DOI: 10.1016/s0927-796x(02)00003-7. Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry

Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry

10.1016/s0927-796x(02)00003-7

Crossref journal-article

Elsevier BV

Materials Science and Engineering: R: Reports (78)

Bibliography

Haisma, J., & Spierings, G. A. C. M. (2002). Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry. Materials Science and Engineering: R: Reports, 37(1â2), 1â60.

Authors 2

Jan Haisma (first)
G.A.C.M. Spierings (additional)

References 122 Referenced 79

G. Savage, A Concise History of Bronzes, Thomes & Hudson, London, 1968.
D. Strong, D. Brown (Eds.), Roman Crafts, Duckworth, London, 1976.
G.M.A. Hanfmann, Roman Art, New York Graphic Society, Greenwich, CT, USA.
Ch. Detzner, Email, Buch-Kunstverlag Ettal, Germany, 1968 (in German).
10.1103/PhysRevLett.70.627 / Phys. Rev. Lett. by Wolf (1993)
Microclusters, in: S. Sugano, V. Nishina, S. Ohnishi (Eds.), Proceedings of the 1st NEC Symposium, Hakone and Kawasaki, Japan, 20–23 October 1986. Springer Verlag, Berlin.
K. Sattler, The physics of microclusters, in: P. Grosse (Ed.), Festkörperprobleme XXIII, Advances in Solid State Physics, Vieweg, 1983, pp. 1–12. (10.1007/BFb0107966)
10.1179/030801886789799764 / Interdiscipl. Sci. Rev. by Trager (1986)
10.1063/1.94761 / Appl. Phys. Lett. by de Jong (1984)
J. Haisma, Th.M. Michielsen, F.J.H.M. van der Kruis, Philips J. Res. 49 (1995) 65–89. (10.1016/0165-5817(95)82004-3)
J. Haisma, P.W. de Haas, F.J.H.M van der Kruis, J. Vijfvinkel, US Patent 5,441,442 (1995).
10.1143/JJAP.28.1426 / Jpn. J. Appl. Phys. by Haisma (1989)
10.1016/0165-5817(95)82002-7 / Philips J. Res. by Haisma (1995)
F. Cajori (Ed.), Newton, Principia, 1686, Vol. I, The Motion of Bodies, University of California Press, Berkeley, 1966, pp. 223–224.
10.1016/0021-9797(83)90343-0 / J. Colloid Interf. Sci. by Sparnaay (1983)
L. Holland, The Properties of Glass Surfaces, Chapman & Hall, London, 1964.
10.1016/0165-5817(95)82003-5 / Philips J. Res. by Spierings (1995)
C.R. Dodwell, Theophilus, De diversis artibus, The Various Arts, Nelson’s Mediaeval Texts, London, 1961.
G. Galileı̈, Discorsi e dimonstrazioni matematiche, interno a due nuove scienze, Appresso gli Elsevirii, MDCXXXVIII, Leida, Discorsi, etc. a curo di Adriano Carugo e Ludovico Geymonat, 1st Edition, Torino, Boringhieri, 1958.
W. Innys, Newton’s Opticks: A Treatise of the Reflections, Refractions, Inflections and Colours, MDCCXXX, 4th Edition, Part I, London; a reprint from this original 4th Edition with a foreword of Prof. A. Einstein, Nobel laureate, and an introduction by Prof. E.T. Whittaker, F.R.S., McGraw-Hill, New York, 1931, p. 199.
D. Dowson, History of Tribology, Longman, London, 1979.
10.1016/S0927-796X(98)00017-5 / Mater. Sci. Eng. Rep. by Plöszl (1999)
Q.-Y. Tong, U. Gösele, Semiconductor Wafer Bonding, The Electrochemical Society Series, Wiley, New York, 1999, ISBN 0471574813.
G.G. Stokes, The Cambridge and Dublin Math. J. 4 (1849) 1–14; Stokes most probably derived his remark from a note by S.-D. Poisson, read before the royal academy of sciences in Paris on 31 March 1823, this note was published, in: Annales de Chimie et de Physique, par Mm. Gay-Lussac et Arago, tome 22, Paris, Crochard, 1823, pp. 337–347 (in French). This note can also be found in the complete works of Fresnel (in French): H. de Senarmont, E. Verdet, L. Fresnel, Oeuvres complètes d’Augustin Fresnel, tome deuxième, imprimerie imperiale, Paris, 1868; Mons. Poisson, Note sur le phénomène des anneaux colorés, section XXXV, pp. 239–246, specifically p. 245 (or in the original paper: p. 345), where Poisson says, after he has derived formulae for the reflected and transmitted intensity of light of adjacent bodies:‘Ce qui montre que la lumière réfléchie et la lumière transmise sont les mêmes que Si la lame mince n’existait pas, et que les deux millieux, dans lesquels les vitesses de propagation (=de la lumière) sont a et á, fussent en contact immédiat. Dans le cas particulier ou ces deux milieux sont de la même matière, et ou l’on a a=a′ la lumière réfléchie est nulle, et la lumière transmise exactement égale à la lumière incidente, or in translation: which shows that the reflected and transmitted light are the same as if the thin layer (of air, in between the two bodies) does not exist and the two substances, wherein the velocity of propagation (of light) are a and a′ were on direct contact. In the special case that the two substances are of the same material and a=a′, the reflected light is zero, and the transmitted light equals exactly the incident light. It should be remarked, however, that the historical legacy is sometimes hard to find.
J.D. van der Waals, Over de continuiteit van den gas–en vloeistoftoestand, Thesis at the high school (now a university) of Leyden, Sijthof, Leiden, 1873 (in Dutch).
