DOI: 10.1016/s1359-6454(99)00294-3. Materials issues in microelectromechanical systems (MEMS)

Materials issues in microelectromechanical systems (MEMS)

10.1016/s1359-6454(99)00294-3

Crossref journal-article

Elsevier BV

Acta Materialia (78)

Bibliography

Spearing, S. M. (2000). Materials issues in microelectromechanical systems (MEMS). Acta Materialia, 48(1), 179â196.

Authors 1

S.M Spearing (first)

References 122 Referenced 558

{'key': '10.1016/S1359-6454(99)00294-3_BIB1', 'first-page': '1534', 'volume': '86', 'author': 'Gabriel', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Gabriel (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB2', 'first-page': '64', 'volume': '118', 'author': 'Paula', 'year': '1996', 'journal-title': 'Mech. Engng'} / Mech. Engng by Paula (1996)
10.1109/3516.712113 / IEEE–ASME Trans. Mechatronics by Horsley (1998)
10.1126/science.276.5316.1211 / Science by Epstein (1997)
Srinivasan, R., Firebaugh, S. L., Hsing, I.-M., Ryley, J., Harold, M. P., Jensen, K. F. and Schmidt, M. A., Proceedings, Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, June 1997, pp. 163–166.
Bisson, C., Campbell, J., Cheadle, R., Chomiak, M., Lee, J., Miller, C., Milley, C., Pialis, P., Shaw, S., Weiss, W. and Widrig, C., Proceedings, Solid State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 8–11 June 1998, pp. 1–6. (10.31438/trf.hh1998.1)
10.1021/js980042+ / J. Pharmaceut. Sci. by Henry (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB8', 'first-page': '12', 'volume': '4', 'author': 'Berlin', 'year': '1997', 'journal-title': 'I.E.E.E. Comput. Sci. Engng'} / I.E.E.E. Comput. Sci. Engng by Berlin (1997)
10.1007/s11837-998-0066-3 / JOM by Olivas (1998)
10.1016/S1359-6454(98)00231-6 / Acta mater. by Arzt (1998)
Bhusan, B. (ed.), Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, OH, 9–11 November 1997. Kluwer, Dordrecht, 1998. (10.1007/978-94-011-5050-7)
{'volume': 'Vol. 518', 'year': '1998', 'series-title': 'Microelectromechanical Structures for Materials Research', 'key': '10.1016/S1359-6454(99)00294-3_BIB12'} / Microelectromechanical Structures for Materials Research (1998)
{'volume': 'Vol. 546', 'year': '1999', 'series-title': 'Materials Science of Microelectromechanical Systems (MEMS) Devices', 'key': '10.1016/S1359-6454(99)00294-3_BIB13'} / Materials Science of Microelectromechanical Systems (MEMS) Devices (1999)
{'volume': 'Vol. 86', 'year': '1998', 'series-title': 'Integrated Sensors, Microactuators, and Microsystems (MEMS)', 'key': '10.1016/S1359-6454(99)00294-3_BIB14'} / Integrated Sensors, Microactuators, and Microsystems (MEMS) (1998)
{'volume': 'Vol. 6', 'year': '1998', 'series-title': 'Handbook of Sensors and Actuators', 'key': '10.1016/S1359-6454(99)00294-3_BIB15'} / Handbook of Sensors and Actuators (1998)
{'year': '1997', 'series-title': 'Micromechanics and MEMS: Classic and Seminal Papers to 1990', 'key': '10.1016/S1359-6454(99)00294-3_BIB16'} / Micromechanics and MEMS: Classic and Seminal Papers to 1990 (1997)
{'year': '1997', 'series-title': 'Fundamentals of Microfabrication', 'author': 'Madou', 'key': '10.1016/S1359-6454(99)00294-3_BIB17'} / Fundamentals of Microfabrication by Madou (1997)
10.1115/1.3173068 / J. appl. Mech. by Freund (1987)
10.1007/BF02666659 / Metall. Trans. by Nix (1989)
10.1557/JMR.1998.0186 / J. Mater. Res. by Keller (1998)
10.1016/0956-7151(90)90223-4 / Acta metall. by Rösler (1990)
10.1002/9780470294444.ch2 / Ceram. Engng Sci. Proc. by Spearing (1997)
{'key': '10.1016/S1359-6454(99)00294-3_BIB23', 'first-page': '1552', 'volume': '86', 'author': 'Bustillo', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Bustillo (1998)
Souloff, R. E., Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, OH, 9–11 November 1997, ed. B. Bhusan. Kluwer, Dordrecht, 1998.
