DOI: 10.1016/s0167-5729(02)00113-9. Reaction–diffusion in high-k dielectrics on Si

Reaction–diffusion in high-k dielectrics on Si

10.1016/s0167-5729(02)00113-9

Crossref journal-article

Elsevier BV

Surface Science Reports (78)

Bibliography

de Almeida, R. M. C., & Baumvol, I. J. R. (2003). Reactionâdiffusion in high-k dielectrics on Si. Surface Science Reports, 49(1â3), 1â114.

Authors 2

R.M.C. de Almeida (first)
I.J.R. Baumvol (additional)

References 153 Referenced 128

G.E. Moore, IEEE IEDM Tech. Dig. 11 (1975). (10.1038/256011a0)
10.1109/5.915374 / Proc. IEEE by Frank (2001)
L.C. Feldman, in: E.Y.J. Chabal (Ed.), Fundamental Aspects of Silicon Oxidation, Springer, Berlin, 2001, p. 1. (10.1007/978-3-642-56711-7_1)
10.1063/1.1385803 / J. Appl. Phys. / Applied physics review by Green (2001)
E.P. Gusev, in: G. Pachionni (Ed.), Defects in SiO2 and Related Dielectrics: Science and Technology, Kluwer Academic Publishers, Dordrecht, 2000, p. 1.
L.C. Feldman, E.P. Gusev, E. Garfunkel, in: E. Garfunkel, E.P. Gusev, A. Vul’ (Eds.), Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices, Kluwer Academic Publishers, Dordrecht, 1998, p. 1. (10.1007/978-94-011-5008-8_1)
10.1557/PROC-567-227 / Mater. Res. Soc. Symp. Proc. by Massoud (1999)
G. Timp, K.K. Bourdelle, J.E. Bower, F.H. Baumann, T. Boone, R. Cirelli, K. Evans-Lutterodt, J. Garno, A. Ghetti, H. Gossman, M.L. Green, D. Jacobson, Y. Kim, R. Kleiman, F. Klemens, A. Kornblit, C. Lochstampfor, W. Mansfield, S. Moccio, D.A. Muller, L.E. Ocolla, M.L. O’Malley, J. Rosamilia, J. Sapjeta, P. Silverman, T. Sorsch, D.M. Tennant, W. Timp, B.E. Weir, IEEE IEDM Tech. Dig. 615 (1998) (10.1109/IEDM.1998.746433)
10.1109/16.506774 / IEEE Trans. Electron Dev. by Momose (1996)
G. Timp, J. Bude, K.K. Bourdelle, J. Garno, A. Ghetti, H. Gossman, M. Green, G. Forsyth, Y. Kim, R. Kleiman, IEEE IEDM Tech. Dig. 55 (1999). (10.1109/IEDM.1999.823845)
10.1038/21602 / Nature by Muller (1999)
International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA, 2001. http://www.public.itrs.net/.
10.1109/55.704403 / IEEE Electron Dev. Lett. by Cao (1998)
10.1109/55.285386 / IEEE Electron Dev. Lett. by Ma (1994)
10.1147/rd.433.0265 / IBM J. Res. Dev. by Gusev (1999)
C. Krug, I.J.R. Baumvol, F.C. Stedile, M.L. Green, F. Klemens, P.J. Silverman, T.W. Sorsch, F. Alvarez, P. Hammer, N.M. Victoria, in: H.Z. Massoud, E.H. Poindexter, I.J.R. Baumvol (Eds.), The Physics and Chemistry of SiO2 and the Si–SiO2 Interface-4, The Electrochemical Society, Pennington, 2000, p. 187.
{'key': '10.1016/S0167-5729(02)00113-9_BIB16', 'first-page': '342', 'volume': '432', 'author': 'Krug', 'year': '2001', 'journal-title': 'IEEE Trans. Ion Implant. Technol.'} / IEEE Trans. Ion Implant. Technol. by Krug (2001)
10.1063/1.123374 / Appl. Phys. Lett. by Baumvol (1999)
T. Hori, Dielectrics and MOS ULSIs, Springer, New York, 1997. (10.1007/978-3-642-60856-8)
S. Dimitrijev, Understanding Semiconductor Devices, Oxford University Press, New York, 2000.
10.1038/35023243 / Nature by Kingon (2000)
{'key': '10.1016/S0167-5729(02)00113-9_BIB21', 'first-page': '1927', 'volume': '76', 'author': 'Lee', 'year': '2000', 'journal-title': 'Appl. Phys. Lett.'} / Appl. Phys. Lett. by Lee (2000)
10.1063/1.371888 / J. Appl. Phys. by Wilk (2000)
C. Werkhoven, C. Pomarede, E. Shero, M. Givens, S. Haukka, M. Tuominen, J.W. Maes, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 3.
10.1063/1.1361065 / J. Appl. Phys. / Applied physics review by Wilk (2001)
10.1016/S0167-9317(01)00667-0 / Microelectron. Eng. by Gusev (2001)
10.1016/S0927-796X(97)00023-5 / Mater. Sci. Eng. by Chaneliere (1998)
10.1557/JMR.1996.0350 / J. Mater. Res. by Hubbard (1996)
10.1063/1.1477266 / Appl. Phys. Lett. by Chang (2002)
10.1063/1.124036 / Appl. Phys. Lett. by Wilk (1999)
L.G. Gosset, J.-J. Ganem, O. Renault, Ph. Holliger, F. Damlecourt, G. Rolland, H.J. Von Bardeleben, F. Pierre, D. Jalabert, I. Trimaille, J.-L. Cantin, S. Rigo, A. Ermolieff, F. Martin, M.-N. Semeria, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 5.
10.1149/1.1337607 / J. Electrochem. Soc. by Choi (2001)
10.1063/1.1495882 / Appl. Phys. Lett. by Harris (2002)
10.1063/1.1310635 / Appl. Phys. Lett. by Houssa (2000)