F. Twyman, in: Proceedings of the Optical Convention of 1905, pp. 50–54.
W.E. Williams, Proc. Phys. Soc. 45 (1933) 699–726 (see p. 700). (10.1088/0959-5309/45/5/308)
10.1039/TF9171200305 / Trans. Faraday Soc. by Parker (1917)
10.1080/14786440308635639 / Philos. Mag. by Parker (1917)
10.1098/rspa.1930.0058 / Proc. Roy. Soc. by Obreimoff (1930)
R.J. Strutt, Life of John William Strutt, Baron Rayleigh III, E. Arnold, and Co., London, 1925, reprinted in an extended version by the University of Wisconsin Press, 1968. (10.1119/1.1974396)
J.N. Howard, Proc. Roy. Inst. Br. 60 (1988) 73–86.
Lord Rayleigh (the younger), Proc. Roy. Soc. A156 (1936) 326–349. (10.1098/rspa.1936.0151)
U. Gösele, H. Stenzel, in: C.F. Hunt, H. Baumgart, S.S. Iyer, T. Abe, U. Gösele, Proceedings of the 3rd International Symposium on Semiconductor Wafer Bonding, Physics and Applications, The Electrochemical Society, Pennington, NY, 1995, pp. 33–44. (10.4028/www.scientific.net/SSP.47-48.33)
T. Nakamura, US Patent 3,239,908 (1966).
10.1103/PhysRevLett.6.106 / Phys. Rev. Lett. by Javan (1961)
J. Haisma, S.J. van Hoppe, US Patent 3,387,226 (1968).
J. Haisma, Construction and properties of short stable gas lasers, Thesis, University of Utrecht, The Netherlands, Philips Res. Rep. 1 (1967) (Suppl.).
D.M. Kenney, US Patent 3,332,137 (1967).
D.I. Pommerantz, US Patent 3,397,278 (1968).
10.1063/1.1657121 / J. Appl. Phys. by Wallis (1969)
E. Obermeier, in: C.E. Hunt, H. Baumgart, S.S. Iyer, T. Abe, U. Gösele (Eds.), Proceedings of the 3rd Symposium on Semiconductor Wafer Bonding: Physics and Applications, The Electrochemical Society, Pennington, NY, 1995, pp. 212–220.
10.1063/1.1714478 / J. Appl. Phys. by Smith (1965)
10.1063/1.1709856 / J. Appl. Phys. by Haneman (1967)
{'issue': '5', 'key': '10.1016/S0927-796X(02)00003-7_BIB45', 'first-page': '42', 'volume': '18', 'author': 'Burgess', 'year': '1975', 'journal-title': 'Solid State Technol.'} / Solid State Technol. by Burgess (1975)
10.1149/1.2134293 / J. Electrochem. Soc. by Burgess (1975)
{'key': '10.1016/S0927-796X(02)00003-7_BIB47', 'first-page': '103', 'volume': '5', 'author': 'Dickson', 'year': '1982', 'journal-title': 'Int. J. Hybrid Microelectronics'} / Int. J. Hybrid Microelectronics by Dickson (1982)
K. Burkart, M. Wintzer, US Patent 4,196,837 (1980).
K. Burkart, M. Wintzcr, US Patent 4,274,034 (1981).
J. Riseman, US Patent 4,169,000 (1979).
J. Haisma, SOI technologies: their past, present and future, in: Proceedings of the ESSDERC’88, J. Phys. 49 (C4) (1988) 3–12.
M. Shimbo, K. Fukuda, US Patent 4,671,846 (1987).
M. Shimbo, K. Furukawa, K. Fukuda, K. Tanzawa, J. Appl. Phys. 60 (1986) 2987–2989. (10.1063/1.337750)
T. Sakai, M. Katsura, H. Hiraki, S. Uno, M. Shimbo, K. Furukawa, US Patent 4,791,465 (1988).
J.R. Abernathey, W.I. Kinney, J.B. Lasky, S.R. Stiffler, US Patent 4,649,627 (1987).
10.1063/1.96768 / Appl. Phys. Lett. by Lasky (1986)
J. Haisma, C.L. Adema, C.L. Alting, R. Brehm, US Patent 4,810,318 (1989).
J. Haisma, Th.M. Michielsen, J.A. Pals, US Patent 4,983,251 (1991).
J. Haisma, C.L. Alting, Th.M. Michielsen, US Patent 5,009,689 (1991).
J. Haisma, A.R. Miedema, US Patent 4,948,029 (1990).
10.1002/(SICI)1521-4095(199908)11:12<1035::AID-ADMA1035>3.0.CO;2-2 / Adv. Mater. by Kräuter (1999)
F. Twyman, Prism and Lens Making, 2nd Edition, Adam Hilger Ltd., Bristol, 1952.
10.1063/1.346866 / J. Appl. Phys. by Widdershoven (1990)
10.1364/AO.33.007945 / Appl. Opt. by Haisma (1994)
T. Abe, M. Nakano, T. Itoh, in: D.N. Schmidt (Ed.), Silicon-on-Insulator Technology and Devices, Electrochemical Society, Pennington, USA, 1990, p. 61.
10.1364/AO.33.001154 / Appl. Opt. by Haisma (1994)
J. Haisma, F.J.H.M. van der Kruis, P.F. Bongers, H. Passing, European Patent Application 0,460,763 (1991).
J. Haisma, E.M.H. Kamerbeek, G.A.C.M. Spierings, P.W. de Haas, US Patent 5,483,115 (1996).
J. Haisma, J.F.M. d’Achard van Enschut, C.L. Adema, J.C. Gijsbers, P.K. de Box, US Patent 5,757,883 (1998).
J. Haisma, K.Z. Troost, J.J.C. Groenen, Th.M. Michielsen, European Patent Application 0,655,424 (1994).
U. Gösele, T. Abe, J. Haisma, M.A. Schmidt, in: Proceedings of the 1st International Symposium on Semiconductor Wafer Bonding, Science, Technology and Applications, Vol. 92-7, The Electrochemical Society, Pennington, USA, 1992.
Proceedings of the Spring Meeting of the Materials Research Society, 16–20 April 2001, San Francisco, Abstracts book, Section I.
T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), in: Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001.
S. Noda, Photonic crystal fabrication by a wafer bonding approach, in: Proceedings of the Spring Meeting of the Materials Research Society, 16–20 April 2001, San Francisco (Abstract I.6.4).
