DOI: 10.1016/j.apsusc.2011.08.116. Effect of deposition and annealing temperature on mechanical properties of TaN film

Effect of deposition and annealing temperature on mechanical properties of TaN film

10.1016/j.apsusc.2011.08.116

Crossref journal-article

Elsevier BV

Applied Surface Science (78)

Bibliography

Liu, X., Ma, G. J., Sun, G., Duan, Y. P., & Liu, S. H. (2011). Effect of deposition and annealing temperature on mechanical properties of TaN film. Applied Surface Science, 258(3), 1033â1037.

Authors 5

X. Liu (first)
G.J. Ma (additional)
G. Sun (additional)
Y.P. Duan (additional)
S.H. Liu (additional)

References 28 Referenced 45

10.1016/S0257-8972(01)01416-5 / Surf. Coat. Technol. by Bemporad (2001)
10.1016/S0924-0136(02)00123-1 / J. Mater. Process. Technol. by Ma (2002)
10.1016/S0257-8972(96)02951-9 / Surf. Coat. Technol. by Gautier (1996)
{'key': '10.1016/j.apsusc.2011.08.116_bib0020', 'series-title': 'Handbook of Tribology', 'author': 'Bushan', 'year': '1991'} / Handbook of Tribology by Bushan (1991)
10.1016/j.tsf.2004.08.059 / Thin Solid Films by Kim (2005)
10.1016/S0040-6090(01)01448-1 / Thin Solid Films by Leng (2001)
10.1016/j.surfcoat.2006.08.085 / Surf. Coat. Technol. by Aryasomayajula (2006)
10.1116/1.590533 / J. Vac. Sci. Technol. B by Chen (1999)
10.1063/1.361518 / J. Appl. Phys. by Tsai (1996)
{'key': '10.1016/j.apsusc.2011.08.116_bib0050', 'series-title': 'Physics and Chemistry of Protective Coatings', 'author': 'Sundgren', 'year': '1986'} / Physics and Chemistry of Protective Coatings by Sundgren (1986)
10.1016/S0040-6090(01)01618-2 / Thin Solid Films by Shin (2002)
10.1016/j.surfcoat.2006.07.207 / Surf. Coat. Technol. by Lee (2007)
10.1016/S0040-6090(97)01078-X / Thin Solid Films by Lee (1998)
10.1016/S0257-8972(95)02799-8 / Surf. Coat. Technol. by Baba (1996)
10.1016/j.tsf.2004.05.070 / Thin Solid Films by Yang (2004)
10.1016/S0921-5107(00)00380-9 / Mater. Sci. Eng. B by Kang (2000)
10.1016/S0040-6090(02)00342-5 / Thin Solid Films by Chang (2002)
10.1016/S0921-5107(98)00177-9 / Mater. Sci. Eng. B by Kerrec (1998)
10.1016/j.elspec.2004.02.060 / J. Electron Spectrosc. Relat. Phenom. by Zier (2004)
10.1016/j.apsusc.2007.01.128 / Appl. Surf. Sci. by Li (2007)
10.1016/S0040-6090(97)00914-0 / Thin Solid Films by Chuang (1998)
10.1007/s00339-004-3182-0 / Appl. Phys. A by Arranz (2005)
10.1016/j.tsf.2006.01.060 / Thin Solid Films by Banakh (2006)
10.1016/j.scriptamat.2005.12.027 / Scripta Mater. by Zhang (2006)
10.1016/S0257-8972(97)00338-1 / Surf. Coat. Technol. by Westergard (1997)
10.1016/S0168-583X(96)01151-2 / Nucl. Instrum. Methods Phys. Res. B by Zhang (1997)
10.1016/j.tsf.2004.11.196 / Thin Solid Films by Chen (2000)
10.1016/S0257-8972(99)00606-4 / Surf. Coat. Technol. by Patsalas (2000)

Dates

Type	When
Created	13 years, 11 months ago (Sept. 20, 2011, 6:17 a.m.)
Deposited	6 years, 9 months ago (Nov. 29, 2018, 7:55 p.m.)
Indexed	2 months, 4 weeks ago (June 2, 2025, 4:27 a.m.)
Issued	13 years, 10 months ago (Nov. 1, 2011)
Published	13 years, 10 months ago (Nov. 1, 2011)
Published Print	13 years, 10 months ago (Nov. 1, 2011)

Funders 0

None

BibTeX

@article{Liu_2011, title={Effect of deposition and annealing temperature on mechanical properties of TaN film}, volume={258}, ISSN={0169-4332}, url={http://dx.doi.org/10.1016/j.apsusc.2011.08.116}, DOI={10.1016/j.apsusc.2011.08.116}, number={3}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={Liu, X. and Ma, G.J. and Sun, G. and Duan, Y.P. and Liu, S.H.}, year={2011}, month=nov, pages={1033–1037} }

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