10.1063/1.1418266 / Appl. Phys. Lett. by Ramanatham (2001)
Callegari, E. Cartier, M. Gribelyuk, H.F. Okorn-Schmidt, T. Zabel, J. Appl. Phys. 90 (2001) 6466. (10.1063/1.1417991)
H. Iwai, S. Ohmi, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 1.
10.1149/1.1388996 / Electrochem. Sol. State Lett. by Su (2001)
10.1063/1.1505120 / Appl. Phys. Lett. by Opila (2002)
10.1063/1.1506207 / Appl. Phys. Lett. by Lin (2002)
10.1063/1.1506782 / Appl. Phys. Lett. by Yamamoto (2002)
10.1016/S0167-5729(99)00006-0 / Surf. Sci. Rep. by Baumvol (1999)
10.1016/0169-4332(89)90420-0 / Appl. Surf. Sci. by Trimaille (1989)
10.1103/PhysRevB.60.1492 / Phys. Rev. B by Baumvol (1999)
10.1016/0370-1573(90)90099-N / Phys. Rep. by Bouchaud (1990)
10.1080/00018738700101072 / Adv. Phys. by Havlin (1987)
10.1016/S0370-1573(00)00070-3 / Phys. Rep. by Metzler (2000)
L.E. Reichl, A Modern Course in Statistical Physics, 2nd ed., Wiley, New York, 1998. (10.1119/1.19118)
S. Rigo, in: G. Barbottin, A. Vapaille (Eds.), Instabilities in Silicon Devices, Elsevier, Amsterdam, 1986, p. 5.
10.1103/PhysRevB.61.12992 / Phys. Rev. B by de Almeida (2000)
I. Trimaille, F.C. Stedile, J.-J. Ganem, I.J.R. Baumvol, S. Rigo, in: H.Z. Massoud, E.H. Poindexter, C.R. Helms (Eds.), The Physics and Chemistry of SiO2 and of the Si–SiO2 Interface-3, vol. 96, No. 1, The Electrochemical Society, Pennington, 1996, p. 59.
10.1016/0168-583X(94)95821-1 / Nucl. Instrum. Meth. Phys. Res. B by Stedile (1994)
10.1063/1.115035 / Appl. Phys. Lett. by Lu (1995)
10.1149/1.2114204 / J. Electrochem. Soc. by Massoud (1985)
10.1149/1.2113648 / J. Electrochem. Soc. by Massoud (1985)
10.1103/PhysRevLett.57.1185 / Phys. Rev. Lett. by Boszo (1986)
10.1016/0039-6028(91)90975-X / Surf. Sci. by Bischoff (1991)
10.1016/0039-6028(91)90095-A / Surf. Sci. by Larsson (1991)
10.1016/0039-6028(91)91089-G / Surf. Sci. by Cherif (1991)
10.1016/0168-583X(95)01478-0 / Nucl. Instrum. Meth. Phys. Res. B by Baumvol (1996)
10.1016/0039-6028(92)90529-F / Surf. Sci. by Cherif (1992)
10.1016/0039-6028(92)90899-H / Surf. Sci. by Larsson (1992)
10.1103/PhysRevB.47.15622 / Phys. Rev. B by Peden (1993)
10.1016/0039-6028(94)90750-1 / Surf. Sci. by Dufour (1994)
10.1016/0169-4332(86)90073-5 / Appl. Surf. Sci. by Maillot (1986)
10.1016/0039-6028(94)90326-3 / Surf. Sci. by Rochet (1994)
10.1016/0039-6028(94)90326-3 / Surf. Sci. by Rochet (1994)
10.1103/PhysRevB.62.R16255 / Phys. Rev. B by de Almeida (2000)
10.1016/0927-796X(94)90006-X / Mater. Sci. Eng. by Habraken (1994)
10.1109/T-ED.1985.21920 / IEEE Trans. Electron Dev. by Moslehi (1985)
10.1149/1.1836712 / J. Electrochem. Soc. by Hartig (1996)
10.1016/S0169-4332(96)00803-3 / Appl. Surf. Sci. by Fukuda (1997)
Kamath, D.L. Kwong, Y.M. Sun, P.M. Blass, S. Whaley, J.M. White, Appl. Phys. Lett. 70 (1997) 63. (10.1063/1.119307)
10.1063/1.360036 / J. Appl. Phys. by Yao (1995)
10.1063/1.111205 / Appl. Phys. Lett. by Yao (1994)
10.1116/1.583621 / J. Vac. Sci. Technol. B by Avouris (1987)
10.1063/1.365858 / J. Appl. Phys. by Gusev (1997)
10.1063/1.117687 / Appl. Phys. Lett. by Lu (1996)
10.1063/1.121520 / Appl. Phys. Lett. by Baumvol (1998)
Trimaille, J.-J. Ganem, L.G. Gosset, S. Rigo, I.J.R. Baumvol, F.C. Stedile, F. Rochet, G. Dufour, F. Jolly, in: E. Garfunkel, E. Gusev, A. Vul’ (Eds.), Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices, Kluwer Academic Publishers, Holanda, 1998, p. 165. (10.1016/S0168-583X(97)00731-3)
10.1063/1.112980 / Appl. Phys. Lett. by Green (1994)
10.1063/1.356374 / J. Appl. Phys. by Tobin (1994)
10.1149/1.1837214 / J. Electrochem. Soc. by Kim (1996)
10.1016/S0168-583X(97)00731-3 / Nucl. Instrum. Meth. by Gosset (1998)
{'key': '10.1016/S0167-5729(02)00113-9_BIB83', 'first-page': '2385', 'volume': '80', 'author': 'Tang', 'year': '1996', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. by Tang (1996)
10.1063/1.117645 / Appl. Phys. Lett. by Baumvol (1996)
10.1063/1.118804 / Appl. Phys. Lett. by Baumvol (1997)
10.1063/1.116135 / Appl. Phys. Lett. by Ganem (1996)
J.-J. Ganem, private communication.
10.1063/1.125694 / Appl. Phys. Lett. by Gusev (2000)
10.1016/0039-6028(95)90033-0 / Surf. Sci. by Dillon (1995)
