DOI: 10.1016/s1369-8001(00)00013-5. Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data

Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data

10.1016/s1369-8001(00)00013-5

Crossref journal-article

Elsevier BV

Materials Science in Semiconductor Processing (78)

Bibliography

Jaraiz, M., Rubio, E., Castrillo, P., Pelaz, L., Bailon, L., Barbolla, J., Gilmer, G. H., & Rafferty, C. S. (2000). Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data. Materials Science in Semiconductor Processing, 3(1â2), 59â63.

Authors 8

M Jaraiz (first)
E Rubio (additional)
P Castrillo (additional)
L Pelaz (additional)
L Bailon (additional)
J Barbolla (additional)
G.H Gilmer (additional)
C.S Rafferty (additional)

References 11 Referenced 8

National Technology Roadmap for Semiconductors 1997. p. 188
10.1063/1.364452 / J. Appl. Phys. by Stolk (1997)
10.1103/PhysRevB.54.4741 / Phys. Ref. B by Zhu (1996)
10.1557/PROC-532-43 / Mater. Res. Soc. Symp. Proc. by Jaraiz (1998)
10.1063/1.116701 / App. Phys. Lett. by Jaraiz (1996)
10.1063/1.118839 / Appl. Phys. Lett. by Pelaz (1997)
10.1063/1.121963 / Appl. Phys. Lett. by Pelaz (1998)
10.1063/1.123742 / Appl. Phys. Lett. by Pelaz (1999)
10.1557/PROC-514-127 / Mater. Res. Soc. Symp. Proc. by Rubio (1998)
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Rubio E, Jaraiz M, Bailon L, Barbolla J. (Unpublished).

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 6:32 p.m.)
Deposited	6 years, 5 months ago (March 9, 2019, 10:55 a.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 1:01 a.m.)
Issued	25 years, 5 months ago (March 1, 2000)
Published	25 years, 5 months ago (March 1, 2000)
Published Print	25 years, 5 months ago (March 1, 2000)

Funders 0

None

BibTeX

@article{Jaraiz_2000, title={Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data}, volume={3}, ISSN={1369-8001}, url={http://dx.doi.org/10.1016/s1369-8001(00)00013-5}, DOI={10.1016/s1369-8001(00)00013-5}, number={1–2}, journal={Materials Science in Semiconductor Processing}, publisher={Elsevier BV}, author={Jaraiz, M and Rubio, E and Castrillo, P and Pelaz, L and Bailon, L and Barbolla, J and Gilmer, G.H and Rafferty, C.S}, year={2000}, month=mar, pages={59–63} }

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