DOI: 10.1016/s0257-8972(97)00145-x. Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

10.1016/s0257-8972(97)00145-x

Crossref journal-article

Elsevier BV

Surface and Coatings Technology (78)

Bibliography

JÃ¤ger, S., Szyszka, B., Szczyrbowski, J., & BrÃ¤uer, G. (1998). Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering. Surface and Coatings Technology, 98(1â3), 1304â1314.

Authors 4

S. Jäger (first)
B. Szyszka (additional)
J. Szczyrbowski (additional)
G. Bräuer (additional)

References 23 Referenced 149

{'key': '10.1016/S0257-8972(97)00145-X_bib1', 'first-page': '175', 'volume': '66', 'author': 'Beister', 'year': '1993', 'journal-title': 'Glastech. Ber.'} / Glastech. Ber. by Beister (1993)
10.1016/02578-9729(50)26002- / Surf. Coat. Technol. by Beister (1995)
10.1088/0022-3727/21/10/005 / J. Phys. D. Appl. Phys. by Ingram (1988)
10.1063/1.1141113 / Rev. Sci. Instrum. by Ingram (1990)
10.1016/0165-1633(91)90007-8 / Solar Engng. Mater. by Harding (1991)
10.1016/0040-6090(94)90470-7 / Thin Solid Films by Ellmer (1994)
10.1088/0022-3727/7/2/321 / J. Phys. D. Appl. Phys. by Prokopenko (1974)
10.1063/1.335797 / J. Appl. Phys. by Köhler (1985)
10.1016/0040-6090(85)90391-8 / Thin Solid Films by Miyata (1985)
10.1016/0040-6090(80)90160-1 / Thin Solid Films by Shanthi (1980)
10.1063/1.327610 / J. Appl. Phys. by Shanthi (1980)
10.1063/1.330619 / J. Appl. Phys. by Shanthi (1982)
10.1080/01418639609365824 / Phil. Mag. by Kojima (1996)
10.1016/0040-6090(82)90382-0 / Thin Solid Films by Grosse (1982)
10.1016/0040-6090(94)90246-1 / Thin Solid Films by Meng (1994)
10.1016/0040-6090(91)90472-A / Thin Solid Films by Ghosh (1991)
10.1016/0022-0248(92)90778-H / J. Cryst. Growth by Minami (1992)
{'key': '10.1016/S0257-8972(97)00145-X_bib18', 'first-page': '1873', 'volume': 'D29', 'author': 'Bose', 'year': '1996', 'journal-title': 'J. Phys.'} / J. Phys. by Bose (1996)
10.1143/JJAP.24.L781 / Jap. J. Appl. Phys. by Minami (1985)
10.1557/JMR.1996.0208 / J. Mater. Res. by Wang (1996)
{'key': '10.1016/S0257-8972(97)00145-X_bib21', 'first-page': '219', 'volume': '363', 'author': 'Nishino', 'year': '1995'} by Nishino (1995)
10.1063/1.333196 / J. Appl. Phys. by Nanto (1984)
10.1063/1.354091 / J. Appl. Phys. by Takada (1993)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 9:30 a.m.)
Deposited	6 years, 3 months ago (April 29, 2019, 6:54 a.m.)
Indexed	2 months, 1 week ago (June 16, 2025, 6:44 p.m.)
Issued	27 years, 7 months ago (Jan. 1, 1998)
Published	27 years, 7 months ago (Jan. 1, 1998)
Published Print	27 years, 7 months ago (Jan. 1, 1998)

Funders 0

None

BibTeX

@article{J_ger_1998, title={Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering}, volume={98}, ISSN={0257-8972}, url={http://dx.doi.org/10.1016/s0257-8972(97)00145-x}, DOI={10.1016/s0257-8972(97)00145-x}, number={1–3}, journal={Surface and Coatings Technology}, publisher={Elsevier BV}, author={Jäger, S. and Szyszka, B. and Szczyrbowski, J. and Bräuer, G.}, year={1998}, month=jan, pages={1304–1314} }

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