DOI: 10.1016/s0924-4247(97)01692-0. Fabrication of microstructures using shrinkable polystyrene films

Fabrication of microstructures using shrinkable polystyrene films

10.1016/s0924-4247(97)01692-0

Crossref journal-article

Elsevier BV

Sensors and Actuators A: Physical (78)

Bibliography

Zhao, X.-M., Xia, Y., Schueller, O. J. A., Qin, D., & Whitesides, G. M. (1998). Fabrication of microstructures using shrinkable polystyrene films. Sensors and Actuators A: Physical, 65(2â3), 209â217.

Authors 5

Xiao-Mei Zhao (first)
Younan Xia (additional)
Olivier J.A. Schueller (additional)
Dong Qin (additional)
George M. Whitesides (additional)

References 32 Referenced 50

10.1002/adma.19970090316 / Adv. Mater. / Fabrication of polymeric microstructures with high aspect ratios using shrinkable polystyrene films by Zhao (1997)
{'key': '10.1016/S0924-4247(97)01692-0_bib2', 'first-page': '45', 'article-title': 'Shrinkable polymeric packaging films', 'volume': '38', 'author': 'Sreekant', 'year': '1993', 'journal-title': 'Pop. Plast. Packag.'} / Pop. Plast. Packag. / Shrinkable polymeric packaging films by Sreekant (1993)
10.1021/la960238u / Langmuir / A new strategy for controlling the size and shape of metallic features formed by electroless deposition of copper: microcontact printing of catalysts on oriented polymers, followed by thermal shrinkage by Hidber (1996)
10.1016/0167-9317(95)00175-1 / Microelectron. Eng. / Dry etching and induced damage by van der Drift (1996)
{'key': '10.1016/S0924-4247(97)01692-0_bib5', 'series-title': 'Thin Film Processes', 'author': 'Vossen', 'year': '1978'} / Thin Film Processes by Vossen (1978)
10.1116/1.584440 / J. Vac. Sci. Technol. B / Oxygen plasma etching for resist stripping and multilayer lithography by Hartney (1989)
10.1002/pen.760201610 / Poly. Sci. Eng. / Oxygen plasma removal of thin polymer films by Taylor (1980)
10.1116/1.569581 / J. Vac. Sci. Technol. / Profile control by reactive sputter etching by Lehmann (1978)
10.1149/1.2123758 / J. Electrochem. Soc. / Structural composition of polymers relative to their plasma etch characteristics by Pederson (1982)
10.1149/1.1836660 / J. Electrochem. Soc. / Investigation of polyimide residue due to reactive ion etching in O2 by Tsang (1996)
{'key': '10.1016/S0924-4247(97)01692-0_bib11', 'author': 'Brandrup', 'year': '1989'} by Brandrup (1989)
10.1021/ja00116a033 / J. Am. Chem. Soc. / Use of controlled reactive spreading of liquid alkanethiol on the surface of gold to modify the size of features produced by microcontact printing by Xia (1995)
10.1002/adma.19950070513 / Adv. Mater. / Reduction in the size of features of patterned SAM generated by microcontact printing with mechanical compression of the stamp by Xia (1995)
10.1126/science.273.5273.347 / Science / Complex optical surfaces formed by replica molding against elastomeric masters by Xia (1996)
10.1002/adma.19970090211 / Adv. Mater. / Replica molding using polymeric materials: a practical step toward nanomanufacturing by Xia (1997)
10.1149/1.1836415 / J. Electrochem. Soc. / UV depth lithography and galvanoforming for micromachining by Löchel (1996)
10.1063/1.113906 / Appl. Phys. Lett. / Use of photosensitive polyimide for deep x-ray lithography by White (1995)
{'key': '10.1016/S0924-4247(97)01692-0_bib18', 'first-page': '93', 'article-title': '3D structures for micro-system technology using proximity lithography', 'author': 'Cullmann', 'year': '1995', 'journal-title': 'Solid State Tech.'} / Solid State Tech. / 3D structures for micro-system technology using proximity lithography by Cullmann (1995)
10.1364/AO.23.001143 / Appl. Optics / Technique for fabricating metal-mesh reflectors on curved substrates by Douglas (1984)
10.1116/1.584085 / J. Vac. Sci. Technol. B / Three-dimensional photolithography with conformal GeSe resist by Vadimsky (1988)
{'key': '10.1016/S0924-4247(97)01692-0_bib21', 'first-page': '391', 'article-title': 'Transfer mask for high aspect ratio micro-lithography', 'volume': 'Vol. 2437', 'author': 'Vladimirsky', 'year': '1995'} / Transfer mask for high aspect ratio micro-lithography by Vladimirsky (1995)
10.1116/1.583992 / J. Vac. Sci. Technol. B / Pattern definition and formation on curved surfaces by Deininger (1988)
10.1021/la00017a030 / Langmuir / Patterning self-assembled monolayers: applications in material science by Kumar (1994)
10.1002/(SICI)1521-4095(199805)10:8<571::AID-ADMA571>3.0.CO;2-P / Adv. Mater. / Fabrication of glass microstructures by micro-molding by Marzolin (1998)
{'key': '10.1016/S0924-4247(97)01692-0_bib25', 'series-title': 'Sol-Gel Science', 'author': 'Brinker', 'year': '1990'} / Sol-Gel Science by Brinker (1990)
{'key': '10.1016/S0924-4247(97)01692-0_bib26', 'series-title': 'Transformation of Organometallics into Common and Exotic Materials', 'author': 'Dislich', 'year': '1988'} / Transformation of Organometallics into Common and Exotic Materials by Dislich (1988)
10.1002/adma.19960081016 / Adv. Mater. / Fabrication of three-dimensional microstructures: microtransfer molding by Zhao (1996)
10.1002/adma.19970090604 / Adv. Mater. / Fabrication of glassy carbon microstructures by pyrolysis of microfabricated polymeric precursors by Schueller (1997)
10.1021/cm960639v / Chem. Mater. / Fabrication and characterization of glassy carbon MEMS by Schueller (1997)
10.1038/376581a0 / Nature / Polymer microstructures formed by moulding in capillaries by Kim (1995)
10.1021/cm9602196 / Chem. Mater. / Micromolding of polymers in capillaries: applications in microfabrication by Xia (1996)
10.1002/adma.19960081110 / Adv. Mater. / Rapid prototyping of complex structures with feature sizes larger than 20 micron by Qin (1996)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 9:26 a.m.)
Deposited	6 years, 3 months ago (April 29, 2019, 9:22 a.m.)
Indexed	12 hours, 4 minutes ago (Aug. 28, 2025, 8:43 a.m.)
Issued	27 years, 5 months ago (March 1, 1998)
Published	27 years, 5 months ago (March 1, 1998)
Published Print	27 years, 5 months ago (March 1, 1998)

Funders 0

None

BibTeX

@article{Zhao_1998, title={Fabrication of microstructures using shrinkable polystyrene films}, volume={65}, ISSN={0924-4247}, url={http://dx.doi.org/10.1016/s0924-4247(97)01692-0}, DOI={10.1016/s0924-4247(97)01692-0}, number={2–3}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Zhao, Xiao-Mei and Xia, Younan and Schueller, Olivier J.A. and Qin, Dong and Whitesides, George M.}, year={1998}, month=mar, pages={209–217} }

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