DOI: 10.1016/s0167-9317(96)00198-0. Micromilling development and applications for microfabrication

Micromilling development and applications for microfabrication

10.1016/s0167-9317(96)00198-0

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Friedrich, C. R., Coane, P. J., & Vasile, M. J. (1997). Micromilling development and applications for microfabrication. Microelectronic Engineering, 35(1â4), 367â372.

Authors 3

C.R. Friedrich (first)
P.J. Coane (additional)
M.J. Vasile (additional)

References 5 Referenced 50

10.1109/84.485213 / J. of Microelectromechanical Systems / Development of the Micromilling Process for High Aspect Ratio Microstructures by Friedrich (1996)
10.1063/1.1144104 / Review of Scientific Instruments / High-resolution Focused Ion Beams by Orloff (1993)
10.1116/1.587769 / J. Vac. Sci. Technol. / Microfabrication by Ion Milling: The Lathe Technique by Vasile (1994)
10.1016/S0141-6359(96)00024-4 / J. of Precision Engineering / Micron-Scale Machining: Tool Fabrication and Initial Results by Vasile (1996)
10.1016/S0007-8506(07)61936-2 / Annals of the CIRP / Energy Dissipation in the Ultraprecision Machining of Copper by Lucca (1991)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 8:57 a.m.)
Deposited	6 years, 3 months ago (April 29, 2019, 10:51 p.m.)
Indexed	1 year ago (Aug. 22, 2024, 1:50 a.m.)
Issued	28 years, 6 months ago (Feb. 1, 1997)
Published	28 years, 6 months ago (Feb. 1, 1997)
Published Print	28 years, 6 months ago (Feb. 1, 1997)

Funders 0

None

BibTeX

@article{Friedrich_1997, title={Micromilling development and applications for microfabrication}, volume={35}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/s0167-9317(96)00198-0}, DOI={10.1016/s0167-9317(96)00198-0}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Friedrich, C.R. and Coane, P.J. and Vasile, M.J.}, year={1997}, month=feb, pages={367–372} }

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