{'key': '10.1016/S1359-6454(99)00294-3_BIB25', 'first-page': '1687', 'volume': '86', 'author': 'Van Kessel', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Van Kessel (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB26', 'first-page': '1536', 'volume': '86', 'author': 'Kovacs', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Kovacs (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB27', 'first-page': '1627', 'volume': '86', 'author': 'Esashi', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Esashi (1998)
10.1063/1.89587 / Appl. Phys. Lett. by Bassous (1977)
{'key': '10.1016/S1359-6454(99)00294-3_BIB29', 'series-title': 'Micromechanics and MEMS: Classic and Seminal Papers to 1990', 'first-page': '623', 'author': 'Ehrfeld', 'year': '1997'} / Micromechanics and MEMS: Classic and Seminal Papers to 1990 by Ehrfeld (1997)
{'key': '10.1016/S1359-6454(99)00294-3_BIB30', 'first-page': '363', 'volume': '10', 'author': 'Mohr', 'year': '1998', 'journal-title': 'Sensors Mater.'} / Sensors Mater. by Mohr (1998)
10.1007/s005420050139 / Microsyst. Technol. by Ruprecht (1998)
10.1007/s005420050121 / Microsyst. Technol. by Chaudhuri (1998)
Keller, C. G. and Howe, R. T., Transducers '95, Stockholm, Sweden, 1995, pp. 99–102. (10.1109/SENSOR.1995.717102)
Hui, E. E., Keller, C. G. and Howe, R. T., Solid-State Sensor and Actuator Workshop, South Carolina, 8–11 June 1998, pp. 256– 260. (10.31438/trf.hh1998.58)
Dewa, A. S., Deng, K., Ritter, D. C., Bonham, C. and Guckel, H., Proc. Transducers '97. IEEE, 1997, pp. 757–760.
{'key': '10.1016/S1359-6454(99)00294-3_BIB36', 'series-title': 'Fundamentals of Microfabrication', 'first-page': '405', 'author': 'Madou', 'year': '1997'} / Fundamentals of Microfabrication by Madou (1997)
{'year': '1992', 'series-title': 'Materials Selection in Mechanical Design', 'author': 'Ashby', 'key': '10.1016/S1359-6454(99)00294-3_BIB37'} / Materials Selection in Mechanical Design by Ashby (1992)
10.1023/A:1003233715362 / J. appl. Electrochem. by Saito (1998)
10.1023/A:1006528229614 / J. Mater. Sci. Lett. by Balaraju (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB40', 'first-page': '1594', 'volume': '86', 'author': 'Mehregany', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Mehregany (1998)
{'year': '1997', 'series-title': 'Silicon Carbide, a Review of Fundamental Questions and Applications to Current Device Technology I', 'key': '10.1016/S1359-6454(99)00294-3_BIB41'} / Silicon Carbide, a Review of Fundamental Questions and Applications to Current Device Technology I (1997)
{'year': '1997', 'series-title': 'Silicon Carbide, a Review of Fundamental Questions and Applications to Current Device Technology II', 'key': '10.1016/S1359-6454(99)00294-3_BIB42'} / Silicon Carbide, a Review of Fundamental Questions and Applications to Current Device Technology II (1997)
10.1016/0022-0248(93)90348-Z / J. Cryst. Growth by Barrett (1993)
Okojie, R. S., Ned, A. A. and Kurtz, A. D., Proc. Transducers '97. IEEE, 1997, pp. 1407–1418.
Rajan, N., Mehregany, M., Zorman, C. A. and Kicher, T. P., Proc. Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 1998, pp. 31–34. (10.31438/trf.hh1998.8)
10.1016/S0924-4247(98)00111-3 / Sensors Actuators A by Flannery (1998)
10.1557/S0883769400029316 / MRS Bull. by Butler (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB48', 'first-page': '1', 'volume': '11', 'author': 'Kitabatake', 'year': '1999', 'journal-title': 'Sensors Mater.'} / Sensors Mater. by Kitabatake (1999)
Boone, T. D., Hooper, H. H. and Soane, D. S., Proceedings Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 1988, pp. 87–92.
10.1088/2058-7058/11/5/30 / Physics World by Brittain (1998)
Epstein, A. H., Senturia, S. D., Al-Midani, O., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K.-S., Ehrich, F.E., Esteve, E., Frechette, L., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Kerrebrock, J. L., Lang, J. H., Lin, C.-C., London, A., Lopata, J., Mehra, A., MurMiranda, J. O., Nagle, S., Orr, D.J., Piekos, E., Schmidt, M.A., Shirley, G., Spearing, S.M., Tan, C. S., Tzeng, Y.-S. and Waitz, I., AIAA Paper AIAA-97-1773, Presented at 28th AIAA Fluid Dynamics Conference/4th AIAA Shear Flow Control Conference, Snowmass Village, CO, 29 June–2 July 1997. (10.2514/6.1997-1773)
