DOI: 10.1016/s0925-9635(03)00009-8. Growth of hydrogenated amorphous carbon films in pulsed d.c. methane discharges

Growth of hydrogenated amorphous carbon films in pulsed d.c. methane discharges

10.1016/s0925-9635(03)00009-8

Crossref journal-article

Elsevier BV

Diamond and Related Materials (78)

Bibliography

AndÃºjar, J. L., Vives, M., Corbella, C., & Bertran, E. (2003). Growth of hydrogenated amorphous carbon films in pulsed d.c. methane discharges. Diamond and Related Materials, 12(2), 98â104.

Authors 4

J.L. Andújar (first)
M. Vives (additional)
C. Corbella (additional)
E. Bertran (additional)

References 13 Referenced 47

10.1016/S0927-796X(02)00005-0 / Mater. Sci. Eng. R by Robertson (2002)
{'key': '10.1016/S0925-9635(03)00009-8_BIB2', 'series-title': 'Handbook of Thin Materials, vol. 4', 'first-page': '403', 'author': 'Silva', 'year': '2002'} / Handbook of Thin Materials, vol. 4 by Silva (2002)
{'key': '10.1016/S0925-9635(03)00009-8_BIB3', 'series-title': 'Principles of Plasma Discharges and Materials Processing', 'author': 'Lieberman', 'year': '1994'} / Principles of Plasma Discharges and Materials Processing by Lieberman (1994)
R.A. Scholl, Power Supplies for Pulsed Plasma Technologies, Internal Report, Advanced Energy Inc., 1998 (10.1016/S0257-8972(97)00369-1)
10.1016/S0257-8972(97)00403-9 / Surf. Coat. Technol. by Sellers (1998)
10.1016/S0257-8972(97)00369-1 / Surf. Coat. Technol. by Scholl (1998)
10.1016/S0925-9635(97)00236-7 / Diamond Relat. Mater. by Michler (1998)
10.1016/S0925-9635(98)00203-9 / Diamond Relat. Mater. by Michler (1998)
10.1016/S0257-8972(99)00360-6 / Surf. Coat. Technol. by Dekempeneer (1999)
10.1016/S0257-8972(01)01084-2 / Surf. Coat. Technol. by Bradley (2001)
10.1016/S0925-9635(01)00553-2 / Diamond Relat. Mater. by von Keudell (2002)
10.1103/PhysRevB.61.14095 / Phys. Rev. B by Ferrari (2000)
10.1063/1.357385 / J. Appl. Phys. by Tamor (1994)

Dates

Type	When
Created	22 years, 4 months ago (April 7, 2003, 1:19 p.m.)
Deposited	6 years, 5 months ago (March 27, 2019, 2:28 a.m.)
Indexed	1 year, 1 month ago (Aug. 2, 2024, 7:36 p.m.)
Issued	22 years, 7 months ago (Feb. 1, 2003)
Published	22 years, 7 months ago (Feb. 1, 2003)
Published Print	22 years, 7 months ago (Feb. 1, 2003)

Funders 0

None

BibTeX

@article{And_jar_2003, title={Growth of hydrogenated amorphous carbon films in pulsed d.c. methane discharges}, volume={12}, ISSN={0925-9635}, url={http://dx.doi.org/10.1016/s0925-9635(03)00009-8}, DOI={10.1016/s0925-9635(03)00009-8}, number={2}, journal={Diamond and Related Materials}, publisher={Elsevier BV}, author={Andújar, J.L. and Vives, M. and Corbella, C. and Bertran, E.}, year={2003}, month=feb, pages={98–104} }

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