DOI: 10.1016/s0043-1648(98)00302-0. Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads

Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads

10.1016/s0043-1648(98)00302-0

Crossref journal-article

Elsevier BV

Wear (78)

Bibliography

Zhao, X., & Bhushan, B. (1998). Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads. Wear, 223(1â2), 66â78.

Authors 2

Xingzhong Zhao (first)
Bharat Bhushan (additional)

References 26 Referenced 91

R.C. Jaeger, Introduction to Microelectronic Fabrication, Vol. 15, Addison-Wesley, Reading, MA, 1988.
J.W. Gardner, Microsensors: Principles and Applications, Wiley, New York, 1994.
S.M. Sze, Semiconductor Sensors, Wiley, New York, 1994.
I. Fujimasa, Micromechanics: A New Era in Mechanical Engineering, Oxford Univ. Press, Oxford, UK, 1996.
M. Madou, Fundamentals of Microfrabrication, CRC Press, Boca Raton, FL, 1997.
B. Bhushan, Tribology Issues and Opportunities in MEMS, Kluwer Academic, Dordrecht, Netherlands, 1998. (10.1007/978-94-011-5050-7)
{'key': '10.1016/S0043-1648(98)00302-0_BIB7', 'first-page': '211', 'article-title': 'Mechanical and tribological properties of silicon for mechanical applications: a review', 'volume': '5', 'author': 'Bhushan', 'year': '1993', 'journal-title': 'Adv. Info. Storage Syst.'} / Adv. Info. Storage Syst. / Mechanical and tribological properties of silicon for mechanical applications: a review by Bhushan (1993)
B. Bhushan, Micro/nanotribology and micro/nanomechanics of MEMS devices, in: B. Bhushan (Ed.), Handbook of Micro/Nanotribology, CRC Press, Boca Raton, FL, 1999. (10.1201/9781420050493.ch16)
10.1007/BF00540753 / J. Mater. Sci. / Deformation of silicon at low temperatures by Hill (1974)
10.1111/j.1151-2916.1988.tb06378.x / J. Am. Ceram. Soc. / Contact damage in single-crystal silicon investigated by cross-sectional transmission electron microscopy by Johansson (1988)
10.1557/JMR.1994.2907 / J. Mater. Res. / Origins of microplasticity in low load scratching of silicon by Morris (1994)
10.1007/BF00552402 / J. Mater. Sci. / Surface damage of single-crystal silicon abraded in ethanol and deionized water by Lim (1985)
10.1080/01418619408242212 / Philos. Mag. A / Transmission electron microscopy of nanomachined silicon crystals by Puttick (1994)
10.1080/14786436308213842 / Philos. Mag. / Surface damage of abraded silicon specimens by Stickler (1963)
10.1016/0043-1648(92)90213-R / Wear / Examination of silicon wear debris generated in a linear scratch test by Scott (1992)
10.1007/BF00353197 / J. Mater. Sci. / Plastic deformation of silicon during contact sliding at ambient temperature by Kim (1993)
10.1557/JMR.1997.0010 / J. Mater. Res. / Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems by Bhushan (1997)
10.1080/01418619608239708 / Philos. Mag. A / Ultra-microindentation of silicon at elevated temperatures by Suzuki (1996)
10.1080/10402009608983575 / Tribol. Trans. / Microwear mechanisms of silicon sliding against diamond in water vapor by Xu (1996)
10.1557/JMR.1997.0421 / J. Mater. Res. / Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy by Koinkar (1997)
10.1016/S1359-6454(98)00062-7 / Acta Materilia / Micro/nanoscale friction and wear mechanisms of thin films using atomic force and friction force microscopy by Bhushan (1998)
B. Bhushan, Handbook of Micro/Nanotribology, 2nd edn., CRC Press, Boca Raton, FL, 1999.
10.1115/1.3101928 / Appl. Mech. Rev. / Contact mechanics of rough surfaces in tribology: single asperity contact by Bhushan (1996)
J.W. Edington, Practical Electron Microscopy in Materials Sciences, TechBooks, Herndon, VA, 1976.
D. Hull, Introduction to Dislocations, 2nd edn., Pergamon, New York, 1975.
10.1016/0301-679X(88)90128-4 / Tribology Int. / An experimental and theoretical investigation of ploughing, cutting and wedge formation during abrasive wear by Hokkirigawa (1988)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 9:25 p.m.)
Deposited	5 years, 7 months ago (Feb. 4, 2020, 5:13 p.m.)
Indexed	1 year, 1 month ago (Aug. 5, 2024, 10:42 a.m.)
Issued	26 years, 9 months ago (Dec. 1, 1998)
Published	26 years, 9 months ago (Dec. 1, 1998)
Published Print	26 years, 9 months ago (Dec. 1, 1998)