10.1016/0924-4247(90)85065-C / Sensors Actuators A by Tang (1990)
10.1109/84.661380 / J. Microelectromech. Syst. by Ye (1998)
10.1109/16.155878 / I.E.E.E. Trans. Electronic Devices by Mehregany (1992)
10.1109/55.506369 / I.E.E.E. Electronic Device Lett. by Sniegowski (1996)
10.1109/41.735330 / I.E.E.E. Trans. Ind. Electronics by Ahn (1998)
10.1088/0960-1317/8/4/008 / J. Micromech. Microengng by Park (1998)
10.1016/0924-4247(92)80168-3 / J. Sensors Actuators A by Busch-Vishniac (1992)
10.1109/84.128055 / J. Microelectromech. Syst. by Flynn (1992)
10.1557/PROC-518-9 / Mater. Res. Soc. Symp. Proc. by Yoshino (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB61', 'first-page': '375', 'volume': '10', 'author': 'Wang', 'year': '1998', 'journal-title': 'Sensors Mater.'} / Sensors Mater. by Wang (1998)
Hirata, Y. H., Okuyama, S., Numazawa, T. and Takada, H., Proc. IEEE Micro Electromechanical Systems (MEMS '95), Amsterdam, The Netherlands, 1995, pp. 191–195.
10.1007/s003480050262 / Exp. Fluids by Lee (1999)
Krulevitch, P., Lee, A. P., Ramsey, P. B., Trevino, J. and Northrup, M. A., DSC 59 Microelectromechanical Systems (MEMS), ASME, 1996, pp. 301–306. (10.1115/IMECE1996-1365)
10.1088/0960-1317/8/3/007 / J. Micromech. Microengng by Kahn (1998)
10.1016/0924-4247(94)80023-5 / Sensors Actuators A by Rombach (1994)
10.1016/S0925-4005(98)00265-2 / Sensors Actuators B by Tian (1998)
10.1557/S0883769400029316 / MRS Bull. by Butler (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB69', 'first-page': '377', 'volume': '141', 'author': 'Palmour', 'year': '1995', 'journal-title': 'Compound Semiconductors'} / Compound Semiconductors by Palmour (1995)
10.1143/JJAP.36.7691 / Japan J. appl. Phys., Pt 1 by Taniguchi (1997)
{'year': '1994', 'series-title': 'VLSI Fabrication Principles: Silicon and Gallium Arsenide', 'key': '10.1016/S1359-6454(99)00294-3_BIB71'} / VLSI Fabrication Principles: Silicon and Gallium Arsenide (1994)
{'key': '10.1016/S1359-6454(99)00294-3_BIB72', 'first-page': '67', 'volume': '38', 'author': 'Rembetski', 'year': '1995', 'journal-title': 'Solid St. Technol.'} / Solid St. Technol. by Rembetski (1995)
10.1149/1.1391611 / J. Electrochem. Soc. by Ayon (1999)
10.1116/1.588254 / J. Vacuum Sci. Technol. B by Daschner (1995)
{'key': '10.1016/S1359-6454(99)00294-3_BIB75', 'first-page': '1575', 'volume': '86', 'author': 'Schmidt', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Schmidt (1998)
{'year': '1998', 'series-title': 'Semiconductor Wafer Bonding: Science and Technology', 'author': 'Tong', 'key': '10.1016/S1359-6454(99)00294-3_BIB76'} / Semiconductor Wafer Bonding: Science and Technology by Tong (1998)
10.1016/0167-9317(93)90178-8 / Microelectron. Engng by Maszara (1993)
{'key': '10.1016/S1359-6454(99)00294-3_BIB78', 'first-page': '841', 'volume': '21', 'author': 'Bengtsson', 'year': '1992', 'journal-title': 'Electron. Mater.'} / Electron. Mater. by Bengtsson (1992)
10.1016/0924-4247(93)00653-L / Sensors Actuators A by Wolffenbuttel (1994)
{'year': '1994', 'series-title': 'Sensor Technology and Devices', 'key': '10.1016/S1359-6454(99)00294-3_BIB80'} / Sensor Technology and Devices (1994)
{'key': '10.1016/S1359-6454(99)00294-3_BIB81', 'series-title': 'Micromachining and Micropackaging of Transducers', 'first-page': '41', 'author': 'Ko', 'year': '1985'} / Micromachining and Micropackaging of Transducers by Ko (1985)
10.1063/1.332357 / J. appl. Phys. by Anthony (1983)
10.1149/1.2085575 / J. Electrochem. Soc. by Maszara (1991)
10.1063/1.352345 / J. appl. Phys. by Imthurn (1992)
10.1149/1.1838616 / J. Electrochem. Soc. by Gui (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB86', 'first-page': '63', 'volume': '36', 'author': 'Wiesner', 'year': '1993', 'journal-title': 'Solid St. Technol.'} / Solid St. Technol. by Wiesner (1993)
{'key': '10.1016/S1359-6454(99)00294-3_BIB87', 'first-page': '1611', 'volume': '86', 'author': 'Senturia', 'year': '1998', 'journal-title': 'Proc. I.E.E.E.'} / Proc. I.E.E.E. by Senturia (1998)
Senturia, S. D., Sensor Actuators A, 1998, 1. (10.1016/S0924-4247(97)01754-8)
