DOI: 10.1016/j.apsusc.2006.02.059. The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film

The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film

10.1016/j.apsusc.2006.02.059

Crossref journal-article

Elsevier BV

Applied Surface Science (78)

Bibliography

Wang, X. B., Song, C., Li, D. M., Geng, K. W., Zeng, F., & Pan, F. (2006). The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film. Applied Surface Science, 253(3), 1639â1643.

Authors 6

X.B. Wang (first)
C. Song (additional)
D.M. Li (additional)
K.W. Geng (additional)
F. Zeng (additional)
F. Pan (additional)

References 33 Referenced 107

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Dates

Type	When
Created	19 years, 4 months ago (April 5, 2006, 11:29 a.m.)
Deposited	3 years, 1 month ago (June 26, 2022, 10:25 a.m.)
Indexed	3 weeks, 5 days ago (July 27, 2025, 3:52 a.m.)
Issued	18 years, 9 months ago (Nov. 1, 2006)
Published	18 years, 9 months ago (Nov. 1, 2006)
Published Print	18 years, 9 months ago (Nov. 1, 2006)

Funders 0

None

BibTeX

@article{Wang_2006, title={The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film}, volume={253}, ISSN={0169-4332}, url={http://dx.doi.org/10.1016/j.apsusc.2006.02.059}, DOI={10.1016/j.apsusc.2006.02.059}, number={3}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={Wang, X.B. and Song, C. and Li, D.M. and Geng, K.W. and Zeng, F. and Pan, F.}, year={2006}, month=nov, pages={1639–1643} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        27
      ]
    ],
    "date-time": "2025-07-27T07:52:54Z",
    "timestamp": 1753602774030
  },
  "reference-count": 33,
  "publisher": "Elsevier BV",
  "issue": "3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2006,
            11,
            1
          ]
        ],
        "date-time": "2006-11-01T00:00:00Z",
        "timestamp": 1162339200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2006,
        11
      ]
    ]
  },
  "DOI": "10.1016/j.apsusc.2006.02.059",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        4,
        5
      ]
    ],
    "date-time": "2006-04-05T15:29:05Z",
    "timestamp": 1144250945000
  },
  "page": "1639-1643",
  "source": "Crossref",
  "is-referenced-by-count": 107,
  "title": "The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film",
  "prefix": "10.1016",
  "volume": "253",
  "author": [
    {
      "given": "X.B.",
      "family": "Wang",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "C.",
      "family": "Song",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "D.M.",
      "family": "Li",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "K.W.",
      "family": "Geng",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F.",
      "family": "Zeng",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F.",
      "family": "Pan",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib1",
      "doi-asserted-by": "crossref",
      "first-page": "2678",
      "DOI": "10.1143/JJAP.34.2678",
      "volume": "34",
      "author": "Koike",
      "year": "1995",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "6083",
      "DOI": "10.1143/JJAP.36.6083",
      "volume": "36",
      "author": "Kobayashi",
      "year": "1997",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "3004",
      "DOI": "10.1143/JJAP.39.3004",
      "volume": "39",
      "author": "Kaneshiro",
      "year": "2000",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "S96",
      "DOI": "10.1088/0268-1242/18/3/314",
      "volume": "18",
      "author": "Nakahata",
      "year": "2003",
      "journal-title": "Semicond. Sci. Technol."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "362",
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      "volume": "42",
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      "year": "1995",
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    {
      "key": "10.1016/j.apsusc.2006.02.059_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "581",
      "DOI": "10.1016/j.diamond.2003.10.075",
      "volume": "13",
      "author": "Lamara",
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    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib7",
      "doi-asserted-by": "crossref",
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      "key": "10.1016/j.apsusc.2006.02.059_bib8",
      "doi-asserted-by": "crossref",
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      "key": "10.1016/j.apsusc.2006.02.059_bib9",
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      "key": "10.1016/j.apsusc.2006.02.059_bib10",
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    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "L534",
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      "volume": "39",
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      "key": "10.1016/j.apsusc.2006.02.059_bib12",
      "doi-asserted-by": "crossref",
      "first-page": "041301",
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      "volume": "98",
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      "year": "2005",
      "journal-title": "J. Appl. Phys."
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      "key": "10.1016/j.apsusc.2006.02.059_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "L74",
      "DOI": "10.1088/0022-3727/35/16/102",
      "volume": "35",
