DOI: 10.1016/s0925-9635(96)00615-2. Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition

Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition

10.1016/s0925-9635(96)00615-2

Crossref journal-article

Elsevier BV

Diamond and Related Materials (78)

Bibliography

Woo, H. K., Zhang, Y., Lee, S. T., Lee, C. S., Lam, Y. W., & Wong, K. W. (1997). Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition. Diamond and Related Materials, 6(5â7), 635â639.

Authors 6

H.K. Woo (first)
Yafei Zhang (additional)
S.T. Lee (additional)
C.S. Lee (additional)
Y.W. Lam (additional)
K.W. Wong (additional)

References 12 Referenced 30

10.1126/science.245.4920.841 / Science by Liu (1989)
10.1103/PhysRevB.41.10727 / Phys. Rev. by Liu (1990)
10.1063/1.105767 / Appl. Phys. Lett. by Mort (1991)
10.1103/PhysRevB.49.5034 / Phys. Rev. by Yu (1994)
{'key': '10.1016/S0925-9635(96)00615-2_BIB5', 'first-page': '512', 'volume': 'A 11', 'author': 'Chen', 'year': '1993', 'journal-title': 'J. Vac. Sci. Technol.'} / J. Vac. Sci. Technol. by Chen (1993)
10.1126/science.261.5119.334 / Science by Niu (1993)
10.1063/1.114789 / Appl. Phys. Lett. by Yen (1995)
10.1016/0038-1098(88)90732-6 / Solid State Commun. by Han (1988)
10.1142/S0217979295001385 / Int. J. Modern Phys. by Marton (1995)
10.1063/1.116492 / Appl. Phys. Lett. by Zhang (1996)
10.1063/1.357912 / J. Appl. Phys. by Zhang (1994)
{'key': '10.1016/S0925-9635(96)00615-2_BIB12', 'first-page': '182', 'article-title': 'High Resolution XPS of Organic Polymers', 'author': 'Beamson', 'year': '1992'} / High Resolution XPS of Organic Polymers by Beamson (1992)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 1:35 p.m.)
Deposited	6 years, 4 months ago (April 24, 2019, 3:01 p.m.)
Indexed	2 months, 2 weeks ago (June 17, 2025, 5:46 a.m.)
Issued	28 years, 5 months ago (April 1, 1997)
Published	28 years, 5 months ago (April 1, 1997)
Published Print	28 years, 5 months ago (April 1, 1997)

Funders 0

None

BibTeX

@article{Woo_1997, title={Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition}, volume={6}, ISSN={0925-9635}, url={http://dx.doi.org/10.1016/s0925-9635(96)00615-2}, DOI={10.1016/s0925-9635(96)00615-2}, number={5–7}, journal={Diamond and Related Materials}, publisher={Elsevier BV}, author={Woo, H.K. and Zhang, Yafei and Lee, S.T. and Lee, C.S. and Lam, Y.W. and Wong, K.W.}, year={1997}, month=apr, pages={635–639} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        17
      ]
    ],
    "date-time": "2025-06-17T09:46:19Z",
    "timestamp": 1750153579589
  },
  "reference-count": 12,
  "publisher": "Elsevier BV",
  "issue": "5-7",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1997,
            4,
            1
          ]
        ],
        "date-time": "1997-04-01T00:00:00Z",
        "timestamp": 859852800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1997,
        4
      ]
    ]
  },
  "DOI": "10.1016/s0925-9635(96)00615-2",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T17:35:45Z",
    "timestamp": 1027618545000
  },
  "page": "635-639",
  "source": "Crossref",
  "is-referenced-by-count": 30,
  "title": "Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition",
  "prefix": "10.1016",
  "volume": "6",
  "author": [
    {
      "given": "H.K.",
      "family": "Woo",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Yafei",
      "family": "Zhang",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "S.T.",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "C.S.",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Y.W.",
      "family": "Lam",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "K.W.",
      "family": "Wong",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "8419",
      "DOI": "10.1126/science.245.4920.841",
      "volume": "245",
      "author": "Liu",
      "year": "1989",
      "journal-title": "Science"
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "10727",
      "DOI": "10.1103/PhysRevB.41.10727",
      "volume": "B 32",
      "author": "Liu",
      "year": "1990",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "3148",
      "DOI": "10.1063/1.105767",
      "volume": "59",
      "author": "Mort",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "5034",
      "DOI": "10.1103/PhysRevB.49.5034",
      "volume": "B 49",
      "author": "Yu",
      "year": "1994",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB5",
      "first-page": "512",
      "volume": "A 11",
      "author": "Chen",
      "year": "1993",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "issue": "16",
      "key": "10.1016/S0925-9635(96)00615-2_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "334",
      "DOI": "10.1126/science.261.5119.334",
      "volume": "261",
      "author": "Niu",
      "year": "1993",
      "journal-title": "Science"
    },
    {
      "issue": "19",
      "key": "10.1016/S0925-9635(96)00615-2_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "2801",
      "DOI": "10.1063/1.114789",
      "volume": "67",
      "author": "Yen",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "921",
      "DOI": "10.1016/0038-1098(88)90732-6",
      "volume": "65",
      "author": "Han",
      "year": "1988",
      "journal-title": "Solid State Commun."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "3527",
      "DOI": "10.1142/S0217979295001385",
      "volume": "9",
      "author": "Marton",
      "year": "1995",
      "journal-title": "Int. J. Modern Phys."
    },
    {
      "issue": "5",
      "key": "10.1016/S0925-9635(96)00615-2_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "634",
      "DOI": "10.1063/1.116492",
      "volume": "68",
      "author": "Zhang",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "7805",
      "DOI": "10.1063/1.357912",
      "volume": "78",
      "author": "Zhang",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0925-9635(96)00615-2_BIB12",
      "first-page": "182",
      "article-title": "High Resolution XPS of Organic Polymers",
      "author": "Beamson",
      "year": "1992"
    }
  ],
  "container-title": "Diamond and Related Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0925963596006152?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0925963596006152?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        24
      ]
    ],
    "date-time": "2019-04-24T19:01:32Z",
    "timestamp": 1556132492000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0925963596006152"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1997,
        4
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "5-7",
    "published-print": {
      "date-parts": [
        [
          1997,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "S0925963596006152"
  ],
  "URL": "http://dx.doi.org/10.1016/S0925-9635(96)00615-2",
  "relation": {},
  "ISSN": [
    "0925-9635"
  ],
  "subject": [],
  "container-title-short": "Diamond and Related Materials",
  "published": {
    "date-parts": [
      [
        1997,
        4
      ]
    ]
  }
}