{'key': '10.1016/S1359-6454(99)00294-3_BIB89', 'series-title': 'Micromechanics and MEMS: Classic and Seminal Papers to 1990', 'first-page': '659', 'author': 'Senturia', 'year': '1997'} / Micromechanics and MEMS: Classic and Seminal Papers to 1990 by Senturia (1997)
10.1109/84.585788 / J. Microelectromech. Syst. by Osterberg (1997)
10.1109/84.536620 / J. Microelectromech. Syst. by Wilson (1996)
10.1557/JMR.1992.3242 / J. Mater. Res. by Vlassak (1992)
10.1557/PROC-518-27 / Mater. Res. Soc. Symp. Proc. by Lu (1998)
10.1557/JMR.1992.3242 / J. Mater. Res. by Vlassak (1992)
Ziebart, V., Baltes, H. and Paul, O., Mater. Res. Soc. Symp. Proc., 1999, 546, 103. (10.1557/PROC-546-103)
10.1557/PROC-518-57 / Mater. Res. Soc. Symp. Proc. by Sharpe (1998)
Chen, K.-S., Ayon, A. A., Lohner, K. A., Kepets, M. A., Melconian, T. K. and Spearing, S. M., Mater. Res. Soc. Symp. Proc., 1999, 546, 51. (10.1557/PROC-546-21)
10.1016/S0921-5093(97)00176-7 / Mater. Sci. Engng A by Nix (1997)
10.1557/PROC-518-191 / Mater. Res. Soc. Symp. Proc. by Turner (1998)
10.1557/PROC-518-137 / Mater. Res. Soc. Symp. Proc. by Ballarini (1998)
Chen, K.-S., Ayon, A. and Spearing, S. M., J. Am. Ceram. Soc., in press
Sharpe, W. N., Turner, K. T. and Edwards, R. L., Exp. Mech., 1999, 39, 162 (10.1007/BF02323548)
10.1109/84.232603 / J. Microelectromech. Syst. by Huff (1993)
10.1080/00218468808071269 / J. Adhesion by Allen (1988)
10.1557/JMR.1994.1734 / J. Mater. Res. by Bagchi (1994)
Fitzgerald, A. M., Dauskardt, R. H. and Kenny, T. W., Proc. Transducers 99, Sendai, Japan, 1999, in press (10.1557/PROC-605-43)
{'key': '10.1016/S1359-6454(99)00294-3_BIB107', 'series-title': 'The Materials Science of Thin Films', 'first-page': '413', 'author': 'Ohring', 'year': '1992'} / The Materials Science of Thin Films by Ohring (1992)
{'key': '10.1016/S1359-6454(99)00294-3_BIB108', 'series-title': 'Thin Film Deposition: Principles and Practice', 'first-page': '196', 'author': 'Smith', 'year': '1995'} / Thin Film Deposition: Principles and Practice by Smith (1995)
10.1016/0956-7151(94)00444-M / Acta mater. by Evans (1995)
10.1063/1.98460 / Appl. Phys. Lett. by Allen (1987)
10.1016/S0040-6090(98)00952-3 / Thin Solid Films by Zhang (1998)
Hommel, M., Kraft, O., Arzt, E. and Baker, S. P., Mater. Res. Soc. Symp. Proc., 1999, 546, 133. (10.1557/PROC-546-133)
10.1557/PROC-518-81 / Mater. Res. Soc. Symp. Proc. by Cornella (1998)
{'key': '10.1016/S1359-6454(99)00294-3_BIB114', 'series-title': 'Tribology Issues and Opportunities in MEMS', 'first-page': '529', 'author': 'Muhlstein', 'year': '1998'} / Tribology Issues and Opportunities in MEMS by Muhlstein (1998)
Souloff, R. E., in Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, OH, 9–11 November 1997, ed. B. Bhusan. Kluwer, Dordrecht, 1998.
10.1109/55.506369 / I.E.E.E. Electron. Device Lett. by Sniegowski (1996)
Rymuza, Z., Microsystems Technologies, 1999, 5, 173 (10.1007/s005420050160)
10.1557/PROC-518-143 / Mater. Res. Soc. Symp. Proc. by Lee (1998)
Lin, C. C., Ghodssi, R., Ayon, A. A., Chen, D.-Y. and Schmidt, M. A., Solid-State Sensor and Actuator Workshop, Late News Poster Session Supplemental Digest, 1998, pp. 25–26. (10.31438/trf.hh1998A.13)
{'key': '10.1016/S1359-6454(99)00294-3_BIB120', 'first-page': '84', 'volume': '101', 'author': 'Whitesides', 'year': '1998', 'journal-title': 'Technol. Rev.'} / Technol. Rev. by Whitesides (1998)
{'year': '1992', 'series-title': 'Nanosystems, Molecular Machines, Manufacturing and Computation', 'author': 'Drexel', 'key': '10.1016/S1359-6454(99)00294-3_BIB121'} / Nanosystems, Molecular Machines, Manufacturing and Computation by Drexel (1992)
10.1557/PROC-518-161 / Mater. Res. Soc. Symp. Proc. by Tada (1998)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 5:23 p.m.)
Deposited	8 months, 3 weeks ago (Dec. 5, 2024, 8:45 a.m.)
Indexed	1 day, 19 hours ago (Aug. 30, 2025, 12:50 p.m.)
Issued	25 years, 8 months ago (Jan. 1, 2000)
Published	25 years, 8 months ago (Jan. 1, 2000)
Published Print	25 years, 8 months ago (Jan. 1, 2000)