10.1038/35036532 / Nature by Noda (2000)
10.1557/mrs2001.153 / MRS Bull. by Polman (2001)
S. Noda, MRS Bull. 26 (2001) 618–621. (10.1557/mrs2001.155)
10.1063/1.118375 / Appl. Phys. Lett. by Tajima (1997)
10.1143/JJAP.37.L1199 / Jpn. J. Appl. Phys. by Tajima (1998)
S. Ibuka, M. Tajima, A. Ogura, Characterization of optical lifetime in silicon-on-insulator wafers by photoluminescence decay method, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.9.6). (10.1557/PROC-681-I9.6)
J. Bagdahn, D. Katzer, M. Petzold, M. Wiemer, M. Alexe, V. Dragoi, U. Gösele, Transfer and handling of thin semiconductor materials by a combination of wafer bonding and controlled crack propagation, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract 19.3). (10.1557/PROC-681-I9.3)
V. Dragoi, M. Alexe, M. Reiche, I. Radu, E. Thallner, Ch. Schaefer, P. Lindner, Si/GaAs heterostructures fabricated by direct bonding, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.5.3). (10.1557/PROC-681-I5.3)
10.1016/0165-5817(95)82003-5 / Philips J. Res. by Spierings (1995)
D.M. Hansen, C.E. Albaugh, P.D. Moran, T.F. Kuech, Plasma induced chemical changes at silica surfaces during pre-bonding treatments, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.2.3). (10.1557/PROC-681-I2.2)
I.V. Grekhov, T.S. Agrunova, L.S. Kostina, N.M. Shmidt, H. Föll, K.B. Kostin, Direct bonding of silicon wafers with simultaneous dopant diffusion, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.5.7). (10.1557/PROC-681-I5.7)
10.1063/1.111698 / Appl. Phys. Lett. by Yonehara (1994)
K. Momoi, M. Ito, N. Sato, N. Honma, T. Yonehara, Gettering control at bonding interface in ELTRAN, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.9.5). (10.1557/PROC-681-I9.5)
A. Reznicek, S. Senz, O. Breitenstein, R. Scholtz, U. Gösele, Electrical characterization of UHV-bonded silicon interfaces, in: T.E. Haynes, U.M. Gösele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.4.4). (10.1557/PROC-681-I4.4)
10.1063/1.115335 / Appl. Phys. Lett. by Gösele (1995)
10.1149/1.1838530 / J. Electrochem. Soc. by Hermansson (1998)
10.1063/1.371804 / J. Appl. Phys. by Akatsu (1999)
10.1143/JJAP.19.1981 / Jpn. J. Appl. Phys. by Morita (1980)
10.1143/JJAP.38.1589 / Jpn. J. Appl. Phys. by Takagi (1999)
10.1103/PhysRevB.45.4439 / Phys. Rev. by Nelson (1992)
10.1016/0022-3093(90)90184-N / J. Non-Cryst. Solids by Garofalini (1990)
10.1007/BF01568080 / Appl. Phys. by Conrad (1996)
10.1016/S0927-0256(96)00058-4 / Comp. Mater. Sci. by Scheerschmidt (1996)
10.1063/1.120057 / Appl. Phys. Lett. by Conrad (1997)
{'key': '10.1016/S0927-796X(02)00003-7_BIB99', 'first-page': '118', 'volume': '27', 'author': 'Matthews', 'year': '1974', 'journal-title': 'J. Cryst. Growth'} / J. Cryst. Growth by Matthews (1974)
{'key': '10.1016/S0927-796X(02)00003-7_BIB100', 'first-page': '447', 'volume': '157', 'author': 'Reiche', 'year': '1997', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. by Reiche (1997)
{'key': '10.1016/S0927-796X(02)00003-7_BIB101', 'first-page': '13', 'volume': 'A66', 'author': 'Kästner', 'year': '1998', 'journal-title': 'Appl. Phys.'} / Appl. Phys. by Kästner (1998)
10.1016/0040-6090(84)90401-2 / Thin Solid Films by Woltersdorf (1984)
10.1007/s003390050530 / Appl. Phys. by Tan (1997)
10.1063/1.118669 / Appl. Phys. Lett. by Ejeckam (1997)
10.1063/1.119642 / Appl. Phys. Lett. by Ejeckam (1997)
10.1063/1.121429 / Appl. Phys. Lett. by Zhu (1998)
10.1063/1.123075 / Appl. Phys. Lett. by Kopperschmidt (1999)
10.1063/1.120975 / Appl. Phys. Lett. by Hobart (1998)
10.1049/el:19950805 / Electron. Lett. by Bruel (1995)
10.1143/JJAP.36.1636 / Jpn. J. Appl. Phys. by Bruel (1997)
10.1063/1.122875 / Appl. Phys. Lett. by Weldon (1998)
10.1063/1.120601 / Appl. Phys. Lett. by Tong (1998)
10.1116/1.581788 / J. Vac. Sci. Technol. by Gösele (1999)
10.1063/1.126349 / Appl. Phys. Lett. by Henttinen (2000)
10.1016/0022-0248(90)90870-Q / J. Cryst. Growth by Mateika (1990)
10.1016/0022-0248(90)90869-M / J. Cryst. Growth by Haisma (1990)
10.1016/0022-0248(90)90871-H / J. Cryst. Growth by Haisma (1990)
J.P. Hirth, J. Lothe, Theory of Dislocations, 2nd Edition, Wiley, New York, 1982. (10.1115/1.3167075)
10.1116/1.588604 / J. Vac. Sci. Tcchnol. by Haisma (1996)
A. Halimaoui, C. Oules, G. Bomchil, A. Bsiesy, F. Caspard, R. Herino, M. Ligeon, F. Muller, Appl. Phys. Lett. 59 (1991) 304–306. (10.1063/1.105578)
10.1063/1.102921 / Appl. Phys. Lett. by Takagi (1990)
10.1103/PhysRevLett.69.2400 / Phys. Rev. Lett. by Ohno (1992)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 5:39 a.m.)
Deposited	2 years, 5 months ago (April 5, 2023, 1:50 p.m.)
Indexed	1 week, 6 days ago (Aug. 23, 2025, 9:43 p.m.)
Issued	23 years, 5 months ago (April 1, 2002)
Published	23 years, 5 months ago (April 1, 2002)
Published Print	23 years, 5 months ago (April 1, 2002)

