DOI: 10.1016/s0257-8972(97)00159-x. Magnetron-sputtered superhard materials

10.1016/s0257-8972(97)00159-x

Crossref journal-article

Elsevier BV

Surface and Coatings Technology (78)

Bibliography

Ulrich, S., Theel, T., Schwan, J., & Ehrhardt, H. (1997). Magnetron-sputtered superhard materials. Surface and Coatings Technology, 97(1â3), 45â59.

Authors 4

S. Ulrich (first)
T. Theel (additional)
J. Schwan (additional)
H. Ehrhardt (additional)

References 87 Referenced 93

10.1103/PhysRevB.32.7988 / Phys. Rev. B by Cohen (1985)
10.1016/0038-1098(94)90857-5 / Solid State Comm. by Cohen (1994)
10.1103/PhysRevB.41.10727 / Phys. Rev. B by Liu (1990)
10.1016/0257-8972(95)08212-3 / Surf. Coat. Technol. by Ehrhardt (1995)
10.1007/BF00321934 / Fresenius J. Anal. Chem. by Keller (1991)
10.1007/BF00321935 / Fresenius J. Anal. Chem. by Dötter (1991)
10.1016/0921-5093(91)90608-P / Mater. Sci. Eng. A by Keller (1991)
10.1063/1.335885 / J. Appl. Phys. by Müller (1985)
10.1103/PhysRevB.41.10468 / Phys. Rev. B by Lifshitz (1990)
10.1016/0040-6090(93)90201-Y / Thin Solid Films by Davis (1993)
10.1063/1.339560 / J. Appl. Phys. by Windischmann (1987)
{'key': '10.1016/S0257-8972(97)00159-X_BIB12', 'first-page': '305', 'volume': '3', 'author': 'Seitz', 'year': '1956', 'journal-title': 'Solid State Phys.'} / Solid State Phys. by Seitz (1956)
10.1016/0925-9635(94)90186-4 / Diamond Relat. Mater. by Robertson (1994)
10.1016/0925-9635(94)05244-1 / Diamond Relat. Mater. by Ulrich (1995)
10.1063/1.116227 / Appl. Phys. Lett. by Ulrich (1996)
P. Widmayer, P. Ziemann, S. Ulrich, H. Ehrhardt, to be published in Diamond Relat. Mater.
10.1016/0040-6090(90)90033-A / Thin Solid Films by Mineta (1990)
10.1016/0925-9635(93)90111-E / Diamond Relat. Mater. by Tanabe (1993)
10.1016/0925-9635(94)90181-3 / Diamond Relat. Mater. by Kester (1994)
10.1557/JMR.1994.2925 / J. Mater. Res. by Mirkarimi (1994)
10.1016/0925-9635(94)90182-1 / Diamond Relat. Mater. by Dworschak (1994)
10.1016/0257-8972(93)90139-F / Surf. Coat. Technol. by Weber (1993)
10.1063/1.357491 / J. Appl. Phys. by Friedmann (1994)
10.1143/JJAP.29.L1175 / Jpn J. Appl. Sci. by Mieno (1990)
10.1016/0925-9635(93)90171-W / Diamond Relat. Mater. by Bewilogua (1993)
S. Ulrich, J. Schwan, W. Donner, H. Ehrhardt, Diamond Relat. Mater., accepted for publication.
10.1063/1.112245 / Appl. Phys. Lett. by Huai (1994)
10.1103/PhysRev.130.2193 / Phys. Rev. by Berreman (1963)
{'key': '10.1016/S0257-8972(97)00159-X_BIB29', 'first-page': '199', 'volume': '63', 'author': 'Koskinen', 'year': '1991', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. by Koskinen (1991)
10.1063/1.337925 / J. Appl. Phys. by Ishikawa (1987)
10.1103/PhysRevLett.67.773 / Phys. Rev. Lett. by McKenzie (1991)
10.1103/PhysRevB.48.4777 / Phys. Rev. B by Fallon (1993)
10.1063/1.336672 / J. Appl. Phys. by Savvides (1986)
10.1016/0925-9635(92)90046-Q / Diamond Relat. Mater. by Andre (1992)
10.1063/1.104609 / Appl. Phys. Lett. by Cuomo (1991)
10.1063/1.360979 / J. Appl. Phys. by Schwan (1996)
10.1116/1.576419 / J. Vac. Sci. Technol. A by Makowiecki (1990)
10.1364/AO.33.005962 / Appl. Opt. by Blumenstock (1994)
10.1063/1.352060 / J. Appl. Phys. by Lee (1992)
10.1063/1.116266 / Appl. Phys. Lett. by Hwang (1996)
10.1063/1.347057 / J. Appl. Phys. by Jankowski (1990)
10.1016/0040-6090(91)90452-4 / Thin Solid Films by Jankowski (1991)
10.1016/0257-8972(91)90092-B / Surf. Coat. Technol. by McKernan (1991)
10.1016/0168-583X(94)96311-8 / Nucl. Instr. Meth. Phys. Res. B by Chiang (1994)
