DOI: 10.1016/s0167-9317(97)00073-7. Qbd− dependencies of ultrathin gate oxides on large area capacitors

Qbd− dependencies of ultrathin gate oxides on large area capacitors

10.1016/s0167-9317(97)00073-7

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Paulzen, G. M. (1997). Qbdâ dependencies of ultrathin gate oxides on large area capacitors. Microelectronic Engineering, 36(1â4), 321â324.

Authors 1

G.M. Paulzen (first)

References 7 Referenced 20

{'key': '10.1016/S0167-9317(97)00073-7_BIB1', 'series-title': 'Statistics of extremes', 'author': 'Gumbel', 'year': '1958'} / Statistics of extremes by Gumbel (1958)
10.1149/1.2044163 / J. Electrochemical Soc. by Dumin (1995)
{'key': '10.1016/S0167-9317(97)00073-7_BIB3', 'series-title': 'IEDM', 'first-page': '863', 'author': 'Degraeve', 'year': '1995'} / IEDM by Degraeve (1995)
10.1116/1.574565 / J. Vac. Sci. Techn. A by Wolters (1987)
10.1109/16.285029 / IEEE Trans. El. Dev. by Schuegraf (1994)
{'key': '10.1016/S0167-9317(97)00073-7_BIB6', 'series-title': 'IEDM', 'first-page': '617', 'author': 'Han', 'year': '1994'} / IEDM by Han (1994)
10.1109/16.477595 / IEEE Trans. El. Dev. by Rosenbaum (1996)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 6:48 p.m.)
Deposited	6 years, 4 months ago (April 18, 2019, 4:26 p.m.)
Indexed	4 months, 3 weeks ago (April 2, 2025, 9:02 a.m.)
Issued	28 years, 2 months ago (June 1, 1997)
Published	28 years, 2 months ago (June 1, 1997)
Published Print	28 years, 2 months ago (June 1, 1997)

Funders 0

None

BibTeX

@article{Paulzen_1997, title={Qbd− dependencies of ultrathin gate oxides on large area capacitors}, volume={36}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/s0167-9317(97)00073-7}, DOI={10.1016/s0167-9317(97)00073-7}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Paulzen, G.M.}, year={1997}, month=jun, pages={321–324} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        4,
        2
      ]
    ],
    "date-time": "2025-04-02T13:02:56Z",
    "timestamp": 1743598976529
  },
  "reference-count": 7,
  "publisher": "Elsevier BV",
  "issue": "1-4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1997,
            6,
            1
          ]
        ],
        "date-time": "1997-06-01T00:00:00Z",
        "timestamp": 865123200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1997,
        6
      ]
    ]
  },
  "DOI": "10.1016/s0167-9317(97)00073-7",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T22:48:53Z",
    "timestamp": 1027637333000
  },
  "page": "321-324",
  "source": "Crossref",
  "is-referenced-by-count": 20,
  "title": "Qbd\u2212 dependencies of ultrathin gate oxides on large area capacitors",
  "prefix": "10.1016",
  "volume": "36",
  "author": [
    {
      "given": "G.M.",
      "family": "Paulzen",
      "sequence": "first",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0167-9317(97)00073-7_BIB1",
      "series-title": "Statistics of extremes",
      "author": "Gumbel",
      "year": "1958"
    },
    {
      "key": "10.1016/S0167-9317(97)00073-7_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "1272",
      "DOI": "10.1149/1.2044163",
      "volume": "vol 142",
      "author": "Dumin",
      "year": "1995",
      "journal-title": "J. Electrochemical Soc."
    },
    {
      "key": "10.1016/S0167-9317(97)00073-7_BIB3",
      "series-title": "IEDM",
      "first-page": "863",
      "author": "Degraeve",
      "year": "1995"
    },
    {
      "issue": "4",
      "key": "10.1016/S0167-9317(97)00073-7_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "1563",
      "DOI": "10.1116/1.574565",
      "volume": "5",
      "author": "Wolters",
      "year": "1987",
      "journal-title": "J. Vac. Sci. Techn. A"
    },
    {
      "key": "10.1016/S0167-9317(97)00073-7_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "761",
      "DOI": "10.1109/16.285029",
      "volume": "vol. 41",
      "author": "Schuegraf",
      "year": "1994",
      "journal-title": "IEEE Trans. El. Dev."
    },
    {
      "key": "10.1016/S0167-9317(97)00073-7_BIB6",
      "series-title": "IEDM",
      "first-page": "617",
      "author": "Han",
      "year": "1994"
    },
    {
      "key": "10.1016/S0167-9317(97)00073-7_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "70",
      "DOI": "10.1109/16.477595",
      "volume": "vol. 43",
      "author": "Rosenbaum",
      "year": "1996",
      "journal-title": "IEEE Trans. El. Dev."
    }
  ],
  "container-title": "Microelectronic Engineering",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0167931797000737?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0167931797000737?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        18
      ]
    ],
    "date-time": "2019-04-18T20:26:12Z",
    "timestamp": 1555619172000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0167931797000737"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1997,
        6
      ]
    ]
  },
  "references-count": 7,
  "journal-issue": {
    "issue": "1-4",
    "published-print": {
      "date-parts": [
        [
          1997,
          6
        ]
      ]
    }
  },
  "alternative-id": [
    "S0167931797000737"
  ],
  "URL": "http://dx.doi.org/10.1016/S0167-9317(97)00073-7",
  "relation": {},
  "ISSN": [
    "0167-9317"
  ],
  "subject": [],
  "container-title-short": "Microelectronic Engineering",
  "published": {
    "date-parts": [
      [
        1997,
        6
      ]
    ]
  }
}