Funders 0

None

BibTeX

@article{Haisma_2002, title={Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry}, volume={37}, ISSN={0927-796X}, url={http://dx.doi.org/10.1016/s0927-796x(02)00003-7}, DOI={10.1016/s0927-796x(02)00003-7}, number={1–2}, journal={Materials Science and Engineering: R: Reports}, publisher={Elsevier BV}, author={Haisma, Jan and Spierings, G.A.C.M.}, year={2002}, month=apr, pages={1–60} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        24
      ]
    ],
    "date-time": "2025-08-24T01:43:10Z",
    "timestamp": 1755999790456
  },
  "reference-count": 122,
  "publisher": "Elsevier BV",
  "issue": "1-2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2002,
            4,
            1
          ]
        ],
        "date-time": "2002-04-01T00:00:00Z",
        "timestamp": 1017619200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2002,
        4
      ]
    ]
  },
  "DOI": "10.1016/s0927-796x(02)00003-7",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T09:39:23Z",
    "timestamp": 1027589963000
  },
  "page": "1-60",
  "source": "Crossref",
  "is-referenced-by-count": 79,
  "title": "Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry",
  "prefix": "10.1016",
  "volume": "37",
  "author": [
    {
      "given": "Jan",
      "family": "Haisma",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "G.A.C.M.",
      "family": "Spierings",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB1",
      "unstructured": "G. Savage, A Concise History of Bronzes, Thomes & Hudson, London, 1968."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB2",
      "unstructured": "D. Strong, D. Brown (Eds.), Roman Crafts, Duckworth, London, 1976."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB3",
      "unstructured": "G.M.A. Hanfmann, Roman Art, New York Graphic Society, Greenwich, CT, USA."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB4",
      "unstructured": "Ch. Detzner, Email, Buch-Kunstverlag Ettal, Germany, 1968 (in German)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "627",
      "DOI": "10.1103/PhysRevLett.70.627",
      "volume": "70",
      "author": "Wolf",
      "year": "1993",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB6",
      "unstructured": "Microclusters, in: S. Sugano, V. Nishina, S. Ohnishi (Eds.), Proceedings of the 1st NEC Symposium, Hakone and Kawasaki, Japan, 20\u201323 October 1986. Springer Verlag, Berlin."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB7",
      "doi-asserted-by": "crossref",
      "unstructured": "K. Sattler, The physics of microclusters, in: P. Grosse (Ed.), Festk\u00f6rperprobleme XXIII, Advances in Solid State Physics, Vieweg, 1983, pp. 1\u201312.",
      "DOI": "10.1007/BFb0107966"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "170",
      "DOI": "10.1179/030801886789799764",
      "volume": "11",
      "author": "Trager",
      "year": "1986",
      "journal-title": "Interdiscipl. Sci. Rev."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "445",
      "DOI": "10.1063/1.94761",
      "volume": "44",
      "author": "de Jong",
      "year": "1984",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB10",
      "doi-asserted-by": "crossref",
      "unstructured": "J. Haisma, Th.M. Michielsen, F.J.H.M. van der Kruis, Philips J. Res. 49 (1995) 65\u201389.",
      "DOI": "10.1016/0165-5817(95)82004-3"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB11",
      "unstructured": "J. Haisma, P.W. de Haas, F.J.H.M van der Kruis, J. Vijfvinkel, US Patent 5,441,442 (1995)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "1426",
      "DOI": "10.1143/JJAP.28.1426",
      "volume": "28",
      "author": "Haisma",
      "year": "1989",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "23",
      "DOI": "10.1016/0165-5817(95)82002-7",
      "volume": "49",
      "author": "Haisma",
      "year": "1995",
      "journal-title": "Philips J. Res."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB14",
      "unstructured": "F. Cajori (Ed.), Newton, Principia, 1686, Vol. I, The Motion of Bodies, University of California Press, Berkeley, 1966, pp. 223\u2013224."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "307",
      "DOI": "10.1016/0021-9797(83)90343-0",
      "volume": "91",
      "author": "Sparnaay",
      "year": "1983",
      "journal-title": "J. Colloid Interf. Sci."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB16",
      "unstructured": "L. Holland, The Properties of Glass Surfaces, Chapman & Hall, London, 1964."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "47",
      "DOI": "10.1016/0165-5817(95)82003-5",
      "volume": "49",
      "author": "Spierings",
      "year": "1995",
      "journal-title": "Philips J. Res."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB18",
      "unstructured": "C.R. Dodwell, Theophilus, De diversis artibus, The Various Arts, Nelson\u2019s Mediaeval Texts, London, 1961."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB19",
      "unstructured": "G. Galile\u0131\u0308, Discorsi e dimonstrazioni matematiche, interno a due nuove scienze, Appresso gli Elsevirii, MDCXXXVIII, Leida, Discorsi, etc. a curo di Adriano Carugo e Ludovico Geymonat, 1st Edition, Torino, Boringhieri, 1958."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB20",
      "unstructured": "W. Innys, Newton\u2019s Opticks: A Treatise of the Reflections, Refractions, Inflections and Colours, MDCCXXX, 4th Edition, Part I, London; a reprint from this original 4th Edition with a foreword of Prof. A. Einstein, Nobel laureate, and an introduction by Prof. E.T. Whittaker, F.R.S., McGraw-Hill, New York, 1931, p. 199."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB21",
      "unstructured": "D. Dowson, History of Tribology, Longman, London, 1979."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/S0927-796X(98)00017-5",
      "volume": "R25",
      "author": "Pl\u00f6szl",
      "year": "1999",
      "journal-title": "Mater. Sci. Eng. Rep."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB23",
      "unstructured": "Q.-Y. Tong, U. G\u00f6sele, Semiconductor Wafer Bonding, The Electrochemical Society Series, Wiley, New York, 1999, ISBN 0471574813."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB24",