10.1016/0169-4332(96)00306-6 / Appl. Surf. Sci. by Suntola (1996)
10.1002/(SICI)1521-3862(199901)5:1<7::AID-CVDE7>3.0.CO;2-J / Chem. Vap. Dep. by Ritala (1997)
10.1116/1.1379316 / J. Vac. Sci. Technol. A by Johnson (2001)
10.1063/1.1355294 / Appl. Phys. Lett. by Kundu (2001)
10.1063/1.1423763 / J. Appl. Phys. by Kundu (2002)
10.1063/1.1495066 / J. Appl. Phys. by Kundu (2002)
10.1063/1.125519 / Appl. Phys. Lett. by Klein (1999)
10.1063/1.126506 / Appl. Phys. Lett. by Ludeke (2000)
S. Miyazaki, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 8.
10.1063/1.1415418 / Appl. Phys. Lett. by Quevedo-Lopez (2001)
M.C. Gilmer, et al., in: H.R. Huff, et al. (Eds.), MRS Symposia Proceedings on Ultrathin SiO2 and High-K Materials for ULSI, vol. 567, Materials Research Society, Warrendale, 1999, pp. 323–341.
10.1016/S0022-3093(02)00958-4 / J. Non-Cryst. Sol. by Gosset (2002)
10.1103/PhysRevLett.85.4120 / Phys. Rev. Lett. by Krug (2000)
10.1103/PhysRevLett.86.4714 / Phys. Rev. Lett. by Krug (2001)
10.1103/PhysRevLett.86.4713 / Phys. Rev. Lett. by Copel (2001)
10.1063/1.1367902 / Appl. Phys. Lett. by Copel (2001)
10.1063/1.99709 / Appl. Phys. Lett. by Sawada (1988)
10.1103/PhysRevB.65.121303 / Phys. Rev. B by da Rosa (2002)
10.1016/0022-3697(62)90208-1 / J. Phys. Chem. Solids by Amsel (1962)
Pasquarello, M.S. Hybertsen, R. Car, Nature (London) 396 (1998) 58. (10.1038/23908)
10.1063/1.100105 / Appl. Phys. Lett. by Walkup (1988)
Bongiorno, A. Pasquarello, Phys. Rev. Lett. 88 (2002) 125901. (10.1103/PhysRevLett.88.125901)
10.1063/1.125779 / Appl. Phys. Lett. by Copel (2000)
10.1103/PhysRevB.62.R13290 / Phys. Rev. B by Busch (2000)
D. Starodub, W.H. Schulte, B.W. Busch, J. Kwo, T. Nishimura, W. Tsai, S. Sayan, C.M. Perkins, P. McIntyre, T. Gustafsson, E. Garfunkel, in: J. Morais, I.J.R. Baumvol (Eds.), Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 5.
10.1016/S0168-583X(00)00619-4 / Nucl. Instrum. Meth. Phys. Res. B by Gustafsson (2001)
10.1063/1.1419030 / Appl. Phys. Lett. by Chang (2001)
10.1063/1.1339994 / Appl. Phys. Lett. by Jeon (2001)
10.1063/1.1405808 / Appl. Phys. Lett. by Morais (2001)
10.1149/1.1471891 / J. Electrochem. Soc. by Chen (2002)
10.1063/1.1308535 / Appl. Phys. Lett. by Qi (2000)
10.1063/1.125673 / Appl. Phys. Lett. by Wilk (2000)
10.1063/1.1367288 / Appl. Phys. Lett. by Morais (2001)
10.1063/1.1448169 / Appl. Phys. Lett. by Stesman (2002)
10.1149/1.1414290 / J. Electrochem. Soc. by da Rosa (2001)
10.1149/1.1337607 / J. Electrochem. Soc. by Landheer (2001)
10.1063/1.1412284 / Appl. Phys. Lett. by Landheer (2001)
D. Landheer, X. Wu, G.I. Sproule, S. Moisa, J. Morais, I.J.R. Baumvol, R.P. Pezzi, L. Miotti, W.N. Lennard, J.-K. Kim, in: J. Morais, I.J.R. Baumvol (Eds.), Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 10.
10.1063/1.1320464 / Appl. Phys. Lett. by Guha (2000)
10.1063/1.1383268 / Appl. Phys. Lett. by Stemmer (2001)
10.1063/1.1316073 / Appl. Phys. Lett. by Chambers (2000)
G.N. Parsons, J.J. Chambers, D. Niu, R. Ashcraft, T.M. Klein, in: J. Morais, I.J.R. Baumvol (Eds.), Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 13.
10.1063/1.119683 / Appl. Phys. Lett. by Choi (1997)
10.1149/1.1450617 / J. Electrochem. Soc. by Choi (2002)
10.1016/S0167-9317(01)00669-4 / Microelectron. Eng. by Campbell (2001)
10.1063/1.1476397 / Appl. Phys. Lett. by Visokay (2002)
10.1063/1.1450049 / Appl. Phys. Lett. by Sayan (2002)
10.1116/1.1450584 / J. Vac. Sci. Technol. A by Sayan (2002)
10.1063/1.1502006 / Appl. Phys. Lett. by Bastos (2002)
Y. Kim, et al., IEDM Tech. Dig. 20.2.1 (2001).
10.1063/1.1487923 / Appl. Phys. Lett. by Cho (2002)
10.1063/1.1466534 / Appl. Phys. Lett. by Park (2002)
10.1063/1.1425466 / Appl. Phys. Lett. by Quevedo-Lopez (2001)
10.1149/1.1425798 / J. Electrochem. Soc. by Park (2002)
10.1063/1.1515112 / Appl. Phys. Lett. by Morais (2002)
10.1063/1.1455155 / J. Appl. Phys. by Kirsch (2002)
10.1063/1.1385347 / Appl. Phys. Lett. by Jeon (2001)
10.1149/1.2044153 / J. Electrochem. Soc. by Baumvol (1995)
10.1063/1.1501752 / J. Appl. Phys. by Quevedo-Lopez (2002)
10.1063/1.1513662 / Appl. Phys. Lett. by Guha (2002)
10.1063/1.1510155 / Appl. Phys. Lett. by Kang (2002)
10.1063/1.1509084 / J. Appl. Phys. by Wilde (2002)

