DOI: 10.1016/s0169-4332(01)00520-7. Focused ion beam sputtering investigations on SiC

Focused ion beam sputtering investigations on SiC

10.1016/s0169-4332(01)00520-7

Crossref journal-article

Elsevier BV

Applied Surface Science (78)

Bibliography

Bischoff, L., Teichert, J., & Heera, V. (2001). Focused ion beam sputtering investigations on SiC. Applied Surface Science, 184(1â4), 372â376.

Authors 3

L. Bischoff (first)
J. Teichert (additional)
V. Heera (additional)

References 19 Referenced 24

10.1016/S0168-583X(96)01147-0 / Nucl. Instrum. Meth. Phys. Res. B by Rao (1997)
10.1016/0022-3115(76)90330-5 / J. Nucl. Mater. by Roth (1976)
W. Eckstein, C. Garcia-Rosales, J. Roth, W. Ottenberger, Max-Planck-Institut für Plasmaphysik Garching, Report IPP 9/82, 1993.
10.1063/1.1319168 / J. Appl. Phys. by Menzel (2000)
10.1016/0168-583X(96)00273-X / Nucl. Instrum. Meth. Phys. Res. B by Schneider (1996)
10.1116/1.587463 / J. Vac. Sci. Technol. B by Bischoff (1994)
10.1016/0022-3115(78)90015-6 / J. Nucl. Mater. by Mohri (1978)
10.1016/0022-3115(94)00376-9 / J. Nucl. Mater. by Garcia-Rosales (1994)
10.1080/00337577308232223 / Radiat. Eff. by Krimmel (1973)
10.1557/PROC-438-241 / Mater. Res. Soc. Symp. Proc. by Heera (1997)
{'key': '10.1016/S0169-4332(01)00520-7_BIB11', 'first-page': '55', 'volume': '19', 'author': 'Malherbe', 'year': '1994', 'journal-title': 'Sol. Stat. Mater. Sci.'} / Sol. Stat. Mater. Sci. by Malherbe (1994)
N. Matsumami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, IPPJ-AM-14, Institute of Plasma Physics, Nagoya University, 1980.
10.1063/1.119223 / Appl. Phys. Lett. by Heera (1997)
10.1063/1.119191 / Appl. Phys. Lett. by Nipoti (1997)
J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Ranges of Ions in Solids, Pergamon Press, New York, 1985. (10.1007/978-1-4615-8103-1_3)
10.1103/PhysRev.184.383 / Phys. Rev. by Sigmund (1969)
{'key': '10.1016/S0169-4332(01)00520-7_BIB17', 'first-page': '94', 'volume': '29', 'author': 'Petzold', 'year': '1985', 'journal-title': 'Mater. Sci. Eng. B'} / Mater. Sci. Eng. B by Petzold (1985)
10.1007/BF00241008 / J. Mater. Sci. Lett. by Bhattacharya (1994)
10.1016/S0168-583X(86)80078-7 / Nucl. Instrum. Meth. Phys. Res. B by Bohdansky (1987)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 14, 2002, 9:01 a.m.)
Deposited	2 years, 4 months ago (April 6, 2023, 3:32 a.m.)
Indexed	2 months, 1 week ago (June 18, 2025, 7:45 a.m.)
Issued	23 years, 8 months ago (Dec. 1, 2001)
Published	23 years, 8 months ago (Dec. 1, 2001)
Published Print	23 years, 8 months ago (Dec. 1, 2001)