Funders 0

None

BibTeX

@article{Spearing_2000, title={Materials issues in microelectromechanical systems (MEMS)}, volume={48}, ISSN={1359-6454}, url={http://dx.doi.org/10.1016/s1359-6454(99)00294-3}, DOI={10.1016/s1359-6454(99)00294-3}, number={1}, journal={Acta Materialia}, publisher={Elsevier BV}, author={Spearing, S.M}, year={2000}, month=jan, pages={179–196} }

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      "unstructured": "Bisson, C., Campbell, J., Cheadle, R., Chomiak, M., Lee, J., Miller, C., Milley, C., Pialis, P., Shaw, S., Weiss, W. and Widrig, C., Proceedings, Solid State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 8\u201311 June 1998, pp. 1\u20136.",
      "DOI": "10.31438/trf.hh1998.1"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "922",
      "DOI": "10.1021/js980042+",
      "volume": "87",
      "author": "Henry",
      "year": "1998",
      "journal-title": "J. Pharmaceut. Sci."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB8",
      "first-page": "12",
      "volume": "4",
      "author": "Berlin",
      "year": "1997",
      "journal-title": "I.E.E.E. Comput. Sci. Engng"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "38",
      "DOI": "10.1007/s11837-998-0066-3",
      "volume": "50",
      "author": "Olivas",
      "year": "1998",
      "journal-title": "JOM"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "5611",
      "DOI": "10.1016/S1359-6454(98)00231-6",
      "volume": "46",
      "author": "Arzt",
      "year": "1998",
      "journal-title": "Acta mater."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB11",
      "doi-asserted-by": "crossref",
      "unstructured": "Bhusan, B. (ed.), Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, OH, 9\u201311 November 1997. Kluwer, Dordrecht, 1998.",
      "DOI": "10.1007/978-94-011-5050-7"
    },
    {
      "volume": "Vol. 518",
      "year": "1998",
      "series-title": "Microelectromechanical Structures for Materials Research",
      "key": "10.1016/S1359-6454(99)00294-3_BIB12"
    },
    {
      "volume": "Vol. 546",
      "year": "1999",
      "series-title": "Materials Science of Microelectromechanical Systems (MEMS) Devices",
      "key": "10.1016/S1359-6454(99)00294-3_BIB13"
    },
    {
      "volume": "Vol. 86",
      "year": "1998",
      "series-title": "Integrated Sensors, Microactuators, and Microsystems (MEMS)",
      "key": "10.1016/S1359-6454(99)00294-3_BIB14"
    },
    {
      "volume": "Vol. 6",
      "year": "1998",
      "series-title": "Handbook of Sensors and Actuators",
      "key": "10.1016/S1359-6454(99)00294-3_BIB15"
    },
    {
      "year": "1997",
      "series-title": "Micromechanics and MEMS: Classic and Seminal Papers to 1990",
      "key": "10.1016/S1359-6454(99)00294-3_BIB16"
    },
    {
      "year": "1997",
      "series-title": "Fundamentals of Microfabrication",
      "author": "Madou",
      "key": "10.1016/S1359-6454(99)00294-3_BIB17"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "553",
      "DOI": "10.1115/1.3173068",
      "volume": "54",
      "author": "Freund",
      "year": "1987",
      "journal-title": "J. appl. Mech."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "2217",
      "DOI": "10.1007/BF02666659",
      "volume": "20A",
      "author": "Nix",
      "year": "1989",
      "journal-title": "Metall. Trans."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "1307",
      "DOI": "10.1557/JMR.1998.0186",
      "volume": "13",
      "author": "Keller",
      "year": "1998",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB21",
      "doi-asserted-by": "crossref",
      "first-page": "671",
      "DOI": "10.1016/0956-7151(90)90223-4",
      "volume": "38",
      "author": "R\u00f6sler",
      "year": "1990",
      "journal-title": "Acta metall."
    },
    {
      "issue": "4",
      "key": "10.1016/S1359-6454(99)00294-3_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "11",
      "DOI": "10.1002/9780470294444.ch2",
      "volume": "18",
      "author": "Spearing",
      "year": "1997",
      "journal-title": "Ceram. Engng Sci. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB23",
      "first-page": "1552",
      "volume": "86",
      "author": "Bustillo",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB24",
      "unstructured": "Souloff, R. E., Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, OH, 9\u201311 November 1997, ed. B. Bhusan. Kluwer, Dordrecht, 1998."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB25",
      "first-page": "1687",
      "volume": "86",
      "author": "Van Kessel",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB26",
      "first-page": "1536",
      "volume": "86",
      "author": "Kovacs",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB27",
      "first-page": "1627",
      "volume": "86",
      "author": "Esashi",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB28",
      "doi-asserted-by": "crossref",
      "first-page": "135",
      "DOI": "10.1063/1.89587",
      "volume": "31",
      "author": "Bassous",
      "year": "1977",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB29",
      "series-title": "Micromechanics and MEMS: Classic and Seminal Papers to 1990",
      "first-page": "623",
      "author": "Ehrfeld",
      "year": "1997"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB30",
      "first-page": "363",
      "volume": "10",
      "author": "Mohr",
      "year": "1998",
      "journal-title": "Sensors Mater."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB31",
      "doi-asserted-by": "crossref",
      "first-page": "44",
      "DOI": "10.1007/s005420050139",
      "volume": "5",
      "author": "Ruprecht",
      "year": "1998",
      "journal-title": "Microsyst. Technol."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB32",
      "doi-asserted-by": "crossref",
      "first-page": "159",
      "DOI": "10.1007/s005420050121",
      "volume": "4",
      "author": "Chaudhuri",
      "year": "1998",
      "journal-title": "Microsyst. Technol."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB33",
      "doi-asserted-by": "crossref",
      "unstructured": "Keller, C. G. and Howe, R. T., Transducers '95, Stockholm, Sweden, 1995, pp. 99\u2013102.",
      "DOI": "10.1109/SENSOR.1995.717102"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB34",
      "doi-asserted-by": "crossref",
      "unstructured": "Hui, E. E., Keller, C. G. and Howe, R. T., Solid-State Sensor and Actuator Workshop, South Carolina, 8\u201311 June 1998, pp. 256\u2013 260.",
      "DOI": "10.31438/trf.hh1998.58"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB35",
      "unstructured": "Dewa, A. S., Deng, K., Ritter, D. C., Bonham, C. and Guckel, H., Proc. Transducers '97. IEEE, 1997, pp. 757\u2013760."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB36",
      "series-title": "Fundamentals of Microfabrication",
      "first-page": "405",
      "author": "Madou",
