DOI: 10.1016/s0141-6359(00)00045-3. Microgrooving and microthreading tools for fabricating curvilinear features

Microgrooving and microthreading tools for fabricating curvilinear features

10.1016/s0141-6359(00)00045-3

Crossref journal-article

Elsevier BV

Precision Engineering (78)

Bibliography

Adams, D. P., Vasile, M. J., & Krishnan, A. S. M. (2000). Microgrooving and microthreading tools for fabricating curvilinear features. Precision Engineering, 24(4), 347â356.

Authors 3

D.P Adams (first)
M.J Vasile (additional)
A.S.M Krishnan (additional)

References 32 Referenced 58

10.1088/0960-1317/8/4/001 / J Micromech Microeng / Microprocessing at the fingertips by Thornell (1998)
10.1016/S0079-6565(97)00004-6 / Prog Nucl Magn Reson Spectrosc / Radiofrequency microcoils in magnetic resonance by Webb (1997)
10.1109/84.623106 / J Microelectromech Syst / Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnets by Rogers (1997)
10.1016/0924-4247(92)80050-D / Sens Actuators A / Microactuators with moving magnets for linear, torsional, or multiaxial motion by Wagner (1992)
10.1126/science.280.5372.2089 / Science / Design and fabrication of topologically complex, three-dimensional microstructures by Jackman (1998)
10.1126/science.270.5242.1644 / Science / Laser-driven movement of three-dimensional microstructures generated by laser rapid prototyping by Lehmann (1995)
Maxwell J, Larsson K, Boman M, Hooge P, Williams K, Coane P. Rapid prototyping of functional three-dimensional microsolenoids and electromagnets by high-pressure laser chemical vapor deposition. Proceedings of Solid Freeform Fabrication Symposium 1998;529–36.
10.1016/0167-9317(86)90004-3 / Microelectron Eng / Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvano-forming, and plastic moulding (LIGA process) by Becker (1986)
{'key': '10.1016/S0141-6359(00)00045-3_BIB9', 'first-page': '192', 'article-title': 'Advances in LIGA-based postmold fabrication', 'volume': '3511', 'author': 'Christenson', 'year': '1998', 'journal-title': 'Proc SPIE Micromach Microfabric Proc Technol IV'} / Proc SPIE Micromach Microfabric Proc Technol IV / Advances in LIGA-based postmold fabrication by Christenson (1998)
10.1016/S0168-583X(97)00449-7 / Nucl Instr Meth B / Deep light ion lithography in PMMA—A parameter study by Schrempel (1997)
10.1016/S0168-583X(97)00275-9 / Nucl Instr Meth B / Micromachining using deep ion-beam lithography by Springham (1997)
10.1109/84.546405 / J Microelectromech Syst / X-ray lathe by Feinerman (1996)
10.1109/84.767110 / J Microelectromech Syst / The fabrication of nonplanar spin-on glass microstructures by Liu (1999)
{'key': '10.1016/S0141-6359(00)00045-3_BIB14', 'first-page': '332', 'article-title': 'Micro electro discharge machining as a technology in micromachining', 'volume': '2879', 'author': 'Ehrfeld', 'year': '1996', 'journal-title': 'Proc SPIE Micromac Microfabrica Symp'} / Proc SPIE Micromac Microfabrica Symp / Micro electro discharge machining as a technology in micromachining by Ehrfeld (1996)
10.1007/s005420050150 / Microsyst Technol / Materials of LIGA technology by Ehrfeld (1999)
10.1063/1.1144104 / Rev Sci Instrum / High-resolution focused ion beams by Orloff (1993)
10.1116/1.589644 / J Vac Sci Technol B / Focused ion beam milling by Vasile (1997)
10.1143/JJAP.29.2283 / Japan J Appl Phys / Micromachining and device transplantation using focused ion beam by Ishitani (1990)
10.1116/1.587769 / J Vac Sci Technol B / Microfabrication by ion milling by Vasile (1994)
10.1116/1.590197 / J Vac Sci Technol B / Chemically and geometrically enhanced focused ion-beam micromachining by Russell (1998)
Masuzawa T, Fujino M. A process for manufacturing very fine pin tools. SME Technical Papers MS90-307, 1990.
10.1016/S0141-6359(99)00011-2 / J Prec Eng / Microstructure grooves with a width of less that 50 μm cut with ground hard metal micro end mills by Schaller (1999)
10.1016/S0141-6359(96)00024-4 / J Prec Eng / Micrometer-scale machining by Vasile (1996)
10.1109/84.485213 / J Microelectromech Syst / Development of the micromilling process for high aspect ratio microstructures by Friedrich (1996)
10.1557/PROC-546-201 / Mat Res Soc Proc / Micrometer-scale machining of metals and polymers enabled by focused ion beam sputtering by Adams (1999)
Adams DP, Vasile MJ, Benavides G, Campbell A. Micromilling of metal alloys with focused ion beam-fabricated tools. submitted for publication 2000. (10.1016/S0141-6359(00)00064-7)
Sigmund P. In: Inelastic Ion-Surface Collisions. Tolk N, et al., eds. New York: Academic Press, pp. 121–52, 1977. (10.1016/B978-0-12-703550-5.50011-X)
Sigmund P. In: Sputtering by Particle. Bombardment, I. Behrisch R, ed. New York: Springer-Verlag, Ch. 2, 1981.
10.1116/1.583293 / J Vac Sci Technol B / Pressure and irradiation angle dependence of maskless ion-beam assisted etching of GaAs and Si by Ochiai (1985)
10.1117/12.940370 / Proc SPIE / A second generation focused ion beam micromachining system by Harriott (1987)
10.1016/S0968-4328(99)00008-6 / Micron / Microfabrication techniques using focused ion beams and emergent applications by Vasile (1999)
10.1016/S0141-6359(98)00012-9 / J Prec Eng / Direct fabrication of deep x-ray lithography masks by micromechanical milling by Friedrich (1999)