10.1063/1.40830 / AIP Conf. Proc. by Kervalishvili (1991)
10.1016/0040-6090(90)90035-C / Thin Solid Films by Shinno (1990)
10.1016/0040-6090(89)90121-1 / Thin Solid Films by Olsson (1989)
10.1016/0040-6090(85)90251-2 / Thin Solid Films by Jansson (1985)
10.1016/0040-6090(89)90120-X / Thin Solid Films by Jansson (1989)
10.1016/0022-0248(86)90266-6 / J. Cryst. Growth by Kevill (1986)
10.1016/0022-0248(74)90304-2 / J. Cryst. Growth by Ploog (1974)
10.1016/0040-6090(90)90200-W / Thin Solid Films by Cholet (1990)
10.1103/PhysRevB.29.4582 / Phys. Rev. B by Wood (1984)
10.1063/1.352060 / J. Appl. Phys. by Lee (1992)
10.1557/PROC-280-463 / Mater. Res. Soc. Symp. Proc. by Fang (1993)
10.1016/0040-6090(76)90370-9 / Thin Solid Films by Wasa (1976)
10.1016/0040-6090(79)90021-X / Thin Solid Films by Hirohota (1979)
10.1116/1.574062 / J. Vac. Sci. Technol. A by Sundgren (1986)
10.1016/0040-6090(93)90734-7 / Thin Solid Films by Laidani (1993)
10.1016/S0257-8972(07)80079-X / Surf. Coat. Technol. by Sung (1992)
10.1116/1.585298 / J. Vac. Sci. Technol. B by Boily (1991)
10.1016/S0257-8972(05)80025-8 / Surf. Coat. Technol. by Rivière (1994)
10.1016/0257-8972(94)90049-3 / Surf. Coat. Technol. by Guzman (1994)
10.1116/1.585118 / J. Vac. Sci. Technol. B by Wells (1990)
10.1116/1.585116 / J. Vac. Sci. Technol. B by Haghire-Goset (1990)
10.1116/1.585300 / J. Vac. Sci. Technol B by Itoh (1991)
10.1116/1.585299 / J. Vac. Sci. Technol. B by Shimkunas (1991)
S. Ulrich, Herstellung superharter Materialien durch Magnetronzerstäuben und Ionenplattieren, Dissertation, University of Kaiserslautern, Germany, 1996, p. 84.
{'key': '10.1016/S0257-8972(97)00159-X_BIB69', 'first-page': '653', 'volume': '28', 'author': 'Movchan', 'year': '1969', 'journal-title': 'Fiz. Met. Metalloved.'} / Fiz. Met. Metalloved. by Movchan (1969)
10.1116/1.568682 / J. Vac. Sci. Technol. by Thornton (1975)
10.1116/1.572604 / J. Vac. Sci. Technol. A by Messier (1984)
10.1016/S0257-8972(89)80009-X / Surf. Coat. Technol. by Moll (1989)
10.1063/1.343188 / J. Appl. Phys. by Moore (1989)
10.1051/jp4:1993325 / J. Phys. IV by Derre (1993)
10.1149/1.2086919 / J. Electrochem. Soc. by Yamada (1990)
10.1016/0040-6090(84)90361-4 / Thin Solid Films by Montasser (1984)
10.1002/zaac.19926100114 / Z. Anorg. Allg. Chem. by Bill (1992)
10.1016/0025-5408(81)90057-X / Mater. Res. Bull. by Badzian (1981)
10.1103/PhysRevB.39.1760 / Phys. Rev. B by Liu (1989)
10.1103/PhysRevB.47.9289 / Phys. Rev. B by Lambrecht (1993)
10.1111/j.1151-2916.1990.tb07618.x / J. Am. Ceram. Soc. by Besmann (1990)
10.1111/j.1151-2916.1992.tb05459.x / J. Am. Ceram. Soc. by Saugnac (1992)
E.H.A. Dekempeneer, V. Wagner, L.J. van Itzendoorn, J. Meneve, S. Kuypers, J. Smeets, J. Geurts, R. Candano, paper presented at Int. Conf. on Metallurgical Coatings and Thin Films, 22–26 April 1996, San Diego, CA.
N. Kawaguchi, T. Kawashima, J. Chem. Soc., Chem. Commun., (1993) 1133. (10.1039/c39930001133)
10.1021/cm00029a020 / Chem. Mater. by Sasaki (1993)
10.1006/jssc.1995.1037 / J. Sol. St. Chem. by Hubácek (1995)
10.1103/PhysRevB.39.13053 / Phys. Rev. B by Kaufmann (1989)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 9:30 a.m.)
Deposited	6 years, 3 months ago (April 29, 2019, 6:54 a.m.)
Indexed	11 months, 1 week ago (Sept. 16, 2024, 5:18 p.m.)
Issued	27 years, 8 months ago (Dec. 1, 1997)
Published	27 years, 8 months ago (Dec. 1, 1997)
Published Print	27 years, 8 months ago (Dec. 1, 1997)