      "year": "1997"
    },
    {
      "year": "1992",
      "series-title": "Materials Selection in Mechanical Design",
      "author": "Ashby",
      "key": "10.1016/S1359-6454(99)00294-3_BIB37"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB38",
      "doi-asserted-by": "crossref",
      "first-page": "559",
      "DOI": "10.1023/A:1003233715362",
      "volume": "28",
      "author": "Saito",
      "year": "1998",
      "journal-title": "J. appl. Electrochem."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB39",
      "doi-asserted-by": "crossref",
      "first-page": "1297",
      "DOI": "10.1023/A:1006528229614",
      "volume": "17",
      "author": "Balaraju",
      "year": "1998",
      "journal-title": "J. Mater. Sci. Lett."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB40",
      "first-page": "1594",
      "volume": "86",
      "author": "Mehregany",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "year": "1997",
      "series-title": "Silicon Carbide, a Review of Fundamental Questions and Applications to Current Device Technology I",
      "key": "10.1016/S1359-6454(99)00294-3_BIB41"
    },
    {
      "year": "1997",
      "series-title": "Silicon Carbide, a Review of Fundamental Questions and Applications to Current Device Technology II",
      "key": "10.1016/S1359-6454(99)00294-3_BIB42"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB43",
      "doi-asserted-by": "crossref",
      "first-page": "358",
      "DOI": "10.1016/0022-0248(93)90348-Z",
      "volume": "128",
      "author": "Barrett",
      "year": "1993",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB44",
      "unstructured": "Okojie, R. S., Ned, A. A. and Kurtz, A. D., Proc. Transducers '97. IEEE, 1997, pp. 1407\u20131418."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB45",
      "doi-asserted-by": "crossref",
      "unstructured": "Rajan, N., Mehregany, M., Zorman, C. A. and Kicher, T. P., Proc. Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 1998, pp. 31\u201334.",
      "DOI": "10.31438/trf.hh1998.8"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB46",
      "doi-asserted-by": "crossref",
      "first-page": "48",
      "DOI": "10.1016/S0924-4247(98)00111-3",
      "volume": "70",
      "author": "Flannery",
      "year": "1998",
      "journal-title": "Sensors Actuators A"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB47",
      "doi-asserted-by": "crossref",
      "first-page": "22",
      "DOI": "10.1557/S0883769400029316",
      "volume": "23",
      "author": "Butler",
      "year": "1998",
      "journal-title": "MRS Bull."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB48",
      "first-page": "1",
      "volume": "11",
      "author": "Kitabatake",
      "year": "1999",
      "journal-title": "Sensors Mater."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB49",
      "unstructured": "Boone, T. D., Hooper, H. H. and Soane, D. S., Proceedings Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, 1988, pp. 87\u201392."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB50",
      "doi-asserted-by": "crossref",
      "first-page": "31",
      "DOI": "10.1088/2058-7058/11/5/30",
      "volume": "11",
      "author": "Brittain",
      "year": "1998",
      "journal-title": "Physics World"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB51",
      "doi-asserted-by": "crossref",
      "unstructured": "Epstein, A. H., Senturia, S. D., Al-Midani, O., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K.-S., Ehrich, F.E., Esteve, E., Frechette, L., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Kerrebrock, J. L., Lang, J. H., Lin, C.-C., London, A., Lopata, J., Mehra, A., MurMiranda, J. O., Nagle, S., Orr, D.J., Piekos, E., Schmidt, M.A., Shirley, G., Spearing, S.M., Tan, C. S., Tzeng, Y.-S. and Waitz, I., AIAA Paper AIAA-97-1773, Presented at 28th AIAA Fluid Dynamics Conference/4th AIAA Shear Flow Control Conference, Snowmass Village, CO, 29 June\u20132 July 1997.",
      "DOI": "10.2514/6.1997-1773"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB52",
      "doi-asserted-by": "crossref",
      "first-page": "328",
      "DOI": "10.1016/0924-4247(90)85065-C",
      "volume": "21",
      "author": "Tang",
      "year": "1990",
      "journal-title": "Sensors Actuators A"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB53",
      "doi-asserted-by": "crossref",
      "first-page": "16",
      "DOI": "10.1109/84.661380",
      "volume": "7",
      "author": "Ye",
      "year": "1998",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB54",
      "doi-asserted-by": "crossref",
      "first-page": "2060",
      "DOI": "10.1109/16.155878",
      "volume": "39",
      "author": "Mehregany",
      "year": "1992",
      "journal-title": "I.E.E.E. Trans. Electronic Devices"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB55",
      "doi-asserted-by": "crossref",
      "first-page": "366",
      "DOI": "10.1109/55.506369",
      "volume": "17",
      "author": "Sniegowski",
      "year": "1996",
      "journal-title": "I.E.E.E. Electronic Device Lett."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB56",
      "doi-asserted-by": "crossref",
      "first-page": "866",
      "DOI": "10.1109/41.735330",
      "volume": "45",
      "author": "Ahn",
      "year": "1998",
      "journal-title": "I.E.E.E. Trans. Ind. Electronics"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB57",
      "doi-asserted-by": "crossref",
      "first-page": "307",
      "DOI": "10.1088/0960-1317/8/4/008",
      "volume": "8",
      "author": "Park",
      "year": "1998",
      "journal-title": "J. Micromech. Microengng"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB58",
      "doi-asserted-by": "crossref",
      "first-page": "207",
      "DOI": "10.1016/0924-4247(92)80168-3",
      "volume": "A33",
      "author": "Busch-Vishniac",
      "year": "1992",
      "journal-title": "J. Sensors Actuators A"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB59",
      "doi-asserted-by": "crossref",
      "first-page": "44",
      "DOI": "10.1109/84.128055",
      "volume": "1",
      "author": "Flynn",
      "year": "1992",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB60",
      "doi-asserted-by": "crossref",
      "first-page": "9",
      "DOI": "10.1557/PROC-518-9",
      "volume": "518",
      "author": "Yoshino",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB61",
      "first-page": "375",
      "volume": "10",
      "author": "Wang",
      "year": "1998",
      "journal-title": "Sensors Mater."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB62",
      "unstructured": "Hirata, Y. H., Okuyama, S., Numazawa, T. and Takada, H., Proc. IEEE Micro Electromechanical Systems (MEMS '95), Amsterdam, The Netherlands, 1995, pp. 191\u2013195."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB63",
      "doi-asserted-by": "crossref",
      "first-page": "27",
      "DOI": "10.1007/s003480050262",