      "unstructured": "G.G. Stokes, The Cambridge and Dublin Math. J. 4 (1849) 1\u201314; Stokes most probably derived his remark from a note by S.-D. Poisson, read before the royal academy of sciences in Paris on 31 March 1823, this note was published, in: Annales de Chimie et de Physique, par Mm. Gay-Lussac et Arago, tome 22, Paris, Crochard, 1823, pp. 337\u2013347 (in French). This note can also be found in the complete works of Fresnel (in French): H. de Senarmont, E. Verdet, L. Fresnel, Oeuvres compl\u00e8tes d\u2019Augustin Fresnel, tome deuxi\u00e8me, imprimerie imperiale, Paris, 1868; Mons. Poisson, Note sur le ph\u00e9nom\u00e8ne des anneaux color\u00e9s, section XXXV, pp. 239\u2013246, specifically p. 245 (or in the original paper: p. 345), where Poisson says, after he has derived formulae for the reflected and transmitted intensity of light of adjacent bodies:\u2018Ce qui montre que la lumi\u00e8re r\u00e9fl\u00e9chie et la lumi\u00e8re transmise sont les m\u00eames que Si la lame mince n\u2019existait pas, et que les deux millieux, dans lesquels les vitesses de propagation (=de la lumi\u00e8re) sont a et \u00e1, fussent en contact imm\u00e9diat. Dans le cas particulier ou ces deux milieux sont de la m\u00eame mati\u00e8re, et ou l\u2019on a a=a\u2032 la lumi\u00e8re r\u00e9fl\u00e9chie est nulle, et la lumi\u00e8re transmise exactement \u00e9gale \u00e0 la lumi\u00e8re incidente, or in translation: which shows that the reflected and transmitted light are the same as if the thin layer (of air, in between the two bodies) does not exist and the two substances, wherein the velocity of propagation (of light) are a and a\u2032 were on direct contact. In the special case that the two substances are of the same material and a=a\u2032, the reflected light is zero, and the transmitted light equals exactly the incident light. It should be remarked, however, that the historical legacy is sometimes hard to find."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB25",
      "unstructured": "J.D. van der Waals, Over de continuiteit van den gas\u2013en vloeistoftoestand, Thesis at the high school (now a university) of Leyden, Sijthof, Leiden, 1873 (in Dutch)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB26",
      "unstructured": "F. Twyman, in: Proceedings of the Optical Convention of 1905, pp. 50\u201354."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB27",
      "doi-asserted-by": "crossref",
      "unstructured": "W.E. Williams, Proc. Phys. Soc. 45 (1933) 699\u2013726 (see p. 700).",
      "DOI": "10.1088/0959-5309/45/5/308"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB28",
      "doi-asserted-by": "crossref",
      "first-page": "305",
      "DOI": "10.1039/TF9171200305",
      "volume": "12",
      "author": "Parker",
      "year": "1917",
      "journal-title": "Trans. Faraday Soc."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB29",
      "doi-asserted-by": "crossref",
      "first-page": "276",
      "DOI": "10.1080/14786440308635639",
      "volume": "33",
      "author": "Parker",
      "year": "1917",
      "journal-title": "Philos. Mag."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB30",
      "doi-asserted-by": "crossref",
      "first-page": "290",
      "DOI": "10.1098/rspa.1930.0058",
      "volume": "A127",
      "author": "Obreimoff",
      "year": "1930",
      "journal-title": "Proc. Roy. Soc."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB31",
      "doi-asserted-by": "crossref",
      "unstructured": "R.J. Strutt, Life of John William Strutt, Baron Rayleigh III, E. Arnold, and Co., London, 1925, reprinted in an extended version by the University of Wisconsin Press, 1968.",
      "DOI": "10.1119/1.1974396"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB32",
      "unstructured": "J.N. Howard, Proc. Roy. Inst. Br. 60 (1988) 73\u201386."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB33",
      "doi-asserted-by": "crossref",
      "unstructured": "Lord Rayleigh (the younger), Proc. Roy. Soc. A156 (1936) 326\u2013349.",
      "DOI": "10.1098/rspa.1936.0151"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB34",
      "doi-asserted-by": "crossref",
      "unstructured": "U. G\u00f6sele, H. Stenzel, in: C.F. Hunt, H. Baumgart, S.S. Iyer, T. Abe, U. G\u00f6sele, Proceedings of the 3rd International Symposium on Semiconductor Wafer Bonding, Physics and Applications, The Electrochemical Society, Pennington, NY, 1995, pp. 33\u201344.",
      "DOI": "10.4028/www.scientific.net/SSP.47-48.33"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB35",
      "unstructured": "T. Nakamura, US Patent 3,239,908 (1966)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB36",
      "doi-asserted-by": "crossref",
      "first-page": "106",
      "DOI": "10.1103/PhysRevLett.6.106",
      "volume": "6",
      "author": "Javan",
      "year": "1961",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB37",
      "unstructured": "J. Haisma, S.J. van Hoppe, US Patent 3,387,226 (1968)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB38",
      "unstructured": "J. Haisma, Construction and properties of short stable gas lasers, Thesis, University of Utrecht, The Netherlands, Philips Res. Rep. 1 (1967) (Suppl.)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB39",
      "unstructured": "D.M. Kenney, US Patent 3,332,137 (1967)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB40",
      "unstructured": "D.I. Pommerantz, US Patent 3,397,278 (1968)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB41",
      "doi-asserted-by": "crossref",
      "first-page": "3946",
      "DOI": "10.1063/1.1657121",
      "volume": "40",
      "author": "Wallis",
      "year": "1969",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB42",
      "unstructured": "E. Obermeier, in: C.E. Hunt, H. Baumgart, S.S. Iyer, T. Abe, U. G\u00f6sele (Eds.), Proceedings of the 3rd Symposium on Semiconductor Wafer Bonding: Physics and Applications, The Electrochemical Society, Pennington, NY, 1995, pp. 212\u2013220."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB43",
      "doi-asserted-by": "crossref",
      "first-page": "2326",
      "DOI": "10.1063/1.1714478",
      "volume": "36",
      "author": "Smith",
      "year": "1965",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB44",
      "doi-asserted-by": "crossref",
      "first-page": "2203",
      "DOI": "10.1063/1.1709856",
      "volume": "38",
      "author": "Haneman",