Funders 0

None

BibTeX

@article{Ulrich_1997, title={Magnetron-sputtered superhard materials}, volume={97}, ISSN={0257-8972}, url={http://dx.doi.org/10.1016/s0257-8972(97)00159-x}, DOI={10.1016/s0257-8972(97)00159-x}, number={1–3}, journal={Surface and Coatings Technology}, publisher={Elsevier BV}, author={Ulrich, S. and Theel, T. and Schwan, J. and Ehrhardt, H.}, year={1997}, month=dec, pages={45–59} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        9,
        16
      ]
    ],
    "date-time": "2024-09-16T21:18:10Z",
    "timestamp": 1726521490197
  },
  "reference-count": 87,
  "publisher": "Elsevier BV",
  "issue": "1-3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1997,
            12,
            1
          ]
        ],
        "date-time": "1997-12-01T00:00:00Z",
        "timestamp": 880934400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1997,
        12
      ]
    ]
  },
  "DOI": "10.1016/s0257-8972(97)00159-x",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T13:30:42Z",
    "timestamp": 1027603842000
  },
  "page": "45-59",
  "source": "Crossref",
  "is-referenced-by-count": 93,
  "title": "Magnetron-sputtered superhard materials",
  "prefix": "10.1016",
  "volume": "97",
  "author": [
    {
      "given": "S.",
      "family": "Ulrich",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "T.",
      "family": "Theel",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "J.",
      "family": "Schwan",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "H.",
      "family": "Ehrhardt",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "7988",
      "DOI": "10.1103/PhysRevB.32.7988",
      "volume": "32",
      "author": "Cohen",
      "year": "1985",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "45",
      "DOI": "10.1016/0038-1098(94)90857-5",
      "volume": "92",
      "author": "Cohen",
      "year": "1994",
      "journal-title": "Solid State Comm."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "10727",
      "DOI": "10.1103/PhysRevB.41.10727",
      "volume": "41",
      "author": "Liu",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "29",
      "DOI": "10.1016/0257-8972(95)08212-3",
      "volume": "74/75",
      "author": "Ehrhardt",
      "year": "1995",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "349",
      "DOI": "10.1007/BF00321934",
      "volume": "341",
      "author": "Keller",
      "year": "1991",
      "journal-title": "Fresenius J. Anal. Chem."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "353",
      "DOI": "10.1007/BF00321935",
      "volume": "341",
      "author": "D\u00f6tter",
      "year": "1991",
      "journal-title": "Fresenius J. Anal. Chem."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "349",
      "DOI": "10.1016/0921-5093(91)90608-P",
      "volume": "139",
      "author": "Keller",
      "year": "1991",
      "journal-title": "Mater. Sci. Eng. A"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "2573",
      "DOI": "10.1063/1.335885",
      "volume": "58",
      "author": "M\u00fcller",
      "year": "1985",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "10468",
      "DOI": "10.1103/PhysRevB.41.10468",
      "volume": "41",
      "author": "Lifshitz",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "30",
      "DOI": "10.1016/0040-6090(93)90201-Y",
      "volume": "226",
      "author": "Davis",
      "year": "1993",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "1800",
      "DOI": "10.1063/1.339560",
      "volume": "62",
      "author": "Windischmann",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB12",
      "first-page": "305",
      "volume": "3",
      "author": "Seitz",
      "year": "1956",
      "journal-title": "Solid State Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "361",
      "DOI": "10.1016/0925-9635(94)90186-4",
      "volume": "3",
      "author": "Robertson",
      "year": "1994",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "288",
      "DOI": "10.1016/0925-9635(94)05244-1",
      "volume": "4",
      "author": "Ulrich",
      "year": "1995",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "909",
      "DOI": "10.1063/1.116227",
      "volume": "68",
      "author": "Ulrich",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB16",
