DOI: 10.1016/s0924-2031(01)00197-7. Infrared spectroscopic ellipsometry—a new tool for characterization of semiconductor heterostructures

Infrared spectroscopic ellipsometry—a new tool for characterization of semiconductor heterostructures

10.1016/s0924-2031(01)00197-7

Crossref journal-article

Elsevier BV

Vibrational Spectroscopy (78)

Bibliography

Kasic, A., Schubert, M., Einfeldt, S., & Hommel, D. (2002). Infrared spectroscopic ellipsometryâa new tool for characterization of semiconductor heterostructures. Vibrational Spectroscopy, 29(1â2), 121â124.

Authors 4

A. Kasic (first)
M. Schubert (additional)
S. Einfeldt (additional)
D. Hommel (additional)

References 9 Referenced 5

10.1103/PhysRevB.62.7365 / Phys. Rev. B by Kasic (2000)
10.1063/1.1344913 / J. Appl. Phys. by Kasic (2001)
10.1063/1.1355010 / Appl. Phys. Lett. by Kasic (2001)
R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1984.
10.1016/S0040-6090(97)00765-7 / Thin Solid Films by Jellison (1998)
C.M. Wolfe, N. Holonyak, G.E. Stillmann, Physical Properties of Semiconductors, Prentice Hall, New Jersey, 1989.
10.1103/PhysRevB.61.8187 / Phys. Rev. B by Schubert (2000)
10.1116/1.589802 / J. Vac. Sci. Technol. B by Tiwald (1998)
10.1103/PhysRevB.61.6091 / Phys. Rev. B by Grille (2000)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 15, 2002, 10:10 a.m.)
Deposited	6 years, 3 months ago (April 28, 2019, 11 a.m.)
Indexed	1 year, 9 months ago (Nov. 20, 2023, 3:03 p.m.)
Issued	23 years, 1 month ago (July 1, 2002)
Published	23 years, 1 month ago (July 1, 2002)
Published Print	23 years, 1 month ago (July 1, 2002)

Funders 0

None

BibTeX

@article{Kasic_2002, title={Infrared spectroscopic ellipsometry—a new tool for characterization of semiconductor heterostructures}, volume={29}, ISSN={0924-2031}, url={http://dx.doi.org/10.1016/s0924-2031(01)00197-7}, DOI={10.1016/s0924-2031(01)00197-7}, number={1–2}, journal={Vibrational Spectroscopy}, publisher={Elsevier BV}, author={Kasic, A. and Schubert, M. and Einfeldt, S. and Hommel, D.}, year={2002}, month=jul, pages={121–124} }

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