Dates

Type	When
Created	23 years ago (July 25, 2002, 5:02 a.m.)
Deposited	5 years, 7 months ago (Jan. 7, 2020, 4:20 p.m.)
Indexed	2 months, 4 weeks ago (May 22, 2025, 8:06 a.m.)
Issued	24 years, 10 months ago (Oct. 1, 2000)
Published	24 years, 10 months ago (Oct. 1, 2000)
Published Print	24 years, 10 months ago (Oct. 1, 2000)

Funders 0

None

BibTeX

@article{Adams_2000, title={Microgrooving and microthreading tools for fabricating curvilinear features}, volume={24}, ISSN={0141-6359}, url={http://dx.doi.org/10.1016/s0141-6359(00)00045-3}, DOI={10.1016/s0141-6359(00)00045-3}, number={4}, journal={Precision Engineering}, publisher={Elsevier BV}, author={Adams, D.P and Vasile, M.J and Krishnan, A.S.M}, year={2000}, month=oct, pages={347–356} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        5,
        22
      ]
    ],
    "date-time": "2025-05-22T12:06:36Z",
    "timestamp": 1747915596168
  },
  "reference-count": 32,
  "publisher": "Elsevier BV",
  "issue": "4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2000,
            10,
            1
          ]
        ],
        "date-time": "2000-10-01T00:00:00Z",
        "timestamp": 970358400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2000,
        10
      ]
    ]
  },
  "DOI": "10.1016/s0141-6359(00)00045-3",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T09:02:00Z",
    "timestamp": 1027587720000
  },
  "page": "347-356",
  "source": "Crossref",
  "is-referenced-by-count": 58,
  "title": "Microgrooving and microthreading tools for fabricating curvilinear features",
  "prefix": "10.1016",
  "volume": "24",
  "author": [
    {
      "given": "D.P",
      "family": "Adams",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "M.J",
      "family": "Vasile",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "A.S.M",
      "family": "Krishnan",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "251",
      "DOI": "10.1088/0960-1317/8/4/001",
      "article-title": "Microprocessing at the fingertips",
      "volume": "8",
      "author": "Thornell",
      "year": "1998",
      "journal-title": "J Micromech Microeng"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/S0079-6565(97)00004-6",
      "article-title": "Radiofrequency microcoils in magnetic resonance",
      "volume": "31",
      "author": "Webb",
      "year": "1997",
      "journal-title": "Prog Nucl Magn Reson Spectrosc"
    },
    {
      "issue": "3",
      "key": "10.1016/S0141-6359(00)00045-3_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "184",
      "DOI": "10.1109/84.623106",
      "article-title": "Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnets",
      "volume": "6",
      "author": "Rogers",
      "year": "1997",
      "journal-title": "J Microelectromech Syst"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "598",
      "DOI": "10.1016/0924-4247(92)80050-D",
      "article-title": "Microactuators with moving magnets for linear, torsional, or multiaxial motion",
      "volume": "32",
      "author": "Wagner",
      "year": "1992",
      "journal-title": "Sens Actuators A"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "2089",
      "DOI": "10.1126/science.280.5372.2089",
      "article-title": "Design and fabrication of topologically complex, three-dimensional microstructures",
      "volume": "280",
      "author": "Jackman",
      "year": "1998",
      "journal-title": "Science"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "1644",
      "DOI": "10.1126/science.270.5242.1644",
      "article-title": "Laser-driven movement of three-dimensional microstructures generated by laser rapid prototyping",
      "volume": "270",
      "author": "Lehmann",
      "year": "1995",
      "journal-title": "Science"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB7",
      "unstructured": "Maxwell J, Larsson K, Boman M, Hooge P, Williams K, Coane P. Rapid prototyping of functional three-dimensional microsolenoids and electromagnets by high-pressure laser chemical vapor deposition. Proceedings of Solid Freeform Fabrication Symposium 1998;529\u201336."
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "35",
      "DOI": "10.1016/0167-9317(86)90004-3",
      "article-title": "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvano-forming, and plastic moulding (LIGA process)",