      "year": "1967",
      "journal-title": "J. Appl. Phys."
    },
    {
      "issue": "5",
      "key": "10.1016/S0927-796X(02)00003-7_BIB45",
      "first-page": "42",
      "volume": "18",
      "author": "Burgess",
      "year": "1975",
      "journal-title": "Solid State Technol."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB46",
      "doi-asserted-by": "crossref",
      "first-page": "688",
      "DOI": "10.1149/1.2134293",
      "volume": "122",
      "author": "Burgess",
      "year": "1975",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB47",
      "first-page": "103",
      "volume": "5",
      "author": "Dickson",
      "year": "1982",
      "journal-title": "Int. J. Hybrid Microelectronics"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB48",
      "unstructured": "K. Burkart, M. Wintzer, US Patent 4,196,837 (1980)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB49",
      "unstructured": "K. Burkart, M. Wintzcr, US Patent 4,274,034 (1981)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB50",
      "unstructured": "J. Riseman, US Patent 4,169,000 (1979)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB51",
      "unstructured": "J. Haisma, SOI technologies: their past, present and future, in: Proceedings of the ESSDERC\u201988, J. Phys. 49 (C4) (1988) 3\u201312."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB52",
      "unstructured": "M. Shimbo, K. Fukuda, US Patent 4,671,846 (1987)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB53",
      "doi-asserted-by": "crossref",
      "unstructured": "M. Shimbo, K. Furukawa, K. Fukuda, K. Tanzawa, J. Appl. Phys. 60 (1986) 2987\u20132989.",
      "DOI": "10.1063/1.337750"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB54",
      "unstructured": "T. Sakai, M. Katsura, H. Hiraki, S. Uno, M. Shimbo, K. Furukawa, US Patent 4,791,465 (1988)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB55",
      "unstructured": "J.R. Abernathey, W.I. Kinney, J.B. Lasky, S.R. Stiffler, US Patent 4,649,627 (1987)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB56",
      "doi-asserted-by": "crossref",
      "first-page": "78",
      "DOI": "10.1063/1.96768",
      "volume": "48",
      "author": "Lasky",
      "year": "1986",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB57",
      "unstructured": "J. Haisma, C.L. Adema, C.L. Alting, R. Brehm, US Patent 4,810,318 (1989)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB58",
      "unstructured": "J. Haisma, Th.M. Michielsen, J.A. Pals, US Patent 4,983,251 (1991)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB59",
      "unstructured": "J. Haisma, C.L. Alting, Th.M. Michielsen, US Patent 5,009,689 (1991)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB60",
      "unstructured": "J. Haisma, A.R. Miedema, US Patent 4,948,029 (1990)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB61",
      "doi-asserted-by": "crossref",
      "first-page": "1035",
      "DOI": "10.1002/(SICI)1521-4095(199908)11:12<1035::AID-ADMA1035>3.0.CO;2-2",
      "volume": "11",
      "author": "Kr\u00e4uter",
      "year": "1999",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB62",
      "unstructured": "F. Twyman, Prism and Lens Making, 2nd Edition, Adam Hilger Ltd., Bristol, 1952."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB63",
      "doi-asserted-by": "crossref",
      "first-page": "6253",
      "DOI": "10.1063/1.346866",
      "volume": "68",
      "author": "Widdershoven",
      "year": "1990",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB64",
      "doi-asserted-by": "crossref",
      "first-page": "7945",
      "DOI": "10.1364/AO.33.007945",
      "volume": "33",
      "author": "Haisma",
      "year": "1994",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB65",
      "unstructured": "T. Abe, M. Nakano, T. Itoh, in: D.N. Schmidt (Ed.), Silicon-on-Insulator Technology and Devices, Electrochemical Society, Pennington, USA, 1990, p. 61."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB66",
      "doi-asserted-by": "crossref",
      "first-page": "1154",
      "DOI": "10.1364/AO.33.001154",
      "volume": "33",
      "author": "Haisma",
      "year": "1994",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB67",
      "unstructured": "J. Haisma, F.J.H.M. van der Kruis, P.F. Bongers, H. Passing, European Patent Application 0,460,763 (1991)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB68",
      "unstructured": "J. Haisma, E.M.H. Kamerbeek, G.A.C.M. Spierings, P.W. de Haas, US Patent 5,483,115 (1996)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB69",
      "unstructured": "J. Haisma, J.F.M. d\u2019Achard van Enschut, C.L. Adema, J.C. Gijsbers, P.K. de Box, US Patent 5,757,883 (1998)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB70",
      "unstructured": "J. Haisma, K.Z. Troost, J.J.C. Groenen, Th.M. Michielsen, European Patent Application 0,655,424 (1994)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB71",
      "unstructured": "U. G\u00f6sele, T. Abe, J. Haisma, M.A. Schmidt, in: Proceedings of the 1st International Symposium on Semiconductor Wafer Bonding, Science, Technology and Applications, Vol. 92-7, The Electrochemical Society, Pennington, USA, 1992."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB72",
      "unstructured": "Proceedings of the Spring Meeting of the Materials Research Society, 16\u201320 April 2001, San Francisco, Abstracts book, Section I."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB73",
      "unstructured": "T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), in: Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB74",
      "unstructured": "S. Noda, Photonic crystal fabrication by a wafer bonding approach, in: Proceedings of the Spring Meeting of the Materials Research Society, 16\u201320 April 2001, San Francisco (Abstract I.6.4)."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB75",
      "doi-asserted-by": "crossref",
      "first-page": "608",
      "DOI": "10.1038/35036532",
      "volume": "407",
      "author": "Noda",
      "year": "2000",
      "journal-title": "Nature"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB76",
      "doi-asserted-by": "crossref",
      "first-page": "608",
      "DOI": "10.1557/mrs2001.153",
      "volume": "26",
      "author": "Polman",
      "year": "2001",
