DOI: 10.1016/s0968-4328(99)00008-6. Microfabrication techniques using focused ion beams and emergent applications

Microfabrication techniques using focused ion beams and emergent applications

10.1016/s0968-4328(99)00008-6

Crossref journal-article

Elsevier BV

Micron (78)

Bibliography

Vasile, M. J., Nassar, R., Xie, J., & Guo, H. (1999). Microfabrication techniques using focused ion beams and emergent applications. Micron, 30(3), 235â244.

Authors 4

M.J Vasile (first)
R Nassar (additional)
J Xie (additional)
H Guo (additional)

References 33 Referenced 53

Adams, D., Benavides, G., Vasile, M., 1998, Micrometer-scale machining of metals and polymers enabled by focused ion beam techniques. Symposium AA, Materials Science of Microelectromechanical Systems (MEMS) Devices, Materials Research Society Meeting, Boston, MA, Dec 1–2. (10.1557/PROC-546-201)
10.1016/0168-583X(85)90107-7 / Nucl. Instrum. Meth. / Mechanisms of liquid metal ion source operation by Bell (1985)
10.1147/rd.373.0421 / IBM J. Res. Dev. / X-ray mask repair by Blauner (1993)
10.1063/1.366199 / J. Appl Phys. by Crell (1997)
10.1109/84.485213 / J. Microelectromech. Sys. / Development of the micromilling process for high aspect ratio microstructures by Friedrich (1996)
10.1016/S0167-9317(96)00198-0 / Microelectron. Engng / Micromilling development and applications for microfabrication by Friedrich (1997)
10.1016/0042-207X(91)90085-W / Vacuum / Focused ion beam technology by Gamo (1991)
Gray, A., Butler, A., 1998 Personal communication.
10.1063/1.346140 / J. Appl. Phys. by Gross (1990)
{'key': '10.1016/S0968-4328(99)00008-6_BIB10', 'first-page': '127', 'article-title': 'Mechanisms underlying enhanced capillary filtration induced by platelet activating factor', 'volume': '270H', 'author': 'Harris', 'year': '1996', 'journal-title': 'Am. J. Physiol.'} / Am. J. Physiol. / Mechanisms underlying enhanced capillary filtration induced by platelet activating factor by Harris (1996)
10.1117/12.940370 / Proc. SPIE / A second generation focused ion beam micromachining system by Harriott (1987)
10.1143/JJAP.29.2283 / Jpn. J. Appl. Phys. / Micromachining and device transplantation using focused ion beams by Ishitani (1990)
10.1116/1.590204 / J. Vac. Sci. Technol. / Proposals for exact-point transmission-electron microscopy using focused ion beam sample-preparation techniques by Ishitani (1998)
10.1149/1.2086592 / J. Electrochem. Soc. / Two-dimensional profile simulation of focused ion beam milling of LSI by Itoh (1990)
10.1063/1.365785 / J. Appl. Phys. / Focused ion beam assisted chemically etched mesas on GaAs(001) and the nature of subsequent molecular beam epitaxial growth by Kalburge (1997)
10.1116/1.590210 / J. Vac. Sci. Technol. / Focused ion beam implantation for opto- and microelectronic devices by Konig (1998)
10.1063/1.363323 / J. Appl. Phys. / Dose rate effects in GaAs investigated by discrete pulsed implantation using a focused ion beam by Musil (1996)
Matsunami, N., Yamamura, Y., Itakawa, Y., Itoh, N., Kazumata, S., Miyagawa, K. Morita, K., Shimizu, S.,1983, Energy dependence of sputtering yields of monatomic solids. Report IPPJ-AM-14, Institute of Plasma Physics, Nagoya University, Nagoya, Japan.
10.1063/1.363299 / J. Appl. Phys. / Giant magnetoresistance in Co/Cu multilayers fabricated by focused ion beam direct deposition by Nagamchi (1996)
10.1116/1.585694 / J. Vac. Sci. Technol., B / Application of focused ion beam techniques to failure analysis of very large scale integrations by Nikawa (1991)
10.1116/1.589763 / J. Vac. Sci. Technol. / Mathematical modelling of focused ion beam microfabrication by Nassar (1998)
10.1063/1.1144104 / Rev. Sci. Instrum. / High resolution focused ion beams by Orloff (1993)
10.1116/1.590202 / J. Vac. Sci. Technol. / Transmission electron microscopy observation of thin foil specimens prepared by means of a focused ion beam by Saka (1998)
{'key': '10.1016/S0968-4328(99)00008-6_BIB24', 'first-page': 'B7', 'article-title': 'Focused ion beam stimulated deposition of organic compounds', 'author': 'Vasile', 'year': '1989', 'journal-title': 'J. Vac. Sci. Technol.'} / J. Vac. Sci. Technol. / Focused ion beam stimulated deposition of organic compounds by Vasile (1989)
10.1063/1.1142334 / Rev. Sci. Instrum. / Scanning probe tips formed by focused ion beams by Vasile (1991)
Vasile, M., Schwalm, S., Biddick, C., 1993, Microfabrication by ion milling: the lathe technique. In: Pisano, A.P., Jara-Almonte, J., Trimmer, W. (Eds.), Proceedings of the ASME, DSC, Vol. 46, Micromechanical Systems, Book no. H00832-1993. pp 81.
10.1116/1.587769 / J. Vac. Sci. Technol. / Microfabrication by ion milling: the lathe technique by Vasile (1994)
10.1016/S0141-6359(96)00024-4 / Precision Engng / Micrometer scale machining: tool fabrication and initial results by Vasile (1996)
10.1116/1.589644 / J. Vac. Sci. Techol. / Focused ion beam milling: depth control for three-dimensional microfabrication by Vasile (1997)
10.1116/1.590198 / J. Vac. Sci. Technol. / Focused ion beam technology applied to microstructure fabrication by Vasile (1998)
10.1116/1.585078 / J. Vac. Sci. Technol. / Focused ion beam micromached three-dimensional features by means of a digital scan by Ximen (1990)
Yamaura, Y., Itakawa, Y., Itoh, N., 1983, Angular dependence of sputter yields of monatomic solids. Report IPPJ-AM-26, Institute of Plasma Physics, Nagoya University, Nagoya, Japan.
10.1016/0042-207X(93)90182-A / Vacuum / Micro-machining using a focused ion beam by Young (1993)

Dates

Type	When
Created	23 years ago (July 25, 2002, 11:25 a.m.)
Deposited	5 years, 7 months ago (Jan. 10, 2020, 4:50 a.m.)
Indexed	3 months, 2 weeks ago (May 6, 2025, 7:08 p.m.)
Issued	26 years, 2 months ago (June 1, 1999)
Published	26 years, 2 months ago (June 1, 1999)
Published Print	26 years, 2 months ago (June 1, 1999)

Funders 0

None

BibTeX

@article{Vasile_1999, title={Microfabrication techniques using focused ion beams and emergent applications}, volume={30}, ISSN={0968-4328}, url={http://dx.doi.org/10.1016/s0968-4328(99)00008-6}, DOI={10.1016/s0968-4328(99)00008-6}, number={3}, journal={Micron}, publisher={Elsevier BV}, author={Vasile, M.J and Nassar, R and Xie, J and Guo, H}, year={1999}, month=jun, pages={235–244} }

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