DOI: 10.1016/s0257-8972(97)00338-1. Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films

Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films

10.1016/s0257-8972(97)00338-1

Crossref journal-article

Elsevier BV

Surface and Coatings Technology (78)

Bibliography

WestergÃ¥rd, R., Bromark, M., Larsson, M., Hedenqvist, P., & Hogmark, S. (1997). Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films. Surface and Coatings Technology, 97(1â3), 779â784.

Authors 5

R Westergård (first)
M Bromark (additional)
M Larsson (additional)
P Hedenqvist (additional)
S Hogmark (additional)

References 10 Referenced 33

10.1016/S0257-8972(09)90042-1 / Surf. Coat. Technol. by Freller (1992)
10.1016/0257-8972(95)02624-X / Surf. Coat. Technol. by Saha (1996)
10.1007/BF00332442 / Appl. Phys. A by Jia (1994)
10.1039/ja9880300879 / J. Analyt. Atom. Spectrom. by Bengtsson (1988)
10.1179/sur.1996.12.1.43 / Surf. Engng by Larsson (1996)
10.1016/S0257-8972(96)03101-5 / Surf. Coat. Technol. by Gåhlin (1997)
Joint Commitee on Powder Diffraction Standards, no. 29-1321, (1995).
Joint Commitee on Powder Diffraction Standards, no. 39-1485, (1995).
Metals Handbook, 9th ed. vol. 2, ASM Publishing, 1979, p. 799.
10.1016/0043-1648(94)90233-X / Wear by Hogmark (1994)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 8:29 p.m.)
Deposited	6 years, 4 months ago (April 16, 2019, 5:53 p.m.)
Indexed	2 months, 3 weeks ago (June 14, 2025, 11:46 a.m.)
Issued	27 years, 9 months ago (Dec. 1, 1997)
Published	27 years, 9 months ago (Dec. 1, 1997)
Published Print	27 years, 9 months ago (Dec. 1, 1997)

Funders 0

None

BibTeX

@article{Westerg_rd_1997, title={Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films}, volume={97}, ISSN={0257-8972}, url={http://dx.doi.org/10.1016/s0257-8972(97)00338-1}, DOI={10.1016/s0257-8972(97)00338-1}, number={1–3}, journal={Surface and Coatings Technology}, publisher={Elsevier BV}, author={Westergård, R and Bromark, M and Larsson, M and Hedenqvist, P and Hogmark, S}, year={1997}, month=dec, pages={779–784} }

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