      "journal-title": "MRS Bull."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB77",
      "doi-asserted-by": "crossref",
      "unstructured": "S. Noda, MRS Bull. 26 (2001) 618\u2013621.",
      "DOI": "10.1557/mrs2001.155"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB78",
      "doi-asserted-by": "crossref",
      "first-page": "231",
      "DOI": "10.1063/1.118375",
      "volume": "70",
      "author": "Tajima",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB79",
      "doi-asserted-by": "crossref",
      "first-page": "L1199",
      "DOI": "10.1143/JJAP.37.L1199",
      "volume": "37",
      "author": "Tajima",
      "year": "1998",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB80",
      "doi-asserted-by": "crossref",
      "unstructured": "S. Ibuka, M. Tajima, A. Ogura, Characterization of optical lifetime in silicon-on-insulator wafers by photoluminescence decay method, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.9.6).",
      "DOI": "10.1557/PROC-681-I9.6"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB81",
      "doi-asserted-by": "crossref",
      "unstructured": "J. Bagdahn, D. Katzer, M. Petzold, M. Wiemer, M. Alexe, V. Dragoi, U. G\u00f6sele, Transfer and handling of thin semiconductor materials by a combination of wafer bonding and controlled crack propagation, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract 19.3).",
      "DOI": "10.1557/PROC-681-I9.3"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB82",
      "doi-asserted-by": "crossref",
      "unstructured": "V. Dragoi, M. Alexe, M. Reiche, I. Radu, E. Thallner, Ch. Schaefer, P. Lindner, Si/GaAs heterostructures fabricated by direct bonding, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.5.3).",
      "DOI": "10.1557/PROC-681-I5.3"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB83",
      "doi-asserted-by": "crossref",
      "first-page": "47",
      "DOI": "10.1016/0165-5817(95)82003-5",
      "volume": "49",
      "author": "Spierings",
      "year": "1995",
      "journal-title": "Philips J. Res."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB84",
      "doi-asserted-by": "crossref",
      "unstructured": "D.M. Hansen, C.E. Albaugh, P.D. Moran, T.F. Kuech, Plasma induced chemical changes at silica surfaces during pre-bonding treatments, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.2.3).",
      "DOI": "10.1557/PROC-681-I2.2"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB85",
      "doi-asserted-by": "crossref",
      "unstructured": "I.V. Grekhov, T.S. Agrunova, L.S. Kostina, N.M. Shmidt, H. F\u00f6ll, K.B. Kostin, Direct bonding of silicon wafers with simultaneous dopant diffusion, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.5.7).",
      "DOI": "10.1557/PROC-681-I5.7"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB86",
      "doi-asserted-by": "crossref",
      "first-page": "2108",
      "DOI": "10.1063/1.111698",
      "volume": "64",
      "author": "Yonehara",
      "year": "1994",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB87",
      "doi-asserted-by": "crossref",
      "unstructured": "K. Momoi, M. Ito, N. Sato, N. Honma, T. Yonehara, Gettering control at bonding interface in ELTRAN, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.9.5).",
      "DOI": "10.1557/PROC-681-I9.5"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB88",
      "doi-asserted-by": "crossref",
      "unstructured": "A. Reznicek, S. Senz, O. Breitenstein, R. Scholtz, U. G\u00f6sele, Electrical characterization of UHV-bonded silicon interfaces, in: T.E. Haynes, U.M. G\u00f6sele, M. Nastasi, T. Yonehara (Eds.), Proceedings of Symposium I on Wafer Bonding and Thinning Techniques for Materials Integration, Vol. 681E, Materials Research Society, San Francisco, MRS online publications at www.mrs.org, 2001 (Abstract I.4.4).",
      "DOI": "10.1557/PROC-681-I4.4"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB89",
      "doi-asserted-by": "crossref",
      "first-page": "3614",
      "DOI": "10.1063/1.115335",
      "volume": "67",
      "author": "G\u00f6sele",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB90",
      "doi-asserted-by": "crossref",
      "first-page": "1645",
      "DOI": "10.1149/1.1838530",
      "volume": "145",
      "author": "Hermansson",
      "year": "1998",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB91",
      "doi-asserted-by": "crossref",
      "first-page": "7146",
      "DOI": "10.1063/1.371804",
      "volume": "86",
      "author": "Akatsu",
      "year": "1999",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB92",
      "doi-asserted-by": "crossref",
      "first-page": "1981",
      "DOI": "10.1143/JJAP.19.1981",
      "volume": "19",
      "author": "Morita",
      "year": "1980",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB93",
      "doi-asserted-by": "crossref",
      "first-page": "1589",
      "DOI": "10.1143/JJAP.38.1589",
      "volume": "38",
      "author": "Takagi",
      "year": "1999",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB94",
      "doi-asserted-by": "crossref",
      "first-page": "4439",
      "DOI": "10.1103/PhysRevB.45.4439",
      "volume": "B45",
      "author": "Nelson",
      "year": "1992",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB95",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0022-3093(90)90184-N",
      "volume": "120",
      "author": "Garofalini",
      "year": "1990",
      "journal-title": "J. Non-Cryst. Solids"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB96",
      "doi-asserted-by": "crossref",
      "first-page": "7",
      "DOI": "10.1007/BF01568080",
      "volume": "A62",
      "author": "Conrad",
      "year": "1996",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB97",
      "doi-asserted-by": "crossref",
      "first-page": "40",
      "DOI": "10.1016/S0927-0256(96)00058-4",
      "volume": "7",
      "author": "Scheerschmidt",
      "year": "1996",
      "journal-title": "Comp. Mater. Sci."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB98",
      "doi-asserted-by": "crossref",
      "first-page": "2307",
      "DOI": "10.1063/1.120057",
      "volume": "71",
      "author": "Conrad",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB99",
      "first-page": "118",
      "volume": "27",
      "author": "Matthews",