      "volume": "4",
      "author": "Becker",
      "year": "1986",
      "journal-title": "Microelectron Eng"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB9",
      "first-page": "192",
      "article-title": "Advances in LIGA-based postmold fabrication",
      "volume": "3511",
      "author": "Christenson",
      "year": "1998",
      "journal-title": "Proc SPIE Micromach Microfabric Proc Technol IV"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "430",
      "DOI": "10.1016/S0168-583X(97)00449-7",
      "article-title": "Deep light ion lithography in PMMA\u2014A parameter study",
      "volume": "132",
      "author": "Schrempel",
      "year": "1997",
      "journal-title": "Nucl Instr Meth B"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "155",
      "DOI": "10.1016/S0168-583X(97)00275-9",
      "article-title": "Micromachining using deep ion-beam lithography",
      "volume": "130",
      "author": "Springham",
      "year": "1997",
      "journal-title": "Nucl Instr Meth B"
    },
    {
      "issue": "4",
      "key": "10.1016/S0141-6359(00)00045-3_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "250",
      "DOI": "10.1109/84.546405",
      "article-title": "X-ray lathe",
      "volume": "5",
      "author": "Feinerman",
      "year": "1996",
      "journal-title": "J Microelectromech Syst"
    },
    {
      "issue": "2",
      "key": "10.1016/S0141-6359(00)00045-3_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "146",
      "DOI": "10.1109/84.767110",
      "article-title": "The fabrication of nonplanar spin-on glass microstructures",
      "volume": "8",
      "author": "Liu",
      "year": "1999",
      "journal-title": "J Microelectromech Syst"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB14",
      "first-page": "332",
      "article-title": "Micro electro discharge machining as a technology in micromachining",
      "volume": "2879",
      "author": "Ehrfeld",
      "year": "1996",
      "journal-title": "Proc SPIE Micromac Microfabrica Symp"
    },
    {
      "issue": "3",
      "key": "10.1016/S0141-6359(00)00045-3_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "105",
      "DOI": "10.1007/s005420050150",
      "article-title": "Materials of LIGA technology",
      "volume": "5",
      "author": "Ehrfeld",
      "year": "1999",
      "journal-title": "Microsyst Technol"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "1105",
      "DOI": "10.1063/1.1144104",
      "article-title": "High-resolution focused ion beams",
      "volume": "64",
      "author": "Orloff",
      "year": "1993",
      "journal-title": "Rev Sci Instrum"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "2350",
      "DOI": "10.1116/1.589644",
      "article-title": "Focused ion beam milling",
      "volume": "15",
      "author": "Vasile",
      "year": "1997",
      "journal-title": "J Vac Sci Technol B"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "2283",
      "DOI": "10.1143/JJAP.29.2283",
      "article-title": "Micromachining and device transplantation using focused ion beam",
      "volume": "29",
      "author": "Ishitani",
      "year": "1990",
      "journal-title": "Japan J Appl Phys"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "2388",
      "DOI": "10.1116/1.587769",
      "article-title": "Microfabrication by ion milling",
      "volume": "12",
      "author": "Vasile",
      "year": "1994",
      "journal-title": "J Vac Sci Technol B"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "2494",
      "DOI": "10.1116/1.590197",
      "article-title": "Chemically and geometrically enhanced focused ion-beam micromachining",
      "volume": "16",
      "author": "Russell",
      "year": "1998",
      "journal-title": "J Vac Sci Technol B"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB21",
      "unstructured": "Masuzawa T, Fujino M. A process for manufacturing very fine pin tools. SME Technical Papers MS90-307, 1990."
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "229",
      "DOI": "10.1016/S0141-6359(99)00011-2",
      "article-title": "Microstructure grooves with a width of less that 50 \u03bcm cut with ground hard metal micro end mills",
      "volume": "23",
      "author": "Schaller",
      "year": "1999",
      "journal-title": "J Prec Eng"
