DOI: 10.1016/s0169-4332(01)01043-1. Induced stresses and structural changes in silicon wafers as a result of laser micro-machining

Induced stresses and structural changes in silicon wafers as a result of laser micro-machining

10.1016/s0169-4332(01)01043-1

Crossref journal-article

Elsevier BV

Applied Surface Science (78)

Bibliography

Amer, M. S., Dosser, L., LeClair, S., & Maguire, J. F. (2002). Induced stresses and structural changes in silicon wafers as a result of laser micro-machining. Applied Surface Science, 187(3â4), 291â296.

Authors 4

Maher S Amer (first)
Larry Dosser (additional)
Steven LeClair (additional)
John F Maguire (additional)

References 22 Referenced 49

10.1007/s003390051461 / Appl. Phys. A by Ahn (1999)
J.F. Ready, Industrial Applications of Lasers, Academic Press, London, 1997, p. 394. (10.1016/B978-012583961-7/50021-1)
Laser Micro-fabrication Session, ICALEO 2000, October 2–5, 2000.
10.1007/BF01571681 / Appl. Phys. A by Simon (1996)
10.1016/S0924-4247(99)00029-1 / Sen. Actuat. by Dauer (1999)
10.1088/0960-1317/11/1/307 / J. Micromech. Microeng. by Li (2001)
10.1016/S0169-4332(97)00762-9 / Appl. Surf. Sci. by Jandeleit (1998)
10.1016/0169-4332(95)00432-7 / Appl. Surf. Sci. by Bergmann (1996)
10.1088/0953-8984/10/27/011 / J. Phys. Condens. Matter by Xu (1998)
10.1007/s003400050422 / Appl. Phys. B by Marowsky (1998)
10.1016/0026-2714(96)00190-4 / Microelectron. Reliab. by Dewolf (1996)
10.1063/1.126300 / Appl. Phys. Lett. by Domnich (2000)
10.1103/PhysRevB.55.2938 / Phys. Rev. B by Marinov (1997)
10.1088/0268-1242/14/10/310 / Semicond. Sci. Technol. by Gogotsi (1999)
10.1016/S0169-4332(97)80184-5 / Appl. Surf. Sci. by Kimura (1997)
10.1063/1.354365 / J. Appl. Phys. by Dewolf (1993)
10.1103/PhysRevB.5.580 / Phys. Rev. B by Cerdeira (1972)
10.1016/0022-3697(71)90005-9 / J. Phys. Chem. Solids by Anastassakis (1971)
Q. Ma, S. Chiras, D.R. Clarke, Suo, J. Appl. Phys. 78 (3) (1995) 1614–1622. (10.1063/1.360255)
S.T. Amimoto, D.J. Chang, A.D. Birkitt, SPIE, Vol. 3512, Santa Clara, CA, 1998, pp. 123–129.
10.1103/PhysRevB.41.7529 / Phys. Rev. B by Anastassakis (1990)
10.1088/0268-1242/16/5/311 / Semicond. Sci. Technol. by Gogotsi (2001)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 14, 2002, 5:01 a.m.)
Deposited	5 years, 7 months ago (Jan. 8, 2020, 8:24 p.m.)
Indexed	4 months, 3 weeks ago (April 10, 2025, 8:12 a.m.)
Issued	23 years, 7 months ago (Feb. 1, 2002)
Published	23 years, 7 months ago (Feb. 1, 2002)
Published Print	23 years, 7 months ago (Feb. 1, 2002)

Funders 0

None

BibTeX

@article{Amer_2002, title={Induced stresses and structural changes in silicon wafers as a result of laser micro-machining}, volume={187}, ISSN={0169-4332}, url={http://dx.doi.org/10.1016/s0169-4332(01)01043-1}, DOI={10.1016/s0169-4332(01)01043-1}, number={3–4}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={Amer, Maher S and Dosser, Larry and LeClair, Steven and Maguire, John F}, year={2002}, month=feb, pages={291–296} }

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