Funders 0

None

BibTeX

@article{Bischoff_2001, title={Focused ion beam sputtering investigations on SiC}, volume={184}, ISSN={0169-4332}, url={http://dx.doi.org/10.1016/s0169-4332(01)00520-7}, DOI={10.1016/s0169-4332(01)00520-7}, number={1–4}, journal={Applied Surface Science}, publisher={Elsevier BV}, author={Bischoff, L. and Teichert, J. and Heera, V.}, year={2001}, month=dec, pages={372–376} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        18
      ]
    ],
    "date-time": "2025-06-18T11:45:38Z",
    "timestamp": 1750247138756
  },
  "reference-count": 19,
  "publisher": "Elsevier BV",
  "issue": "1-4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2001,
            12,
            1
          ]
        ],
        "date-time": "2001-12-01T00:00:00Z",
        "timestamp": 1007164800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2001,
        12
      ]
    ]
  },
  "DOI": "10.1016/s0169-4332(01)00520-7",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        10,
        14
      ]
    ],
    "date-time": "2002-10-14T13:01:41Z",
    "timestamp": 1034600501000
  },
  "page": "372-376",
  "source": "Crossref",
  "is-referenced-by-count": 24,
  "title": "Focused ion beam sputtering investigations on SiC",
  "prefix": "10.1016",
  "volume": "184",
  "author": [
    {
      "given": "L.",
      "family": "Bischoff",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "J.",
      "family": "Teichert",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "V.",
      "family": "Heera",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "655",
      "DOI": "10.1016/S0168-583X(96)01147-0",
      "volume": "127/128",
      "author": "Rao",
      "year": "1997",
      "journal-title": "Nucl. Instrum. Meth. Phys. Res. B"
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "222",
      "DOI": "10.1016/0022-3115(76)90330-5",
      "volume": "63",
      "author": "Roth",
      "year": "1976",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB3",
      "unstructured": "W. Eckstein, C. Garcia-Rosales, J. Roth, W. Ottenberger, Max-Planck-Institut f\u00fcr Plasmaphysik Garching, Report IPP 9/82, 1993."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "5658",
      "DOI": "10.1063/1.1319168",
      "volume": "88",
      "author": "Menzel",
      "year": "2000",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "77",
      "DOI": "10.1016/0168-583X(96)00273-X",
      "volume": "117",
      "author": "Schneider",
      "year": "1996",
      "journal-title": "Nucl. Instrum. Meth. Phys. Res. B"
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "3523",
      "DOI": "10.1116/1.587463",
      "volume": "12",
      "author": "Bischoff",
      "year": "1994",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "309",
      "DOI": "10.1016/0022-3115(78)90015-6",
      "volume": "75",
      "author": "Mohri",
      "year": "1978",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "8",
      "DOI": "10.1016/0022-3115(94)00376-9",
      "volume": "218",
      "author": "Garcia-Rosales",
      "year": "1994",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "83",
      "DOI": "10.1080/00337577308232223",
      "volume": "19",
      "author": "Krimmel",
      "year": "1973",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "241",
      "DOI": "10.1557/PROC-438-241",
      "volume": "438",
      "author": "Heera",
      "year": "1997",
      "journal-title": "Mater. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB11",
      "first-page": "55",
      "volume": "19",
      "author": "Malherbe",
      "year": "1994",
      "journal-title": "Sol. Stat. Mater. Sci."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB12",
      "unstructured": "N. Matsumami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu, IPPJ-AM-14, Institute of Plasma Physics, Nagoya University, 1980."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "3531",
      "DOI": "10.1063/1.119223",
      "volume": "70",
      "author": "Heera",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "3425",
      "DOI": "10.1063/1.119191",
      "volume": "70",
      "author": "Nipoti",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB15",
      "doi-asserted-by": "crossref",
      "unstructured": "J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Ranges of Ions in Solids, Pergamon Press, New York, 1985.",
      "DOI": "10.1007/978-1-4615-8103-1_3"
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "383",
      "DOI": "10.1103/PhysRev.184.383",
      "volume": "184",
      "author": "Sigmund",
      "year": "1969",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB17",
      "first-page": "94",
      "volume": "29",
      "author": "Petzold",
      "year": "1985",
      "journal-title": "Mater. Sci. Eng. B"
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "1192",
      "DOI": "10.1007/BF00241008",
      "volume": "13",
      "author": "Bhattacharya",
      "year": "1994",
      "journal-title": "J. Mater. Sci. Lett."
    },
    {
      "key": "10.1016/S0169-4332(01)00520-7_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "509",
      "DOI": "10.1016/S0168-583X(86)80078-7",
      "volume": "18",
      "author": "Bohdansky",
      "year": "1987",
      "journal-title": "Nucl. Instrum. Meth. Phys. Res. B"
    }
  ],
  "container-title": "Applied Surface Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0169433201005207?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0169433201005207?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        4,
        6
      ]
    ],
    "date-time": "2023-04-06T07:32:32Z",
    "timestamp": 1680766352000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0169433201005207"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2001,
        12
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "1-4",
    "published-print": {
      "date-parts": [
        [
          2001,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S0169433201005207"
  ],
  "URL": "http://dx.doi.org/10.1016/S0169-4332(01)00520-7",
  "relation": {},
  "ISSN": [
    "0169-4332"
  ],
  "subject": [],
  "container-title-short": "Applied Surface Science",
  "published": {
    "date-parts": [
      [
        2001,
        12
      ]
    ]
  }
}