DOI: 10.1016/s0167-9317(97)00093-2. Focused ion beam sample preparation, transmission electron microscopy and electron energy loss spectroscopy analysis of advanced CMOS silicon technology interconnections

Focused ion beam sample preparation, transmission electron microscopy and electron energy loss spectroscopy analysis of advanced CMOS silicon technology interconnections

10.1016/s0167-9317(97)00093-2

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Pantel, R., Auvert, G., & Mascarin, G. (1997). Focused ion beam sample preparation, transmission electron microscopy and electron energy loss spectroscopy analysis of advanced CMOS silicon technology interconnections. Microelectronic Engineering, 37â38, 49â57.

Authors 3

Roland Pantel (first)
Geoffroy Auvert (additional)
Guy Mascarin (additional)

References 7 Referenced 15

{'key': '10.1016/S0167-9317(97)00093-2_BIB1', 'series-title': "ISTFA'91: The 17th International Symposium for Testing and Failure Analysis", 'first-page': '417', 'author': 'Morris', 'year': '1991'} / ISTFA'91: The 17th International Symposium for Testing and Failure Analysis by Morris (1991)
{'key': '10.1016/S0167-9317(97)00093-2_BIB2', 'first-page': '23', 'volume': 'Vol. 254', 'author': 'Basile', 'year': '1991'} by Basile (1991)
10.1063/1.109032 / Appl. Phys. Lett. by Hull (1993)
{'key': '10.1016/S0167-9317(97)00093-2_BIB4', 'series-title': "ICEM'13: the 13th International Congres on Electron Microscopy", 'first-page': '1007', 'author': 'Pantel', 'year': '1994'} / ICEM'13: the 13th International Congres on Electron Microscopy by Pantel (1994)
{'year': '1986', 'series-title': 'Electron Energy Loss Spectroscopy in the Electron Microscope', 'author': 'Egerton', 'key': '10.1016/S0167-9317(97)00093-2_BIB5'} / Electron Energy Loss Spectroscopy in the Electron Microscope by Egerton (1986)
10.1051/mmm:0199200302-3018700 / Microsc. Microanal. Microstruct. / Design and first applications of a post-column imaging filter by Krivanek (1992)
{'year': '1995', 'series-title': 'Energy-Filtering Transmission Electron Microscope', 'author': 'Reimer', 'key': '10.1016/S0167-9317(97)00093-2_BIB7'} / Energy-Filtering Transmission Electron Microscope by Reimer (1995)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 2:48 p.m.)
Deposited	6 years, 4 months ago (April 18, 2019, 12:27 p.m.)
Indexed	11 months, 2 weeks ago (Sept. 16, 2024, 5:05 p.m.)
Issued	27 years, 10 months ago (Nov. 1, 1997)
Published	27 years, 10 months ago (Nov. 1, 1997)
Published Print	27 years, 10 months ago (Nov. 1, 1997)

Funders 0

None

BibTeX

@article{Pantel_1997, title={Focused ion beam sample preparation, transmission electron microscopy and electron energy loss spectroscopy analysis of advanced CMOS silicon technology interconnections}, volume={37–38}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/s0167-9317(97)00093-2}, DOI={10.1016/s0167-9317(97)00093-2}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Pantel, Roland and Auvert, Geoffroy and Mascarin, Guy}, year={1997}, month=nov, pages={49–57} }

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