      "volume": "26",
      "author": "Lee",
      "year": "1999",
      "journal-title": "Exp. Fluids"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB64",
      "doi-asserted-by": "crossref",
      "unstructured": "Krulevitch, P., Lee, A. P., Ramsey, P. B., Trevino, J. and Northrup, M. A., DSC 59 Microelectromechanical Systems (MEMS), ASME, 1996, pp. 301\u2013306.",
      "DOI": "10.1115/IMECE1996-1365"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB65",
      "doi-asserted-by": "crossref",
      "first-page": "213",
      "DOI": "10.1088/0960-1317/8/3/007",
      "volume": "8",
      "author": "Kahn",
      "year": "1998",
      "journal-title": "J. Micromech. Microengng"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB66",
      "doi-asserted-by": "crossref",
      "first-page": "410",
      "DOI": "10.1016/0924-4247(94)80023-5",
      "volume": "A41\u201342",
      "author": "Rombach",
      "year": "1994",
      "journal-title": "Sensors Actuators A"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB67",
      "doi-asserted-by": "crossref",
      "first-page": "119",
      "DOI": "10.1016/S0925-4005(98)00265-2",
      "volume": "52",
      "author": "Tian",
      "year": "1998",
      "journal-title": "Sensors Actuators B"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB68",
      "doi-asserted-by": "crossref",
      "first-page": "22",
      "DOI": "10.1557/S0883769400029316",
      "volume": "23",
      "author": "Butler",
      "year": "1998",
      "journal-title": "MRS Bull."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB69",
      "first-page": "377",
      "volume": "141",
      "author": "Palmour",
      "year": "1995",
      "journal-title": "Compound Semiconductors"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB70",
      "doi-asserted-by": "crossref",
      "first-page": "7691",
      "DOI": "10.1143/JJAP.36.7691",
      "volume": "36",
      "author": "Taniguchi",
      "year": "1997",
      "journal-title": "Japan J. appl. Phys., Pt 1"
    },
    {
      "year": "1994",
      "series-title": "VLSI Fabrication Principles: Silicon and Gallium Arsenide",
      "key": "10.1016/S1359-6454(99)00294-3_BIB71"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB72",
      "first-page": "67",
      "volume": "38",
      "author": "Rembetski",
      "year": "1995",
      "journal-title": "Solid St. Technol."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB73",
      "doi-asserted-by": "crossref",
      "first-page": "339",
      "DOI": "10.1149/1.1391611",
      "volume": "146",
      "author": "Ayon",
      "year": "1999",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB74",
      "doi-asserted-by": "crossref",
      "first-page": "2729",
      "DOI": "10.1116/1.588254",
      "volume": "13",
      "author": "Daschner",
      "year": "1995",
      "journal-title": "J. Vacuum Sci. Technol. B"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB75",
      "first-page": "1575",
      "volume": "86",
      "author": "Schmidt",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "year": "1998",
      "series-title": "Semiconductor Wafer Bonding: Science and Technology",
      "author": "Tong",
      "key": "10.1016/S1359-6454(99)00294-3_BIB76"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB77",
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      "first-page": "299",
      "DOI": "10.1016/0167-9317(93)90178-8",
      "volume": "22",
      "author": "Maszara",
      "year": "1993",
      "journal-title": "Microelectron. Engng"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB78",
      "first-page": "841",
      "volume": "21",
      "author": "Bengtsson",
      "year": "1992",
      "journal-title": "Electron. Mater."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB79",
      "doi-asserted-by": "crossref",
      "first-page": "223",
      "DOI": "10.1016/0924-4247(93)00653-L",
      "volume": "A43",
      "author": "Wolffenbuttel",
      "year": "1994",
      "journal-title": "Sensors Actuators A"
    },
    {
      "year": "1994",
      "series-title": "Sensor Technology and Devices",
      "key": "10.1016/S1359-6454(99)00294-3_BIB80"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB81",
      "series-title": "Micromachining and Micropackaging of Transducers",
      "first-page": "41",
      "author": "Ko",
      "year": "1985"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB82",
      "doi-asserted-by": "crossref",
      "first-page": "2419",
      "DOI": "10.1063/1.332357",
      "volume": "54",
      "author": "Anthony",
      "year": "1983",
      "journal-title": "J. appl. Phys."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB83",
      "doi-asserted-by": "crossref",
      "first-page": "341",
      "DOI": "10.1149/1.2085575",
      "volume": "138",
      "author": "Maszara",
      "year": "1991",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB84",
      "doi-asserted-by": "crossref",
      "first-page": "2526",
      "DOI": "10.1063/1.352345",
      "volume": "72",
      "author": "Imthurn",
      "year": "1992",
      "journal-title": "J. appl. Phys."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB85",
      "doi-asserted-by": "crossref",
      "first-page": "2198",
      "DOI": "10.1149/1.1838616",
      "volume": "145",
      "author": "Gui",
      "year": "1998",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB86",
      "first-page": "63",
      "volume": "36",
      "author": "Wiesner",
      "year": "1993",
      "journal-title": "Solid St. Technol."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB87",
      "first-page": "1611",
      "volume": "86",
      "author": "Senturia",
      "year": "1998",
      "journal-title": "Proc. I.E.E.E."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB88",
      "doi-asserted-by": "crossref",
      "unstructured": "Senturia, S. D., Sensor Actuators A, 1998, 1.",
      "DOI": "10.1016/S0924-4247(97)01754-8"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB89",
      "series-title": "Micromechanics and MEMS: Classic and Seminal Papers to 1990",
      "first-page": "659",
      "author": "Senturia",
      "year": "1997"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB90",
      "doi-asserted-by": "crossref",
      "first-page": "107",
      "DOI": "10.1109/84.585788",
      "volume": "6",
      "author": "Osterberg",
      "year": "1997",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB91",
      "doi-asserted-by": "crossref",
      "first-page": "142",
      "DOI": "10.1109/84.536620",
      "volume": "5",
      "author": "Wilson",
      "year": "1996",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB92",
      "doi-asserted-by": "crossref",
      "first-page": "3242",
      "DOI": "10.1557/JMR.1992.3242",
      "volume": "7",
      "author": "Vlassak",
      "year": "1992",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB93",
