Coatings Technology by Huang (2009)
{'year': '1997', 'author': 'Weimer', 'series-title': 'Carbide, Nitride and Boride Materials Synthesis and Processing', 'key': '10.1016/j.apsusc.2013.06.057_bib0180'} / Carbide, Nitride and Boride Materials Synthesis and Processing by Weimer (1997)
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{'year': '1971', 'author': 'Toth', 'series-title': 'Transition Metal Carbides and Nitrides', 'key': '10.1016/j.apsusc.2013.06.057_bib0190'} / Transition Metal Carbides and Nitrides by Toth (1971)

Dates

Type	When
Created	12 years, 2 months ago (June 18, 2013, 6:32 p.m.)
Deposited	6 years, 10 months ago (Oct. 14, 2018, 9:52 p.m.)
Indexed	2 days, 2 hours ago (Aug. 26, 2025, 2:43 a.m.)
Issued	11 years, 10 months ago (Oct. 1, 2013)
Published	11 years, 10 months ago (Oct. 1, 2013)
Published Print	11 years, 10 months ago (Oct. 1, 2013)

Funders 1

National Science Council of Taiwan 10.13039/501100001868 National Science Council
Region: Asia
gov (National government)
Labels3
1. National Science Council, Taiwan
2. National Science Council of Taiwan
3. NSC
Awards1
1. NSC100-2221-E-005-034-MY3

BibTeX

@article{Tsai_2013, title={Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering}, volume={282}, ISSN={0169-4332}, url={http://dx.doi.org/10.1016/j.apsusc.2013.06.057}, DOI={10.1016/j.apsusc.2013.06.057}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={Tsai, Du-Cheng and Chang, Zue-Chin and Kuo, Bing-Hau and Shiao, Ming-Hua and Chang, Shou-Yi and Shieu, Fuh-Sheng}, year={2013}, month=oct, pages={789–797} }

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      "name": "articletitle",
      "label": "Article Title"
    },
    {
      "value": "Applied Surface Science",
      "name": "journaltitle",
      "label": "Journal Title"
    },
    {
      "value": "https://doi.org/10.1016/j.apsusc.2013.06.057",
      "name": "articlelink",
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    },
    {
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    },
    {
      "value": "Copyright \u00a9 2013 Elsevier B.V. All rights reserved.",
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      "label": "Copyright"
    }
  ]
}