Dates

Type	When
Created	22 years, 6 months ago (Feb. 17, 2003, 4:25 p.m.)
Deposited	5 years, 5 months ago (March 12, 2020, 12:14 p.m.)
Indexed	1 year, 2 months ago (June 16, 2024, 4:33 p.m.)
Issued	22 years, 7 months ago (Feb. 1, 2003)
Published	22 years, 7 months ago (Feb. 1, 2003)
Published Print	22 years, 7 months ago (Feb. 1, 2003)

Funders 0

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BibTeX

@article{de_Almeida_2003, title={Reaction–diffusion in high-k dielectrics on Si}, volume={49}, ISSN={0167-5729}, url={http://dx.doi.org/10.1016/s0167-5729(02)00113-9}, DOI={10.1016/s0167-5729(02)00113-9}, number={1–3}, journal={Surface Science Reports}, publisher={Elsevier BV}, author={de Almeida, R.M.C. and Baumvol, I.J.R.}, year={2003}, month=feb, pages={1–114} }

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      "key": "10.1016/S0167-5729(02)00113-9_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "758",
      "DOI": "10.1038/21602",
      "volume": "399",
      "author": "Muller",
      "year": "1999",
      "journal-title": "Nature"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB11",
      "unstructured": "International Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA, 2001. http://www.public.itrs.net/."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "291",
      "DOI": "10.1109/55.704403",
      "volume": "19",
      "author": "Cao",
      "year": "1998",
      "journal-title": "IEEE Electron Dev. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "109",
      "DOI": "10.1109/55.285386",
      "volume": "15",
      "author": "Ma",
      "year": "1994",
      "journal-title": "IEEE Electron Dev. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "265",
      "DOI": "10.1147/rd.433.0265",
      "volume": "43",
      "author": "Gusev",
      "year": "1999",
      "journal-title": "IBM J. Res. Dev."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB15",
      "unstructured": "C. Krug, I.J.R. Baumvol, F.C. Stedile, M.L. Green, F. Klemens, P.J. Silverman, T.W. Sorsch, F. Alvarez, P. Hammer, N.M. Victoria, in: H.Z. Massoud, E.H. Poindexter, I.J.R. Baumvol (Eds.), The Physics and Chemistry of SiO2 and the Si\u2013SiO2 Interface-4, The Electrochemical Society, Pennington, 2000, p. 187."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB16",
      "first-page": "342",
      "volume": "432",
      "author": "Krug",
      "year": "2001",
      "journal-title": "IEEE Trans. Ion Implant. Technol."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "806",
      "DOI": "10.1063/1.123374",
      "volume": "74",
      "author": "Baumvol",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB18",
      "doi-asserted-by": "crossref",
      "unstructured": "T. Hori, Dielectrics and MOS ULSIs, Springer, New York, 1997.",
      "DOI": "10.1007/978-3-642-60856-8"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB19",
      "unstructured": "S. Dimitrijev, Understanding Semiconductor Devices, Oxford University Press, New York, 2000."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "1032",
      "DOI": "10.1038/35023243",
      "volume": "406",
      "author": "Kingon",
      "year": "2000",
      "journal-title": "Nature"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB21",
      "first-page": "1927",
      "volume": "76",
      "author": "Lee",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "484",
      "DOI": "10.1063/1.371888",
      "volume": "87",
      "author": "Wilk",
      "year": "2000",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB23",
      "unstructured": "C. Werkhoven, C. Pomarede, E. Shero, M. Givens, S. Haukka, M. Tuominen, J.W. Maes, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 3."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "5243",
      "DOI": "10.1063/1.1361065",
      "article-title": "Applied physics review",
      "volume": "89",
      "author": "Wilk",
      "year": "2001",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB25",
      "doi-asserted-by": "crossref",
      "first-page": "341",
      "DOI": "10.1016/S0167-9317(01)00667-0",
      "volume": "59",
      "author": "Gusev",
      "year": "2001",
      "journal-title": "Microelectron. Eng."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB26",
      "doi-asserted-by": "crossref",
      "first-page": "269",
      "DOI": "10.1016/S0927-796X(97)00023-5",
      "volume": "R22",
      "author": "Chaneliere",
      "year": "1998",
      "journal-title": "Mater. Sci. Eng."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB27",
      "doi-asserted-by": "crossref",
      "first-page": "2757",
      "DOI": "10.1557/JMR.1996.0350",
      "volume": "11",
      "author": "Hubbard",
      "year": "1996",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB28",
      "doi-asserted-by": "crossref",
      "first-page": "3385",
      "DOI": "10.1063/1.1477266",
      "volume": "80",
      "author": "Chang",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB29",
      "doi-asserted-by": "crossref",
      "first-page": "2854",
      "DOI": "10.1063/1.124036",
      "volume": "74",
      "author": "Wilk",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB30",
      "unstructured": "L.G. Gosset, J.-J. Ganem, O. Renault, Ph. Holliger, F. Damlecourt, G. Rolland, H.J. Von Bardeleben, F. Pierre, D. Jalabert, I. Trimaille, J.-L. Cantin, S. Rigo, A. Ermolieff, F. Martin, M.-N. Semeria, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 5."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB31",
      "doi-asserted-by": "crossref",
      "first-page": "G29",
      "DOI": "10.1149/1.1337607",
      "volume": "148",
      "author": "Choi",
      "year": "2001",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB32",
      "doi-asserted-by": "crossref",
      "first-page": "1065",
      "DOI": "10.1063/1.1495882",
      "volume": "81",
      "author": "Harris",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB33",
      "doi-asserted-by": "crossref",
      "first-page": "1885",
      "DOI": "10.1063/1.1310635",
      "volume": "77",
      "author": "Houssa",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB34",