      "unstructured": "P. Widmayer, P. Ziemann, S. Ulrich, H. Ehrhardt, to be published in Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "125",
      "DOI": "10.1016/0040-6090(90)90033-A",
      "volume": "189",
      "author": "Mineta",
      "year": "1990",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "125",
      "DOI": "10.1016/0925-9635(93)90111-E",
      "volume": "2",
      "author": "Tanabe",
      "year": "1993",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "332",
      "DOI": "10.1016/0925-9635(94)90181-3",
      "volume": "3",
      "author": "Kester",
      "year": "1994",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "2925",
      "DOI": "10.1557/JMR.1994.2925",
      "volume": "9",
      "author": "Mirkarimi",
      "year": "1994",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB21",
      "doi-asserted-by": "crossref",
      "first-page": "337",
      "DOI": "10.1016/0925-9635(94)90182-1",
      "volume": "3",
      "author": "Dworschak",
      "year": "1994",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "493",
      "DOI": "10.1016/0257-8972(93)90139-F",
      "volume": "60",
      "author": "Weber",
      "year": "1993",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "3088",
      "DOI": "10.1063/1.357491",
      "volume": "76",
      "author": "Friedmann",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "L1175",
      "DOI": "10.1143/JJAP.29.L1175",
      "volume": "29",
      "author": "Mieno",
      "year": "1990",
      "journal-title": "Jpn J. Appl. Sci."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB25",
      "doi-asserted-by": "crossref",
      "first-page": "1206",
      "DOI": "10.1016/0925-9635(93)90171-W",
      "volume": "2",
      "author": "Bewilogua",
      "year": "1993",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB26",
      "unstructured": "S. Ulrich, J. Schwan, W. Donner, H. Ehrhardt, Diamond Relat. Mater., accepted for publication."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB27",
      "doi-asserted-by": "crossref",
      "first-page": "830",
      "DOI": "10.1063/1.112245",
      "volume": "65",
      "author": "Huai",
      "year": "1994",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB28",
      "doi-asserted-by": "crossref",
      "first-page": "2193",
      "DOI": "10.1103/PhysRev.130.2193",
      "volume": "130",
      "author": "Berreman",
      "year": "1963",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB29",
      "first-page": "199",
      "volume": "63",
      "author": "Koskinen",
      "year": "1991",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB30",
      "doi-asserted-by": "crossref",
      "first-page": "2509",
      "DOI": "10.1063/1.337925",
      "volume": "61",
      "author": "Ishikawa",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB31",
      "doi-asserted-by": "crossref",
      "first-page": "773",
      "DOI": "10.1103/PhysRevLett.67.773",
      "volume": "7",
      "author": "McKenzie",
      "year": "1991",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB32",
      "doi-asserted-by": "crossref",
      "first-page": "4777",
      "DOI": "10.1103/PhysRevB.48.4777",
      "volume": "48",
      "author": "Fallon",
      "year": "1993",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB33",
      "doi-asserted-by": "crossref",
      "first-page": "4133",
      "DOI": "10.1063/1.336672",
      "volume": "59",
      "author": "Savvides",
      "year": "1986",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB34",
      "doi-asserted-by": "crossref",
      "first-page": "307",
      "DOI": "10.1016/0925-9635(92)90046-Q",
      "volume": "1",
      "author": "Andre",
      "year": "1992",
      "journal-title": "Diamond Relat. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB35",
      "doi-asserted-by": "crossref",
      "first-page": "466",
      "DOI": "10.1063/1.104609",
      "volume": "58",
      "author": "Cuomo",
      "year": "1991",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB36",
      "doi-asserted-by": "crossref",
      "first-page": "1406",
      "DOI": "10.1063/1.360979",
      "volume": "79",
      "author": "Schwan",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB37",
      "doi-asserted-by": "crossref",
      "first-page": "3910",
      "DOI": "10.1116/1.576419",
      "volume": "8",
      "author": "Makowiecki",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB38",