      "year": "1974",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB100",
      "first-page": "447",
      "volume": "157",
      "author": "Reiche",
      "year": "1997",
      "journal-title": "Inst. Phys. Conf. Ser."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB101",
      "first-page": "13",
      "volume": "A66",
      "author": "K\u00e4stner",
      "year": "1998",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB102",
      "doi-asserted-by": "crossref",
      "first-page": "77",
      "DOI": "10.1016/0040-6090(84)90401-2",
      "volume": "116",
      "author": "Woltersdorf",
      "year": "1984",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB103",
      "doi-asserted-by": "crossref",
      "first-page": "631",
      "DOI": "10.1007/s003390050530",
      "volume": "A64",
      "author": "Tan",
      "year": "1997",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB104",
      "doi-asserted-by": "crossref",
      "first-page": "1685",
      "DOI": "10.1063/1.118669",
      "volume": "70",
      "author": "Ejeckam",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB105",
      "doi-asserted-by": "crossref",
      "first-page": "776",
      "DOI": "10.1063/1.119642",
      "volume": "71",
      "author": "Ejeckam",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB106",
      "doi-asserted-by": "crossref",
      "first-page": "2598",
      "DOI": "10.1063/1.121429",
      "volume": "72",
      "author": "Zhu",
      "year": "1998",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB107",
      "doi-asserted-by": "crossref",
      "first-page": "374",
      "DOI": "10.1063/1.123075",
      "volume": "74",
      "author": "Kopperschmidt",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB108",
      "doi-asserted-by": "crossref",
      "first-page": "1095",
      "DOI": "10.1063/1.120975",
      "volume": "72",
      "author": "Hobart",
      "year": "1998",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB109",
      "doi-asserted-by": "crossref",
      "first-page": "1201",
      "DOI": "10.1049/el:19950805",
      "volume": "31",
      "author": "Bruel",
      "year": "1995",
      "journal-title": "Electron. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB110",
      "doi-asserted-by": "crossref",
      "first-page": "1636",
      "DOI": "10.1143/JJAP.36.1636",
      "volume": "36",
      "author": "Bruel",
      "year": "1997",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB111",
      "doi-asserted-by": "crossref",
      "first-page": "3721",
      "DOI": "10.1063/1.122875",
      "volume": "73",
      "author": "Weldon",
      "year": "1998",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB112",
      "doi-asserted-by": "crossref",
      "first-page": "49",
      "DOI": "10.1063/1.120601",
      "volume": "72",
      "author": "Tong",
      "year": "1998",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB113",
      "doi-asserted-by": "crossref",
      "first-page": "1145",
      "DOI": "10.1116/1.581788",
      "volume": "A17",
      "author": "G\u00f6sele",
      "year": "1999",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB114",
      "doi-asserted-by": "crossref",
      "first-page": "2370",
      "DOI": "10.1063/1.126349",
      "volume": "76",
      "author": "Henttinen",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB115",
      "doi-asserted-by": "crossref",
      "first-page": "994",
      "DOI": "10.1016/0022-0248(90)90870-Q",
      "volume": "102",
      "author": "Mateika",
      "year": "1990",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB116",
      "doi-asserted-by": "crossref",
      "first-page": "979",
      "DOI": "10.1016/0022-0248(90)90869-M",
      "volume": "102",
      "author": "Haisma",
      "year": "1990",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB117",
      "doi-asserted-by": "crossref",
      "first-page": "1014",
      "DOI": "10.1016/0022-0248(90)90871-H",
      "volume": "102",
      "author": "Haisma",
      "year": "1990",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB118",
      "doi-asserted-by": "crossref",
      "unstructured": "J.P. Hirth, J. Lothe, Theory of Dislocations, 2nd Edition, Wiley, New York, 1982.",
      "DOI": "10.1115/1.3167075"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB119",
      "doi-asserted-by": "crossref",
      "first-page": "4124",
      "DOI": "10.1116/1.588604",
      "volume": "B14",
      "author": "Haisma",
      "year": "1996",
      "journal-title": "J. Vac. Sci. Tcchnol."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB120",
      "doi-asserted-by": "crossref",
      "unstructured": "A. Halimaoui, C. Oules, G. Bomchil, A. Bsiesy, F. Caspard, R. Herino, M. Ligeon, F. Muller, Appl. Phys. Lett. 59 (1991) 304\u2013306.",
      "DOI": "10.1063/1.105578"
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB121",
      "doi-asserted-by": "crossref",
      "first-page": "2379",
      "DOI": "10.1063/1.102921",
      "volume": "56",
      "author": "Takagi",
      "year": "1990",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0927-796X(02)00003-7_BIB122",
      "doi-asserted-by": "crossref",
      "first-page": "2400",
      "DOI": "10.1103/PhysRevLett.69.2400",
      "volume": "69",
      "author": "Ohno",
      "year": "1992",
      "journal-title": "Phys. Rev. Lett."
    }
  ],
  "container-title": "Materials Science and Engineering: R: Reports",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0927796X02000037?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0927796X02000037?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        4,
        5
      ]
    ],
    "date-time": "2023-04-05T17:50:39Z",
    "timestamp": 1680717039000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0927796X02000037"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2002,
        4
      ]
    ]
  },
  "references-count": 122,
  "journal-issue": {
    "issue": "1-2",
    "published-print": {
      "date-parts": [
        [
          2002,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "S0927796X02000037"
  ],
  "URL": "http://dx.doi.org/10.1016/S0927-796X(02)00003-7",
  "relation": {},
  "ISSN": [
    "0927-796X"
  ],
  "subject": [],
  "container-title-short": "Materials Science and Engineering: R: Reports",
  "published": {
    "date-parts": [
      [
        2002,
        4
      ]
    ]
  }
}