      "author": "Wang",
      "year": "2002",
      "journal-title": "J. Phys. D, Appl. Phys."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "20",
      "DOI": "10.1016/S0022-0248(02)01866-3",
      "volume": "248",
      "author": "Kirchner",
      "year": "2003",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib15",
      "doi-asserted-by": "crossref",
      "first-page": "2787",
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      "volume": "49",
      "author": "Maniv",
      "year": "1978",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "943",
      "DOI": "10.1088/0022-3727/31/8/004",
      "volume": "31",
      "author": "Wu",
      "year": "1998",
      "journal-title": "J. Phys. D, Appl. Phys."
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    {
      "key": "10.1016/j.apsusc.2006.02.059_bib17",
      "doi-asserted-by": "crossref",
      "first-page": "280",
      "DOI": "10.1016/S0022-0248(03)01452-0",
      "volume": "257",
      "author": "Chu",
      "year": "2003",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib18",
      "doi-asserted-by": "crossref",
      "first-page": "291",
      "DOI": "10.1016/0040-6090(87)90102-7",
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      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib19",
      "doi-asserted-by": "crossref",
      "first-page": "R17",
      "DOI": "10.1088/0022-3727/33/4/201",
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      "journal-title": "J. Phys. D: Appl. Phys."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib20",
      "doi-asserted-by": "crossref",
      "first-page": "273",
      "DOI": "10.1016/j.apsusc.2004.10.035",
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      "year": "2005",
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    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib21",
      "doi-asserted-by": "crossref",
      "first-page": "318",
      "DOI": "10.1016/j.apsusc.2003.09.015",
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      "year": "2004",
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    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib22",
      "doi-asserted-by": "crossref",
      "first-page": "671",
      "DOI": "10.1002/(SICI)1096-9918(19960916)24:9<671::AID-SIA165>3.0.CO;2-D",
      "volume": "24",
      "author": "Hartmann",
      "year": "1996",
      "journal-title": "Surf. Interface Anal."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib23",
      "doi-asserted-by": "crossref",
      "first-page": "257",
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      "key": "10.1016/j.apsusc.2006.02.059_bib24",
      "doi-asserted-by": "crossref",
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      "doi-asserted-by": "crossref",
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      "year": "1989",
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      "doi-asserted-by": "crossref",
      "first-page": "758",
      "DOI": "10.1002/(SICI)1096-9918(199809)26:10<758::AID-SIA425>3.0.CO;2-B",
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    },
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      "doi-asserted-by": "crossref",
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    },
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      "key": "10.1016/j.apsusc.2006.02.059_bib29",
      "doi-asserted-by": "crossref",
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      "volume": "244",
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      "first-page": "430",
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      "journal-title": "Solid State Commun."
    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib31",
      "doi-asserted-by": "crossref",
      "first-page": "431",
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    {
      "key": "10.1016/j.apsusc.2006.02.059_bib32",
      "doi-asserted-by": "crossref",
      "first-page": "630",
      "DOI": "10.1109/T-SU.1985.31646",
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    },
    {
      "key": "10.1016/j.apsusc.2006.02.059_bib33",
      "doi-asserted-by": "crossref",
      "first-page": "184101",
      "DOI": "10.1103/PhysRevB.70.184101",
      "volume": "70",
      "author": "Kalilin",
      "year": "2004",
      "journal-title": "Phys. Rev. B"
    }
  ],
  "container-title": "Applied Surface Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0169433206002467?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0169433206002467?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        6,
        26
      ]
    ],
    "date-time": "2022-06-26T14:25:02Z",
    "timestamp": 1656253502000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0169433206002467"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2006,
        11
      ]
    ]
  },
  "references-count": 33,
  "journal-issue": {
    "issue": "3",
    "published-print": {
      "date-parts": [
        [
          2006,
          11
        ]
      ]
    }
  },
  "alternative-id": [
    "S0169433206002467"
  ],
  "URL": "http://dx.doi.org/10.1016/j.apsusc.2006.02.059",
  "relation": {},
  "ISSN": [
    "0169-4332"
  ],
  "subject": [],
  "container-title-short": "Applied Surface Science",
  "published": {
    "date-parts": [
      [
        2006,
        11
      ]
    ]
  }
}