      "doi-asserted-by": "crossref",
      "first-page": "5962",
      "DOI": "10.1364/AO.33.005962",
      "volume": "33",
      "author": "Blumenstock",
      "year": "1994",
      "journal-title": "Appl. Opt."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB39",
      "doi-asserted-by": "crossref",
      "first-page": "4925",
      "DOI": "10.1063/1.352060",
      "volume": "72",
      "author": "Lee",
      "year": "1992",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB40",
      "doi-asserted-by": "crossref",
      "first-page": "1495",
      "DOI": "10.1063/1.116266",
      "volume": "68",
      "author": "Hwang",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB41",
      "doi-asserted-by": "crossref",
      "first-page": "5162",
      "DOI": "10.1063/1.347057",
      "volume": "68",
      "author": "Jankowski",
      "year": "1990",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB42",
      "doi-asserted-by": "crossref",
      "first-page": "365",
      "DOI": "10.1016/0040-6090(91)90452-4",
      "volume": "206",
      "author": "Jankowski",
      "year": "1991",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB43",
      "doi-asserted-by": "crossref",
      "first-page": "411",
      "DOI": "10.1016/0257-8972(91)90092-B",
      "volume": "49",
      "author": "McKernan",
      "year": "1991",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB44",
      "doi-asserted-by": "crossref",
      "first-page": "692",
      "DOI": "10.1016/0168-583X(94)96311-8",
      "volume": "91",
      "author": "Chiang",
      "year": "1994",
      "journal-title": "Nucl. Instr. Meth. Phys. Res. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB45",
      "doi-asserted-by": "crossref",
      "first-page": "524",
      "DOI": "10.1063/1.40830",
      "volume": "231",
      "author": "Kervalishvili",
      "year": "1991",
      "journal-title": "AIP Conf. Proc."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB46",
      "doi-asserted-by": "crossref",
      "first-page": "149",
      "DOI": "10.1016/0040-6090(90)90035-C",
      "volume": "189",
      "author": "Shinno",
      "year": "1990",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB47",
      "doi-asserted-by": "crossref",
      "first-page": "95",
      "DOI": "10.1016/0040-6090(89)90121-1",
      "volume": "172",
      "author": "Olsson",
      "year": "1989",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB48",
      "doi-asserted-by": "crossref",
      "first-page": "101",
      "DOI": "10.1016/0040-6090(85)90251-2",
      "volume": "124",
      "author": "Jansson",
      "year": "1985",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB49",
      "doi-asserted-by": "crossref",
      "first-page": "81",
      "DOI": "10.1016/0040-6090(89)90120-X",
      "volume": "172",
      "author": "Jansson",
      "year": "1989",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB50",
      "doi-asserted-by": "crossref",
      "first-page": "210",
      "DOI": "10.1016/0022-0248(86)90266-6",
      "volume": "74",
      "author": "Kevill",
      "year": "1986",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB51",
      "doi-asserted-by": "crossref",
      "first-page": "197",
      "DOI": "10.1016/0022-0248(74)90304-2",
      "volume": "24/25",
      "author": "Ploog",
      "year": "1974",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB52",
      "doi-asserted-by": "crossref",
      "first-page": "143",
      "DOI": "10.1016/0040-6090(90)90200-W",
      "volume": "188",
      "author": "Cholet",
      "year": "1990",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB53",
      "doi-asserted-by": "crossref",
      "first-page": "4582",
      "DOI": "10.1103/PhysRevB.29.4582",
      "volume": "29",
      "author": "Wood",
      "year": "1984",
      "journal-title": "Phys. Rev. B"
    },
    {
      "issue": "10",
      "key": "10.1016/S0257-8972(97)00159-X_BIB54",
      "doi-asserted-by": "crossref",
      "first-page": "4925",
      "DOI": "10.1063/1.352060",
      "volume": "72",
      "author": "Lee",
      "year": "1992",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB55",
      "doi-asserted-by": "crossref",
      "first-page": "463",
      "DOI": "10.1557/PROC-280-463",
      "volume": "280",
      "author": "Fang",
      "year": "1993",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB56",