      "doi-asserted-by": "crossref",
      "first-page": "3311",
      "DOI": "10.1063/1.1418266",
      "volume": "79",
      "author": "Ramanatham",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB35",
      "doi-asserted-by": "crossref",
      "unstructured": "Callegari, E. Cartier, M. Gribelyuk, H.F. Okorn-Schmidt, T. Zabel, J. Appl. Phys. 90 (2001) 6466.",
      "DOI": "10.1063/1.1417991"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB36",
      "unstructured": "H. Iwai, S. Ohmi, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 1."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB37",
      "doi-asserted-by": "crossref",
      "first-page": "F18",
      "DOI": "10.1149/1.1388996",
      "volume": "4",
      "author": "Su",
      "year": "2001",
      "journal-title": "Electrochem. Sol. State Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB38",
      "doi-asserted-by": "crossref",
      "first-page": "1788",
      "DOI": "10.1063/1.1505120",
      "volume": "81",
      "author": "Opila",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB39",
      "doi-asserted-by": "crossref",
      "first-page": "2041",
      "DOI": "10.1063/1.1506207",
      "volume": "81",
      "author": "Lin",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB40",
      "doi-asserted-by": "crossref",
      "first-page": "2053",
      "DOI": "10.1063/1.1506782",
      "volume": "81",
      "author": "Yamamoto",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB41",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/S0167-5729(99)00006-0",
      "volume": "36",
      "author": "Baumvol",
      "year": "1999",
      "journal-title": "Surf. Sci. Rep."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB42",
      "doi-asserted-by": "crossref",
      "first-page": "65",
      "DOI": "10.1016/0169-4332(89)90420-0",
      "volume": "39",
      "author": "Trimaille",
      "year": "1989",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB43",
      "doi-asserted-by": "crossref",
      "first-page": "1492",
      "DOI": "10.1103/PhysRevB.60.1492",
      "volume": "60",
      "author": "Baumvol",
      "year": "1999",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB44",
      "doi-asserted-by": "crossref",
      "first-page": "127",
      "DOI": "10.1016/0370-1573(90)90099-N",
      "volume": "195",
      "author": "Bouchaud",
      "year": "1990",
      "journal-title": "Phys. Rep."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB45",
      "doi-asserted-by": "crossref",
      "first-page": "695",
      "DOI": "10.1080/00018738700101072",
      "volume": "36",
      "author": "Havlin",
      "year": "1987",
      "journal-title": "Adv. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB46",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/S0370-1573(00)00070-3",
      "volume": "339",
      "author": "Metzler",
      "year": "2000",
      "journal-title": "Phys. Rep."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB47",
      "doi-asserted-by": "crossref",
      "unstructured": "L.E. Reichl, A Modern Course in Statistical Physics, 2nd ed., Wiley, New York, 1998.",
      "DOI": "10.1119/1.19118"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB48",
      "unstructured": "S. Rigo, in: G. Barbottin, A. Vapaille (Eds.), Instabilities in Silicon Devices, Elsevier, Amsterdam, 1986, p. 5."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB49",
      "doi-asserted-by": "crossref",
      "first-page": "12992",
      "DOI": "10.1103/PhysRevB.61.12992",
      "volume": "61",
      "author": "de Almeida",
      "year": "2000",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB50",
      "unstructured": "I. Trimaille, F.C. Stedile, J.-J. Ganem, I.J.R. Baumvol, S. Rigo, in: H.Z. Massoud, E.H. Poindexter, C.R. Helms (Eds.), The Physics and Chemistry of SiO2 and of the Si\u2013SiO2 Interface-3, vol. 96, No. 1, The Electrochemical Society, Pennington, 1996, p. 59."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB51",
      "doi-asserted-by": "crossref",
      "first-page": "248",
      "DOI": "10.1016/0168-583X(94)95821-1",
      "volume": "85",
      "author": "Stedile",
      "year": "1994",
      "journal-title": "Nucl. Instrum. Meth. Phys. Res. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB52",
      "doi-asserted-by": "crossref",
      "first-page": "1742",
      "DOI": "10.1063/1.115035",
      "volume": "67",
      "author": "Lu",
      "year": "1995",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB53_1",
      "doi-asserted-by": "crossref",
      "first-page": "1745",
      "DOI": "10.1149/1.2114204",
      "volume": "132",
      "author": "Massoud",
      "year": "1985",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB53_2",
      "doi-asserted-by": "crossref",
      "first-page": "2685",
      "DOI": "10.1149/1.2113648",
      "volume": "132",
      "author": "Massoud",
      "year": "1985",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB54",
      "doi-asserted-by": "crossref",
      "first-page": "1185",
      "DOI": "10.1103/PhysRevLett.57.1185",
      "volume": "57",
      "author": "Boszo",
      "year": "1986",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB55",
      "doi-asserted-by": "crossref",
      "first-page": "170",
      "DOI": "10.1016/0039-6028(91)90975-X",
      "volume": "251\u2013252",
      "author": "Bischoff",
      "year": "1991",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB56",
      "doi-asserted-by": "crossref",
      "first-page": "353",
      "DOI": "10.1016/0039-6028(91)90095-A",
      "volume": "241",
      "author": "Larsson",
      "year": "1991",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB57",
      "doi-asserted-by": "crossref",
      "first-page": "737",
      "DOI": "10.1016/0039-6028(91)91089-G",
      "volume": "251\u2013252",
      "author": "Cherif",
      "year": "1991",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB58",
      "doi-asserted-by": "crossref",
      "first-page": "499",
      "DOI": "10.1016/0168-583X(95)01478-0",
      "volume": "118",
      "author": "Baumvol",
