DOI: 10.1016/s1526-6125(04)70064-x. LIGA Microsystems: Surface Interactions, Tribology, and Coatings

LIGA Microsystems: Surface Interactions, Tribology, and Coatings

10.1016/s1526-6125(04)70064-x

Crossref journal-article

Elsevier BV

Journal of Manufacturing Processes (78)

Bibliography

Prasad, S. V., Dugger, M. T., Christenson, T. R., & Tallant, D. R. (2004). LIGA Microsystems: Surface Interactions, Tribology, and Coatings. Journal of Manufacturing Processes, 6(1), 107â116.

Authors 4

Somuri V. Prasad (first)
Michael T. Dugger (additional)
Todd R. Christenson (additional)
David R. Tallant (additional)

References 12 Referenced 13

{'key': '10.1016/S1526-6125(04)70064-X_bib1', 'series-title': 'The Friction and Lubrication of Solids', 'author': 'Bowden', 'year': '1986'} / The Friction and Lubrication of Solids by Bowden (1986)
{'key': '10.1016/S1526-6125(04)70064-X_bib2', 'first-page': '5539', 'article-title': 'Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures', 'volume': '33A', 'author': 'Buchheit', 'year': '2002', 'journal-title': 'Metall. Mater. Trans. A'} / Metall. Mater. Trans. A / Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures by Buchheit (2002)
{'key': '10.1016/S1526-6125(04)70064-X_bib3', 'series-title': 'X-ray based fabrication.”MEMS Handbook', 'author': 'Christenson', 'year': '2001'} / X-ray based fabrication.”MEMS Handbook by Christenson (2001)
Ghica, V. and Glashauser, W. (1983). “Method of stress-free development of irradiated poly methylmethacrylate.” U.S. Patent 4,393,129.
Hall, A.C. Christensen, T.R.; Prasad, S.V.; Dugger, M.T.; and Widmer, M. (in press). “Sidewall morphology of electroformed LIGA parts – implications for friction, adhesion, and wear control”. Journal of Micromech. Microeng.
10.1557/mrs2001.76 / MRS Bulletin / LIGA technologies and applications by Hruby (2001)
10.1016/S0257-8972(99)00003-1 / Surface and Coatings Technology / Sliding wear behavior of diamond-like nanocomposite coatings by Kester (1999)
Prasad, S.V.; Hall, A.C.; and Dugger, M.T. (2000). “Characterization of sidewall and planar surfaces of electroplated LIGA parts”. SAND Report, SAND2000-1702 (Oct. 2000).
10.1016/S1359-6462(02)00376-7 / Scripta Materialia / EBSD studies on wear-induced subsurface regions in LIGA nickel by Prasad (2003)
10.1016/0141-6359(92)90053-Y / Precision Engg. / Comparison between precision roughness master specimens and their electroformed replicas by Song (1992)
10.1016/S1359-6454(99)00294-3 / Acta Mater. / Materials issues in microelectromechanical systems (MEMS) by Spearing (2000)
{'key': '10.1016/S1526-6125(04)70064-X_bib12', 'series-title': 'Surface Modifications Technologies IX', 'article-title': 'Diamond like nanocomposite coatings – a new class of materials', 'author': 'Venkatraman', 'year': '1996'} / Surface Modifications Technologies IX / Diamond like nanocomposite coatings – a new class of materials by Venkatraman (1996)

Dates

Type	When
Created	16 years, 11 months ago (Sept. 18, 2008, 12:28 p.m.)
Deposited	6 years, 7 months ago (Dec. 25, 2018, 10:57 a.m.)
Indexed	11 months, 2 weeks ago (Sept. 4, 2024, 12:59 p.m.)
Issued	21 years, 7 months ago (Jan. 1, 2004)
Published	21 years, 7 months ago (Jan. 1, 2004)
Published Print	21 years, 7 months ago (Jan. 1, 2004)

Funders 0

None

BibTeX

@article{Prasad_2004, title={LIGA Microsystems: Surface Interactions, Tribology, and Coatings}, volume={6}, ISSN={1526-6125}, url={http://dx.doi.org/10.1016/s1526-6125(04)70064-x}, DOI={10.1016/s1526-6125(04)70064-x}, number={1}, journal={Journal of Manufacturing Processes}, publisher={Elsevier BV}, author={Prasad, Somuri V. and Dugger, Michael T. and Christenson, Todd R. and Tallant, David R.}, year={2004}, month=jan, pages={107–116} }

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