      "doi-asserted-by": "crossref",
      "first-page": "235",
      "DOI": "10.1016/0040-6090(76)90370-9",
      "volume": "31",
      "author": "Wasa",
      "year": "1976",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB57",
      "doi-asserted-by": "crossref",
      "first-page": "237",
      "DOI": "10.1016/0040-6090(79)90021-X",
      "volume": "63",
      "author": "Hirohota",
      "year": "1979",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB58",
      "doi-asserted-by": "crossref",
      "first-page": "2259",
      "DOI": "10.1116/1.574062",
      "volume": "4",
      "author": "Sundgren",
      "year": "1986",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB59",
      "doi-asserted-by": "crossref",
      "first-page": "114",
      "DOI": "10.1016/0040-6090(93)90734-7",
      "volume": "223",
      "author": "Laidani",
      "year": "1993",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB60",
      "doi-asserted-by": "crossref",
      "first-page": "541",
      "DOI": "10.1016/S0257-8972(07)80079-X",
      "volume": "54/55",
      "author": "Sung",
      "year": "1992",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "issue": "6",
      "key": "10.1016/S0257-8972(97)00159-X_BIB61",
      "doi-asserted-by": "crossref",
      "first-page": "3254",
      "DOI": "10.1116/1.585298",
      "volume": "9",
      "author": "Boily",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB62",
      "doi-asserted-by": "crossref",
      "first-page": "43",
      "DOI": "10.1016/S0257-8972(05)80025-8",
      "volume": "76",
      "author": "Rivi\u00e8re",
      "year": "1994",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB63",
      "doi-asserted-by": "crossref",
      "first-page": "458",
      "DOI": "10.1016/0257-8972(94)90049-3",
      "volume": "66",
      "author": "Guzman",
      "year": "1994",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "issue": "6",
      "key": "10.1016/S0257-8972(97)00159-X_BIB64",
      "doi-asserted-by": "crossref",
      "first-page": "1575",
      "DOI": "10.1116/1.585118",
      "volume": "8",
      "author": "Wells",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB65",
      "doi-asserted-by": "crossref",
      "first-page": "1565",
      "DOI": "10.1116/1.585116",
      "volume": "8",
      "author": "Haghire-Goset",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB66",
      "doi-asserted-by": "crossref",
      "first-page": "3262",
      "DOI": "10.1116/1.585300",
      "volume": "9",
      "author": "Itoh",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB67",
      "doi-asserted-by": "crossref",
      "first-page": "3258",
      "DOI": "10.1116/1.585299",
      "volume": "9",
      "author": "Shimkunas",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB68",
      "unstructured": "S. Ulrich, Herstellung superharter Materialien durch Magnetronzerst\u00e4uben und Ionenplattieren, Dissertation, University of Kaiserslautern, Germany, 1996, p. 84."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB69",
      "first-page": "653",
      "volume": "28",
      "author": "Movchan",
      "year": "1969",
      "journal-title": "Fiz. Met. Metalloved."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB70",
      "doi-asserted-by": "crossref",
      "first-page": "830",
      "DOI": "10.1116/1.568682",
      "volume": "12",
      "author": "Thornton",
      "year": "1975",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB71",
      "doi-asserted-by": "crossref",
      "first-page": "500",
      "DOI": "10.1116/1.572604",
      "volume": "2",
      "author": "Messier",
      "year": "1984",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB72",
      "doi-asserted-by": "crossref",
      "first-page": "475",
      "DOI": "10.1016/S0257-8972(89)80009-X",
      "volume": "39/40",
      "author": "Moll",
      "year": "1989",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB73",
      "doi-asserted-by": "crossref",
      "first-page": "5109",
      "DOI": "10.1063/1.343188",
      "volume": "65",
      "author": "Moore",
      "year": "1989",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB74",
      "doi-asserted-by": "crossref",
      "first-page": "195",
      "DOI": "10.1051/jp4:1993325",
      "volume": "3",
      "author": "Derre",
      "year": "1993",