      "year": "1996",
      "journal-title": "Nucl. Instrum. Meth. Phys. Res. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB59",
      "doi-asserted-by": "crossref",
      "first-page": "258",
      "DOI": "10.1016/0039-6028(92)90529-F",
      "volume": "274",
      "author": "Cherif",
      "year": "1992",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB60",
      "doi-asserted-by": "crossref",
      "first-page": "349",
      "DOI": "10.1016/0039-6028(92)90899-H",
      "volume": "271",
      "author": "Larsson",
      "year": "1992",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB61",
      "doi-asserted-by": "crossref",
      "first-page": "15662",
      "DOI": "10.1103/PhysRevB.47.15622",
      "volume": "47",
      "author": "Peden",
      "year": "1993",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB62",
      "doi-asserted-by": "crossref",
      "first-page": "33",
      "DOI": "10.1016/0039-6028(94)90750-1",
      "volume": "304",
      "author": "Dufour",
      "year": "1994",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB63",
      "doi-asserted-by": "crossref",
      "first-page": "326",
      "DOI": "10.1016/0169-4332(86)90073-5",
      "volume": "26",
      "author": "Maillot",
      "year": "1986",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB64",
      "doi-asserted-by": "crossref",
      "first-page": "369",
      "DOI": "10.1016/0039-6028(94)90326-3",
      "volume": "320",
      "author": "Rochet",
      "year": "1994",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB65",
      "doi-asserted-by": "crossref",
      "first-page": "371",
      "DOI": "10.1016/0039-6028(94)90326-3",
      "volume": "320",
      "author": "Rochet",
      "year": "1994",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB66",
      "doi-asserted-by": "crossref",
      "first-page": "16255",
      "DOI": "10.1103/PhysRevB.62.R16255",
      "volume": "62",
      "author": "de Almeida",
      "year": "2000",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB67",
      "doi-asserted-by": "crossref",
      "first-page": "123",
      "DOI": "10.1016/0927-796X(94)90006-X",
      "volume": "R12",
      "author": "Habraken",
      "year": "1994",
      "journal-title": "Mater. Sci. Eng."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB68",
      "doi-asserted-by": "crossref",
      "first-page": "106",
      "DOI": "10.1109/T-ED.1985.21920",
      "volume": "ED-32",
      "author": "Moslehi",
      "year": "1985",
      "journal-title": "IEEE Trans. Electron Dev."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB69",
      "doi-asserted-by": "crossref",
      "first-page": "1753",
      "DOI": "10.1149/1.1836712",
      "volume": "143",
      "author": "Hartig",
      "year": "1996",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB70",
      "doi-asserted-by": "crossref",
      "first-page": "595",
      "DOI": "10.1016/S0169-4332(96)00803-3",
      "volume": "113\u2013114",
      "author": "Fukuda",
      "year": "1997",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB71",
      "doi-asserted-by": "crossref",
      "unstructured": "Kamath, D.L. Kwong, Y.M. Sun, P.M. Blass, S. Whaley, J.M. White, Appl. Phys. Lett. 70 (1997) 63.",
      "DOI": "10.1063/1.119307"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB72",
      "doi-asserted-by": "crossref",
      "first-page": "2906",
      "DOI": "10.1063/1.360036",
      "volume": "78",
      "author": "Yao",
      "year": "1995",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB73",
      "doi-asserted-by": "crossref",
      "first-page": "3584",
      "DOI": "10.1063/1.111205",
      "volume": "64",
      "author": "Yao",
      "year": "1994",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB74",
      "doi-asserted-by": "crossref",
      "first-page": "1387",
      "DOI": "10.1116/1.583621",
      "volume": "5",
      "author": "Avouris",
      "year": "1987",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB75",
      "doi-asserted-by": "crossref",
      "first-page": "896",
      "DOI": "10.1063/1.365858",
      "volume": "82",
      "author": "Gusev",
      "year": "1997",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB76",
      "doi-asserted-by": "crossref",
      "first-page": "2713",
      "DOI": "10.1063/1.117687",
      "volume": "69",
      "author": "Lu",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB77",
      "doi-asserted-by": "crossref",
      "first-page": "2999",
      "DOI": "10.1063/1.121520",
      "volume": "72",
      "author": "Baumvol",
      "year": "1998",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB78",
      "doi-asserted-by": "crossref",
      "unstructured": "Trimaille, J.-J. Ganem, L.G. Gosset, S. Rigo, I.J.R. Baumvol, F.C. Stedile, F. Rochet, G. Dufour, F. Jolly, in: E. Garfunkel, E. Gusev, A. Vul\u2019 (Eds.), Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices, Kluwer Academic Publishers, Holanda, 1998, p. 165.",
      "DOI": "10.1016/S0168-583X(97)00731-3"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB79",
      "doi-asserted-by": "crossref",
      "first-page": "848",
      "DOI": "10.1063/1.112980",
      "volume": "65",
      "author": "Green",
      "year": "1994",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB80",
      "doi-asserted-by": "crossref",
      "first-page": "1811",
      "DOI": "10.1063/1.356374",
      "volume": "75",
      "author": "Tobin",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB81",
      "doi-asserted-by": "crossref",
      "first-page": "3372",
      "DOI": "10.1149/1.1837214",
      "volume": "143",
      "author": "Kim",
      "year": "1996",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB82",
      "doi-asserted-by": "crossref",
      "first-page": "521",
      "DOI": "10.1016/S0168-583X(97)00731-3",
      "volume": "136/138",
      "author": "Gosset",
      "year": "1998",
      "journal-title": "Nucl. Instrum. Meth."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB83",
      "first-page": "2385",
      "volume": "80",
      "author": "Tang",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB84",
