DOI: 10.1016/s0167-9317(97)00074-9. Quantitative model of the thickness dependence of breakdown in ultra-thin oxides

Quantitative model of the thickness dependence of breakdown in ultra-thin oxides

10.1016/s0167-9317(97)00074-9

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Stathis, J. H. (1997). Quantitative model of the thickness dependence of breakdown in ultra-thin oxides. Microelectronic Engineering, 36(1â4), 325â328.

Authors 1

J.H. Stathis (first)

References 9 Referenced 39

10.1016/0040-6090(90)90098-X / Thin Solid Films by Suñé (1990)
10.1063/1.357438 / J. Appl. Phys. by Scheugraf (1994)
D.J. DiMaria, this conference; D.J. DiMaria and J.H. Stathis, to be published.
{'key': '10.1016/S0167-9317(97)00074-9_BIB4', 'series-title': 'IEDM Tech. Dig.', 'first-page': '863', 'author': 'Degraeve', 'year': '1995'} / IEDM Tech. Dig. by Degraeve (1995)
{'key': '10.1016/S0167-9317(97)00074-9_BIB5', 'series-title': 'Introduction to Percolation Theory', 'author': 'Stauffer', 'year': '1992'} / Introduction to Percolation Theory by Stauffer (1992)
{'key': '10.1016/S0167-9317(97)00074-9_BIB6', 'series-title': 'Instabilities in Silicon Devices', 'first-page': '315', 'author': 'Wolters', 'year': '1986'} / Instabilities in Silicon Devices by Wolters (1986)
{'key': '10.1016/S0167-9317(97)00074-9_BIB7', 'author': 'Vincent', 'year': '1996'} by Vincent (1996)
10.1063/1.352936 / J. Appl. Phys. by DiMaria (1993)
10.1016/0167-9317(93)90158-2 / Microelectron. Eng. by Cartier (1993)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 4:57 a.m.)
Deposited	6 years, 3 months ago (April 29, 2019, 6:51 p.m.)
Indexed	11 months, 2 weeks ago (Sept. 6, 2024, 10:21 a.m.)
Issued	28 years, 2 months ago (June 1, 1997)
Published	28 years, 2 months ago (June 1, 1997)
Published Print	28 years, 2 months ago (June 1, 1997)

Funders 0

None

BibTeX

@article{Stathis_1997, title={Quantitative model of the thickness dependence of breakdown in ultra-thin oxides}, volume={36}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/s0167-9317(97)00074-9}, DOI={10.1016/s0167-9317(97)00074-9}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Stathis, J.H.}, year={1997}, month=jun, pages={325–328} }

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