    },
    {
      "issue": "2/3",
      "key": "10.1016/S0141-6359(00)00045-3_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "180",
      "DOI": "10.1016/S0141-6359(96)00024-4",
      "article-title": "Micrometer-scale machining",
      "volume": "19",
      "author": "Vasile",
      "year": "1996",
      "journal-title": "J Prec Eng"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "33",
      "DOI": "10.1109/84.485213",
      "article-title": "Development of the micromilling process for high aspect ratio microstructures",
      "volume": "5",
      "author": "Friedrich",
      "year": "1996",
      "journal-title": "J Microelectromech Syst"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB25",
      "doi-asserted-by": "crossref",
      "first-page": "201",
      "DOI": "10.1557/PROC-546-201",
      "article-title": "Micrometer-scale machining of metals and polymers enabled by focused ion beam sputtering",
      "volume": "546",
      "author": "Adams",
      "year": "1999",
      "journal-title": "Mat Res Soc Proc"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB26",
      "doi-asserted-by": "crossref",
      "unstructured": "Adams DP, Vasile MJ, Benavides G, Campbell A. Micromilling of metal alloys with focused ion beam-fabricated tools. submitted for publication 2000.",
      "DOI": "10.1016/S0141-6359(00)00064-7"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB27",
      "doi-asserted-by": "crossref",
      "unstructured": "Sigmund P. In: Inelastic Ion-Surface Collisions. Tolk N, et al., eds. New York: Academic Press, pp. 121\u201352, 1977.",
      "DOI": "10.1016/B978-0-12-703550-5.50011-X"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB28",
      "unstructured": "Sigmund P. In: Sputtering by Particle. Bombardment, I. Behrisch R, ed. New York: Springer-Verlag, Ch. 2, 1981."
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB29",
      "doi-asserted-by": "crossref",
      "first-page": "67",
      "DOI": "10.1116/1.583293",
      "article-title": "Pressure and irradiation angle dependence of maskless ion-beam assisted etching of GaAs and Si",
      "volume": "3",
      "author": "Ochiai",
      "year": "1985",
      "journal-title": "J Vac Sci Technol B"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB30",
      "doi-asserted-by": "crossref",
      "first-page": "190",
      "DOI": "10.1117/12.940370",
      "article-title": "A second generation focused ion beam micromachining system",
      "volume": "773",
      "author": "Harriott",
      "year": "1987",
      "journal-title": "Proc SPIE"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB31",
      "doi-asserted-by": "crossref",
      "first-page": "235",
      "DOI": "10.1016/S0968-4328(99)00008-6",
      "article-title": "Microfabrication techniques using focused ion beams and emergent applications",
      "volume": "30",
      "author": "Vasile",
      "year": "1999",
      "journal-title": "Micron"
    },
    {
      "key": "10.1016/S0141-6359(00)00045-3_BIB32",
      "doi-asserted-by": "crossref",
      "first-page": "164",
      "DOI": "10.1016/S0141-6359(98)00012-9",
      "article-title": "Direct fabrication of deep x-ray lithography masks by micromechanical milling",
      "volume": "22",
      "author": "Friedrich",
      "year": "1999",
      "journal-title": "J Prec Eng"
    }
  ],
  "container-title": "Precision Engineering",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0141635900000453?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0141635900000453?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        1,
        7
      ]
    ],
    "date-time": "2020-01-07T21:20:46Z",
    "timestamp": 1578432046000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0141635900000453"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2000,
        10
      ]
    ]
  },
  "references-count": 32,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          2000,
          10
        ]
      ]
    }
  },
  "alternative-id": [
    "S0141635900000453"
  ],
  "URL": "http://dx.doi.org/10.1016/S0141-6359(00)00045-3",
  "relation": {},
  "ISSN": [
    "0141-6359"
  ],
  "subject": [],
  "container-title-short": "Precision Engineering",
  "published": {
    "date-parts": [
      [
        2000,
        10
      ]
    ]
  }
}