      "doi-asserted-by": "crossref",
      "first-page": "27",
      "DOI": "10.1557/PROC-518-27",
      "volume": "518",
      "author": "Lu",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB94",
      "doi-asserted-by": "crossref",
      "first-page": "3242",
      "DOI": "10.1557/JMR.1992.3242",
      "volume": "7",
      "author": "Vlassak",
      "year": "1992",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB95",
      "doi-asserted-by": "crossref",
      "unstructured": "Ziebart, V., Baltes, H. and Paul, O., Mater. Res. Soc. Symp. Proc., 1999, 546, 103.",
      "DOI": "10.1557/PROC-546-103"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB96",
      "doi-asserted-by": "crossref",
      "first-page": "57",
      "DOI": "10.1557/PROC-518-57",
      "volume": "518",
      "author": "Sharpe",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB97",
      "doi-asserted-by": "crossref",
      "unstructured": "Chen, K.-S., Ayon, A. A., Lohner, K. A., Kepets, M. A., Melconian, T. K. and Spearing, S. M., Mater. Res. Soc. Symp. Proc., 1999, 546, 51.",
      "DOI": "10.1557/PROC-546-21"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB98",
      "doi-asserted-by": "crossref",
      "first-page": "37",
      "DOI": "10.1016/S0921-5093(97)00176-7",
      "volume": "234",
      "author": "Nix",
      "year": "1997",
      "journal-title": "Mater. Sci. Engng A"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB99",
      "doi-asserted-by": "crossref",
      "first-page": "191",
      "DOI": "10.1557/PROC-518-191",
      "volume": "518",
      "author": "Turner",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB100",
      "doi-asserted-by": "crossref",
      "first-page": "137",
      "DOI": "10.1557/PROC-518-137",
      "volume": "518",
      "author": "Ballarini",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB101",
      "unstructured": "Chen, K.-S., Ayon, A. and Spearing, S. M., J. Am. Ceram. Soc., in press"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB102",
      "doi-asserted-by": "crossref",
      "unstructured": "Sharpe, W. N., Turner, K. T. and Edwards, R. L., Exp. Mech., 1999, 39, 162",
      "DOI": "10.1007/BF02323548"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB103",
      "doi-asserted-by": "crossref",
      "first-page": "74",
      "DOI": "10.1109/84.232603",
      "volume": "2",
      "author": "Huff",
      "year": "1993",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB104",
      "doi-asserted-by": "crossref",
      "first-page": "303",
      "DOI": "10.1080/00218468808071269",
      "volume": "25",
      "author": "Allen",
      "year": "1988",
      "journal-title": "J. Adhesion"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB105",
      "doi-asserted-by": "crossref",
      "first-page": "1734",
      "DOI": "10.1557/JMR.1994.1734",
      "volume": "9",
      "author": "Bagchi",
      "year": "1994",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB106",
      "doi-asserted-by": "crossref",
      "unstructured": "Fitzgerald, A. M., Dauskardt, R. H. and Kenny, T. W., Proc. Transducers 99, Sendai, Japan, 1999, in press",
      "DOI": "10.1557/PROC-605-43"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB107",
      "series-title": "The Materials Science of Thin Films",
      "first-page": "413",
      "author": "Ohring",
      "year": "1992"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB108",
      "series-title": "Thin Film Deposition: Principles and Practice",
      "first-page": "196",
      "author": "Smith",
      "year": "1995"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB109",
      "doi-asserted-by": "crossref",
      "first-page": "2507",
      "DOI": "10.1016/0956-7151(94)00444-M",
      "volume": "43",
      "author": "Evans",
      "year": "1995",
      "journal-title": "Acta mater."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB110",
      "doi-asserted-by": "crossref",
      "first-page": "241",
      "DOI": "10.1063/1.98460",
      "volume": "51",
      "author": "Allen",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB111",
      "doi-asserted-by": "crossref",
      "first-page": "97",
      "DOI": "10.1016/S0040-6090(98)00952-3",
      "volume": "335",
      "author": "Zhang",
      "year": "1998",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB112",
      "doi-asserted-by": "crossref",
      "unstructured": "Hommel, M., Kraft, O., Arzt, E. and Baker, S. P., Mater. Res. Soc. Symp. Proc., 1999, 546, 133.",
      "DOI": "10.1557/PROC-546-133"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB113",
      "doi-asserted-by": "crossref",
      "first-page": "81",
      "DOI": "10.1557/PROC-518-81",
      "volume": "518",
      "author": "Cornella",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB114",
      "series-title": "Tribology Issues and Opportunities in MEMS",
      "first-page": "529",
      "author": "Muhlstein",
      "year": "1998"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB115",
      "unstructured": "Souloff, R. E., in Tribology Issues and Opportunities in MEMS, Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, Columbus, OH, 9\u201311 November 1997, ed. B. Bhusan. Kluwer, Dordrecht, 1998."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB116",
      "doi-asserted-by": "crossref",
      "first-page": "366",
      "DOI": "10.1109/55.506369",
      "volume": "17",
      "author": "Sniegowski",
      "year": "1996",
      "journal-title": "I.E.E.E. Electron. Device Lett."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB117",
      "doi-asserted-by": "crossref",
      "unstructured": "Rymuza, Z., Microsystems Technologies, 1999, 5, 173",
      "DOI": "10.1007/s005420050160"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB118",
      "doi-asserted-by": "crossref",
      "first-page": "143",
      "DOI": "10.1557/PROC-518-143",
      "volume": "518",
      "author": "Lee",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB119",
      "doi-asserted-by": "crossref",
      "unstructured": "Lin, C. C., Ghodssi, R., Ayon, A. A., Chen, D.-Y. and Schmidt, M. A., Solid-State Sensor and Actuator Workshop, Late News Poster Session Supplemental Digest, 1998, pp. 25\u201326.",
      "DOI": "10.31438/trf.hh1998A.13"
    },
    {
      "key": "10.1016/S1359-6454(99)00294-3_BIB120",
      "first-page": "84",
      "volume": "101",
      "author": "Whitesides",
      "year": "1998",
      "journal-title": "Technol. Rev."
    },
    {
      "year": "1992",
      "series-title": "Nanosystems, Molecular Machines, Manufacturing and Computation",
      "author": "Drexel",
      "key": "10.1016/S1359-6454(99)00294-3_BIB121"
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      "first-page": "161",
      "DOI": "10.1557/PROC-518-161",
      "volume": "518",
      "author": "Tada",
      "year": "1998",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
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