      "journal-title": "J. Phys. IV"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB75",
      "doi-asserted-by": "crossref",
      "first-page": "2242",
      "DOI": "10.1149/1.2086919",
      "volume": "137",
      "author": "Yamada",
      "year": "1990",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB76",
      "doi-asserted-by": "crossref",
      "first-page": "311",
      "DOI": "10.1016/0040-6090(84)90361-4",
      "volume": "117",
      "author": "Montasser",
      "year": "1984",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB77",
      "doi-asserted-by": "crossref",
      "first-page": "83",
      "DOI": "10.1002/zaac.19926100114",
      "volume": "610",
      "author": "Bill",
      "year": "1992",
      "journal-title": "Z. Anorg. Allg. Chem."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB78",
      "doi-asserted-by": "crossref",
      "first-page": "1385",
      "DOI": "10.1016/0025-5408(81)90057-X",
      "volume": "16",
      "author": "Badzian",
      "year": "1981",
      "journal-title": "Mater. Res. Bull."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB79",
      "doi-asserted-by": "crossref",
      "first-page": "1760",
      "DOI": "10.1103/PhysRevB.39.1760",
      "volume": "39",
      "author": "Liu",
      "year": "1989",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB80",
      "doi-asserted-by": "crossref",
      "first-page": "9289",
      "DOI": "10.1103/PhysRevB.47.9289",
      "volume": "47",
      "author": "Lambrecht",
      "year": "1993",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB81",
      "doi-asserted-by": "crossref",
      "first-page": "2498",
      "DOI": "10.1111/j.1151-2916.1990.tb07618.x",
      "volume": "73",
      "author": "Besmann",
      "year": "1990",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB82",
      "doi-asserted-by": "crossref",
      "first-page": "161",
      "DOI": "10.1111/j.1151-2916.1992.tb05459.x",
      "volume": "75",
      "author": "Saugnac",
      "year": "1992",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB83",
      "unstructured": "E.H.A. Dekempeneer, V. Wagner, L.J. van Itzendoorn, J. Meneve, S. Kuypers, J. Smeets, J. Geurts, R. Candano, paper presented at Int. Conf. on Metallurgical Coatings and Thin Films, 22\u201326 April 1996, San Diego, CA."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB84",
      "doi-asserted-by": "crossref",
      "unstructured": "N. Kawaguchi, T. Kawashima, J. Chem. Soc., Chem. Commun., (1993) 1133.",
      "DOI": "10.1039/c39930001133"
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB85",
      "doi-asserted-by": "crossref",
      "first-page": "695",
      "DOI": "10.1021/cm00029a020",
      "volume": "5",
      "author": "Sasaki",
      "year": "1993",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB86",
      "doi-asserted-by": "crossref",
      "first-page": "258",
      "DOI": "10.1006/jssc.1995.1037",
      "volume": "114",
      "author": "Hub\u00e1cek",
      "year": "1995",
      "journal-title": "J. Sol. St. Chem."
    },
    {
      "key": "10.1016/S0257-8972(97)00159-X_BIB87",
      "doi-asserted-by": "crossref",
      "first-page": "13053",
      "DOI": "10.1103/PhysRevB.39.13053",
      "volume": "39",
      "author": "Kaufmann",
      "year": "1989",
      "journal-title": "Phys. Rev. B"
    }
  ],
  "container-title": "Surface and Coatings Technology",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S025789729700159X?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S025789729700159X?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        29
      ]
    ],
    "date-time": "2019-04-29T10:54:03Z",
    "timestamp": 1556535243000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S025789729700159X"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1997,
        12
      ]
    ]
  },
  "references-count": 87,
  "journal-issue": {
    "issue": "1-3",
    "published-print": {
      "date-parts": [
        [
          1997,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S025789729700159X"
  ],
  "URL": "http://dx.doi.org/10.1016/S0257-8972(97)00159-X",
  "relation": {},
  "ISSN": [
    "0257-8972"
  ],
  "subject": [],
  "container-title-short": "Surface and Coatings Technology",
  "published": {
    "date-parts": [
      [
        1997,
        12
      ]
    ]
  }
}