DOI: 10.1016/j.apsusc.2004.07.061. Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film

Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film

10.1016/j.apsusc.2004.07.061

Crossref journal-article

Elsevier BV

Applied Surface Science (78)

Bibliography

Liu, B., Song, Z., Zhang, T., Feng, S., & Chen, B. (2005). Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film. Applied Surface Science, 242(1â2), 62â69.

Authors 5

Bo Liu (first)
Zhitang Song (additional)
Ting Zhang (additional)
Songlin Feng (additional)
Bomy Chen (additional)

References 36 Referenced 43

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10.1109/23.903803 / IEEE Trans. Nuc. Sci. by Bernacki (2000)
{'key': '10.1016/j.apsusc.2004.07.061_bib9', 'series-title': 'Symposium on VLSI technology Digest of Technical Papers', 'first-page': '173', 'author': 'Hwang', 'year': '2003'} / Symposium on VLSI technology Digest of Technical Papers by Hwang (2003)
{'key': '10.1016/j.apsusc.2004.07.061_bib10', 'series-title': 'Symposium on VLSI technology Digest of Technical Papers', 'first-page': '175', 'author': 'Ha', 'year': '2003'} / Symposium on VLSI technology Digest of Technical Papers by Ha (2003)
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Dates

Type	When
Created	20 years, 10 months ago (Sept. 28, 2004, 1:43 p.m.)
Deposited	6 years, 6 months ago (Feb. 3, 2019, 8:50 a.m.)
Indexed	1 year, 2 months ago (June 21, 2024, 1:07 a.m.)
Issued	20 years, 5 months ago (March 1, 2005)
Published	20 years, 5 months ago (March 1, 2005)
Published Print	20 years, 5 months ago (March 1, 2005)

Funders 0

None

BibTeX

@article{Liu_2005, title={Effect of O-implantation on the structure and resistance of Ge2Sb2Te5 film}, volume={242}, ISSN={0169-4332}, url={http://dx.doi.org/10.1016/j.apsusc.2004.07.061}, DOI={10.1016/j.apsusc.2004.07.061}, number={1–2}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={Liu, Bo and Song, Zhitang and Zhang, Ting and Feng, Songlin and Chen, Bomy}, year={2005}, month=mar, pages={62–69} }

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