DOI: 10.1016/s0924-4247(99)00383-0. Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon

Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon

10.1016/s0924-4247(99)00383-0

Crossref journal-article

Elsevier BV

Sensors and Actuators A: Physical (78)

Bibliography

Fitzgerald, A. M., Dauskardt, R. H., & Kenny, T. W. (2000). Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon. Sensors and Actuators A: Physical, 83(1â3), 194â199.

Authors 3

A.M Fitzgerald (first)
R.H Dauskardt (additional)
T.W Kenny (additional)

References 11 Referenced 72

10.1149/1.2100861 / J. Elec. Chem. Soc. / Microindentation for fracture and stress-corrosion cracking studies in single-crystal silicon by Wong (1987)
10.1007/BF00540623 / J. Mater. Sci. / Mechanics of strength-degrading contact flaws in silicon by Lawn (1981)
10.1111/j.1151-2916.1990.tb07629.x / J. Am. Ceram. Soc. / A compression-loaded double cantilever beam specimen by Gonzalez (1990)
Robert Bosch, Pat. 4,855,017 USA, 1994.
10.1149/1.1391611 / J. Elec. Chem. Soc. / Characterization of a time multiplexed inductively coupled plasma etcher by Ayon (1999)
{'year': '1993', 'series-title': 'ASTM Standard E399-90. Annual Book of ASTM Standards, 03.01, 509', 'key': '10.1016/S0924-4247(99)00383-0_BIB6'} / ASTM Standard E399-90. Annual Book of ASTM Standards, 03.01, 509 (1993)
10.1557/JMR.1991.1248 / J. Mater. Res. / Fractal fracture of single crystal silicon by Tsai (1991)
{'key': '10.1016/S0924-4247(99)00383-0_BIB8', 'first-page': '469', 'volume': '59', 'author': 'Chen', 'year': '1980', 'journal-title': 'Bull. Am. Ceram. Soc.'} / Bull. Am. Ceram. Soc. by Chen (1980)
10.1007/BF00547968 / J. Mater. Sci. / Crack healing and fracture strength of silicon crystals by Yasutake (1986)
10.1115/1.4010337 / J. Appl. Mech. / A statistical distribution of wide application by Weibull (1951)
{'year': '1994', 'series-title': 'Weibull Analysis', 'author': 'Dodson', 'key': '10.1016/S0924-4247(99)00383-0_BIB11'} / Weibull Analysis by Dodson (1994)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 10:34 p.m.)
Deposited	8 months, 2 weeks ago (Dec. 13, 2024, 3:54 a.m.)
Indexed	8 months, 2 weeks ago (Dec. 14, 2024, 12:17 a.m.)
Issued	25 years, 3 months ago (May 1, 2000)
Published	25 years, 3 months ago (May 1, 2000)
Published Print	25 years, 3 months ago (May 1, 2000)

Funders 0

None

BibTeX

@article{Fitzgerald_2000, title={Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon}, volume={83}, ISSN={0924-4247}, url={http://dx.doi.org/10.1016/s0924-4247(99)00383-0}, DOI={10.1016/s0924-4247(99)00383-0}, number={1–3}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Fitzgerald, A.M and Dauskardt, R.H and Kenny, T.W}, year={2000}, month=may, pages={194–199} }

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