      "doi-asserted-by": "crossref",
      "first-page": "2385",
      "DOI": "10.1063/1.117645",
      "volume": "69",
      "author": "Baumvol",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB85",
      "doi-asserted-by": "crossref",
      "first-page": "2007",
      "DOI": "10.1063/1.118804",
      "volume": "70",
      "author": "Baumvol",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB86",
      "doi-asserted-by": "crossref",
      "first-page": "2366",
      "DOI": "10.1063/1.116135",
      "volume": "68",
      "author": "Ganem",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB87",
      "unstructured": "J.-J. Ganem, private communication."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB88",
      "doi-asserted-by": "crossref",
      "first-page": "176",
      "DOI": "10.1063/1.125694",
      "volume": "76",
      "author": "Gusev",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB89",
      "doi-asserted-by": "crossref",
      "first-page": "230",
      "DOI": "10.1016/0039-6028(95)90033-0",
      "volume": "322",
      "author": "Dillon",
      "year": "1995",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB90",
      "doi-asserted-by": "crossref",
      "first-page": "391",
      "DOI": "10.1016/0169-4332(96)00306-6",
      "volume": "100\u2013101",
      "author": "Suntola",
      "year": "1996",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB91_1",
      "doi-asserted-by": "crossref",
      "first-page": "7",
      "DOI": "10.1002/(SICI)1521-3862(199901)5:1<7::AID-CVDE7>3.0.CO;2-J",
      "volume": "5",
      "author": "Ritala",
      "year": "1997",
      "journal-title": "Chem. Vap. Dep."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB91_2",
      "doi-asserted-by": "crossref",
      "first-page": "1353",
      "DOI": "10.1116/1.1379316",
      "volume": "19",
      "author": "Johnson",
      "year": "2001",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB92",
      "doi-asserted-by": "crossref",
      "first-page": "1517",
      "DOI": "10.1063/1.1355294",
      "volume": "78",
      "author": "Kundu",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB93",
      "doi-asserted-by": "crossref",
      "first-page": "492",
      "DOI": "10.1063/1.1423763",
      "volume": "91",
      "author": "Kundu",
      "year": "2002",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB94",
      "doi-asserted-by": "crossref",
      "first-page": "1914",
      "DOI": "10.1063/1.1495066",
      "volume": "92",
      "author": "Kundu",
      "year": "2002",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB95",
      "doi-asserted-by": "crossref",
      "first-page": "4001",
      "DOI": "10.1063/1.125519",
      "volume": "75",
      "author": "Klein",
      "year": "1999",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB96",
      "doi-asserted-by": "crossref",
      "first-page": "2886",
      "DOI": "10.1063/1.126506",
      "volume": "76",
      "author": "Ludeke",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB97",
      "unstructured": "S. Miyazaki, in: J. Morais, I.J.R. Baumvol (Eds.), Alternatives to SiO2 as Gate Dielectrics for Future Si-based Microelectronics, Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 8."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB98",
      "doi-asserted-by": "crossref",
      "first-page": "2958",
      "DOI": "10.1063/1.1415418",
      "volume": "79",
      "author": "Quevedo-Lopez",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB99",
      "unstructured": "M.C. Gilmer, et al., in: H.R. Huff, et al. (Eds.), MRS Symposia Proceedings on Ultrathin SiO2 and High-K Materials for ULSI, vol. 567, Materials Research Society, Warrendale, 1999, pp. 323\u2013341."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB100",
      "doi-asserted-by": "crossref",
      "first-page": "17",
      "DOI": "10.1016/S0022-3093(02)00958-4",
      "volume": "303",
      "author": "Gosset",
      "year": "2002",
      "journal-title": "J. Non-Cryst. Sol."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB101",
      "doi-asserted-by": "crossref",
      "first-page": "4120",
      "DOI": "10.1103/PhysRevLett.85.4120",
      "volume": "85",
      "author": "Krug",
      "year": "2000",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB102",
      "doi-asserted-by": "crossref",
      "first-page": "4714",
      "DOI": "10.1103/PhysRevLett.86.4714",
      "volume": "86",
      "author": "Krug",
      "year": "2001",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB103",
      "doi-asserted-by": "crossref",
      "first-page": "4713",
      "DOI": "10.1103/PhysRevLett.86.4713",
      "volume": "86",
      "author": "Copel",
      "year": "2001",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB104",
      "doi-asserted-by": "crossref",
      "first-page": "2670",
      "DOI": "10.1063/1.1367902",
      "volume": "78",
      "author": "Copel",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB105",
      "doi-asserted-by": "crossref",
      "first-page": "1672",
      "DOI": "10.1063/1.99709",
      "volume": "52",
      "author": "Sawada",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB106",
      "doi-asserted-by": "crossref",
      "first-page": "121303",
      "DOI": "10.1103/PhysRevB.65.121303",
      "volume": "86",
      "author": "da Rosa",
      "year": "2002",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB107",
      "doi-asserted-by": "crossref",
      "first-page": "1707",
      "DOI": "10.1016/0022-3697(62)90208-1",
      "volume": "23",
      "author": "Amsel",
      "year": "1962",
      "journal-title": "J. Phys. Chem. Solids"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB108",
      "doi-asserted-by": "crossref",
      "unstructured": "Pasquarello, M.S. Hybertsen, R. Car, Nature (London) 396 (1998) 58.",
      "DOI": "10.1038/23908"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB109",
      "doi-asserted-by": "crossref",
      "first-page": "888",
      "DOI": "10.1063/1.100105",
      "volume": "53",
      "author": "Walkup",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB110",
