DOI: 10.1016/s0167-9317(97)00050-6. Nitridation impact on thin oxide charge trapping

Nitridation impact on thin oxide charge trapping

10.1016/s0167-9317(97)00050-6

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Alessandri, M., Clementi, C., Crivelli, B., Ghidini, G., Pellizzer, F., Martin, F., Imai, M., & Ikegawa, H. (1997). Nitridation impact on thin oxide charge trapping. Microelectronic Engineering, 36(1â4), 211â214.

Authors 8

M. Alessandri (first)
C. Clementi (additional)
B. Crivelli (additional)
G. Ghidini (additional)
F. Pellizzer (additional)
F. Martin (additional)
M. Imai (additional)
H. Ikegawa (additional)

References 6 Referenced 9

{'key': '10.1016/S0167-9317(97)00050-6_BIB1', 'series-title': '7th ESPRIT Workshop on Diel. in Microel', 'author': 'Ghidini', 'year': '1995'} / 7th ESPRIT Workshop on Diel. in Microel by Ghidini (1995)
{'key': '10.1016/S0167-9317(97)00050-6_BIB2', 'first-page': '645', 'article-title': 'The Physics and Chemistry of SiO2 and the SiSiO2 Interfaces', 'author': 'Ghidini', 'year': '1996'} / The Physics and Chemistry of SiO2 and the SiSiO2 Interfaces by Ghidini (1996)
10.1063/1.323212 / J. Appl. Phys. by Dimaria (1976)
10.1016/0038-1101(94)90017-5 / Solid State Elec. by Papadas (1994)
10.1063/1.324253 / J. Appl. Phys. by Solomon (1977)
10.1016/0038-1101(70)90073-0 / Solid State Electronics by Kuhn (1970)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 6:48 p.m.)
Deposited	6 years, 4 months ago (April 18, 2019, 4:26 p.m.)
Indexed	1 year ago (Aug. 7, 2024, 1:13 p.m.)
Issued	28 years, 2 months ago (June 1, 1997)
Published	28 years, 2 months ago (June 1, 1997)
Published Print	28 years, 2 months ago (June 1, 1997)

Funders 0

None

BibTeX

@article{Alessandri_1997, title={Nitridation impact on thin oxide charge trapping}, volume={36}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/s0167-9317(97)00050-6}, DOI={10.1016/s0167-9317(97)00050-6}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Alessandri, M. and Clementi, C. and Crivelli, B. and Ghidini, G. and Pellizzer, F. and Martin, F. and Imai, M. and Ikegawa, H.}, year={1997}, month=jun, pages={211–214} }

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