      "doi-asserted-by": "crossref",
      "unstructured": "Bongiorno, A. Pasquarello, Phys. Rev. Lett. 88 (2002) 125901.",
      "DOI": "10.1103/PhysRevLett.88.125901"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB111",
      "doi-asserted-by": "crossref",
      "first-page": "436",
      "DOI": "10.1063/1.125779",
      "volume": "76",
      "author": "Copel",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB112",
      "doi-asserted-by": "crossref",
      "first-page": "13290",
      "DOI": "10.1103/PhysRevB.62.R13290",
      "volume": "62",
      "author": "Busch",
      "year": "2000",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB113",
      "unstructured": "D. Starodub, W.H. Schulte, B.W. Busch, J. Kwo, T. Nishimura, W. Tsai, S. Sayan, C.M. Perkins, P. McIntyre, T. Gustafsson, E. Garfunkel, in: J. Morais, I.J.R. Baumvol (Eds.), Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 5."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB114",
      "doi-asserted-by": "crossref",
      "first-page": "146",
      "DOI": "10.1016/S0168-583X(00)00619-4",
      "volume": "183",
      "author": "Gustafsson",
      "year": "2001",
      "journal-title": "Nucl. Instrum. Meth. Phys. Res. B"
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB115",
      "doi-asserted-by": "crossref",
      "first-page": "3824",
      "DOI": "10.1063/1.1419030",
      "volume": "79",
      "author": "Chang",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB116",
      "doi-asserted-by": "crossref",
      "first-page": "368",
      "DOI": "10.1063/1.1339994",
      "volume": "78",
      "author": "Jeon",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB117",
      "doi-asserted-by": "crossref",
      "first-page": "1998",
      "DOI": "10.1063/1.1405808",
      "volume": "79",
      "author": "Morais",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB118",
      "doi-asserted-by": "crossref",
      "first-page": "F49",
      "DOI": "10.1149/1.1471891",
      "volume": "149",
      "author": "Chen",
      "year": "2002",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB119",
      "doi-asserted-by": "crossref",
      "first-page": "1704",
      "DOI": "10.1063/1.1308535",
      "volume": "77",
      "author": "Qi",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB120",
      "doi-asserted-by": "crossref",
      "first-page": "112",
      "DOI": "10.1063/1.125673",
      "volume": "76",
      "author": "Wilk",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB121",
      "doi-asserted-by": "crossref",
      "first-page": "2446",
      "DOI": "10.1063/1.1367288",
      "volume": "78",
      "author": "Morais",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB122",
      "doi-asserted-by": "crossref",
      "first-page": "1957",
      "DOI": "10.1063/1.1448169",
      "volume": "80",
      "author": "Stesman",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB123",
      "doi-asserted-by": "crossref",
      "first-page": "G44",
      "DOI": "10.1149/1.1414290",
      "volume": "148",
      "author": "da Rosa",
      "year": "2001",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB124",
      "doi-asserted-by": "crossref",
      "first-page": "G29",
      "DOI": "10.1149/1.1337607",
      "volume": "148",
      "author": "Landheer",
      "year": "2001",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB125",
      "doi-asserted-by": "crossref",
      "first-page": "2618",
      "DOI": "10.1063/1.1412284",
      "volume": "79",
      "author": "Landheer",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB126",
      "unstructured": "D. Landheer, X. Wu, G.I. Sproule, S. Moisa, J. Morais, I.J.R. Baumvol, R.P. Pezzi, L. Miotti, W.N. Lennard, J.-K. Kim, in: J. Morais, I.J.R. Baumvol (Eds.), Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 10."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB127",
      "doi-asserted-by": "crossref",
      "first-page": "2710",
      "DOI": "10.1063/1.1320464",
      "volume": "77",
      "author": "Guha",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB128",
      "doi-asserted-by": "crossref",
      "first-page": "102",
      "DOI": "10.1063/1.1383268",
      "volume": "79",
      "author": "Stemmer",
      "year": "2001",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB129",
      "doi-asserted-by": "crossref",
      "first-page": "2385",
      "DOI": "10.1063/1.1316073",
      "volume": "77",
      "author": "Chambers",
      "year": "2000",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB130",
      "unstructured": "G.N. Parsons, J.J. Chambers, D. Niu, R. Ashcraft, T.M. Klein, in: J. Morais, I.J.R. Baumvol (Eds.), Materials Research Society Workshop Series, Materials Research Society, Warrendale, 2002, p. 13."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB131",
      "doi-asserted-by": "crossref",
      "first-page": "903",
      "DOI": "10.1063/1.119683",
      "volume": "71",
      "author": "Choi",
      "year": "1997",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB132",
      "doi-asserted-by": "crossref",
      "first-page": "F18",
      "DOI": "10.1149/1.1450617",
      "volume": "149",
      "author": "Choi",
      "year": "2002",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB133",
      "doi-asserted-by": "crossref",
      "first-page": "361",
      "DOI": "10.1016/S0167-9317(01)00669-4",
      "volume": "59",
      "author": "Campbell",
      "year": "2001",
      "journal-title": "Microelectron. Eng."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB134",
      "doi-asserted-by": "crossref",
      "first-page": "3183",
      "DOI": "10.1063/1.1476397",
      "volume": "80",
      "author": "Visokay",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB135",
      "doi-asserted-by": "crossref",
      "first-page": "2135",
      "DOI": "10.1063/1.1450049",
      "volume": "80",
      "author": "Sayan",
      "year": "2002",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0167-5729(02)00113-9_BIB136",
      "doi-asserted-by": "crossref",
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