Funders 0

None

BibTeX

@article{Zhao_1998, title={Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads}, volume={223}, ISSN={0043-1648}, url={http://dx.doi.org/10.1016/s0043-1648(98)00302-0}, DOI={10.1016/s0043-1648(98)00302-0}, number={1–2}, journal={Wear}, publisher={Elsevier BV}, author={Zhao, Xingzhong and Bhushan, Bharat}, year={1998}, month=dec, pages={66–78} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        8,
        5
      ]
    ],
    "date-time": "2024-08-05T14:42:23Z",
    "timestamp": 1722868943621
  },
  "reference-count": 26,
  "publisher": "Elsevier BV",
  "issue": "1-2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1998,
            12,
            1
          ]
        ],
        "date-time": "1998-12-01T00:00:00Z",
        "timestamp": 912470400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        12
      ]
    ]
  },
  "DOI": "10.1016/s0043-1648(98)00302-0",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        26
      ]
    ],
    "date-time": "2002-07-26T01:25:11Z",
    "timestamp": 1027646711000
  },
  "page": "66-78",
  "source": "Crossref",
  "is-referenced-by-count": 91,
  "title": "Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads",
  "prefix": "10.1016",
  "volume": "223",
  "author": [
    {
      "given": "Xingzhong",
      "family": "Zhao",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Bharat",
      "family": "Bhushan",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB1",
      "unstructured": "R.C. Jaeger, Introduction to Microelectronic Fabrication, Vol. 15, Addison-Wesley, Reading, MA, 1988."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB2",
      "unstructured": "J.W. Gardner, Microsensors: Principles and Applications, Wiley, New York, 1994."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB3",
      "unstructured": "S.M. Sze, Semiconductor Sensors, Wiley, New York, 1994."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB4",
      "unstructured": "I. Fujimasa, Micromechanics: A New Era in Mechanical Engineering, Oxford Univ. Press, Oxford, UK, 1996."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB5",
      "unstructured": "M. Madou, Fundamentals of Microfrabrication, CRC Press, Boca Raton, FL, 1997."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB6",
      "doi-asserted-by": "crossref",
      "unstructured": "B. Bhushan, Tribology Issues and Opportunities in MEMS, Kluwer Academic, Dordrecht, Netherlands, 1998.",
      "DOI": "10.1007/978-94-011-5050-7"
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB7",
      "first-page": "211",
      "article-title": "Mechanical and tribological properties of silicon for mechanical applications: a review",
      "volume": "5",
      "author": "Bhushan",
      "year": "1993",
      "journal-title": "Adv. Info. Storage Syst."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB8",
      "doi-asserted-by": "crossref",
      "unstructured": "B. Bhushan, Micro/nanotribology and micro/nanomechanics of MEMS devices, in: B. Bhushan (Ed.), Handbook of Micro/Nanotribology, CRC Press, Boca Raton, FL, 1999.",
      "DOI": "10.1201/9781420050493.ch16"
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "1569",
      "DOI": "10.1007/BF00540753",
      "article-title": "Deformation of silicon at low temperatures",
      "volume": "9",
      "author": "Hill",
      "year": "1974",
      "journal-title": "J. Mater. Sci."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "617",
      "DOI": "10.1111/j.1151-2916.1988.tb06378.x",
      "article-title": "Contact damage in single-crystal silicon investigated by cross-sectional transmission electron microscopy",
      "volume": "71",
      "author": "Johansson",
      "year": "1988",
      "journal-title": "J. Am. Ceram. Soc."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "2907",
      "DOI": "10.1557/JMR.1994.2907",
      "article-title": "Origins of microplasticity in low load scratching of silicon",
      "volume": "9",
      "author": "Morris",
      "year": "1994",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "4084",
      "DOI": "10.1007/BF00552402",
      "article-title": "Surface damage of single-crystal silicon abraded in ethanol and deionized water",
      "volume": "20",
      "author": "Lim",
      "year": "1985",
      "journal-title": "J. Mater. Sci."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "91",
      "DOI": "10.1080/01418619408242212",
      "article-title": "Transmission electron microscopy of nanomachined silicon crystals",
      "volume": "69",
      "author": "Puttick",
      "year": "1994",
      "journal-title": "Philos. Mag. A"
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "859",
      "DOI": "10.1080/14786436308213842",
      "article-title": "Surface damage of abraded silicon specimens",
      "volume": "8",
      "author": "Stickler",
      "year": "1963",
      "journal-title": "Philos. Mag."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "183",
      "DOI": "10.1016/0043-1648(92)90213-R",
      "article-title": "Examination of silicon wear debris generated in a linear scratch test",
      "volume": "152",
      "author": "Scott",
      "year": "1992",
      "journal-title": "Wear"
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "3895",
      "DOI": "10.1007/BF00353197",
      "article-title": "Plastic deformation of silicon during contact sliding at ambient temperature",
      "volume": "28",
      "author": "Kim",
      "year": "1993",
      "journal-title": "J. Mater. Sci."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "54",
      "DOI": "10.1557/JMR.1997.0010",
      "article-title": "Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems",
      "volume": "12",
      "author": "Bhushan",
      "year": "1997",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "1073",
      "DOI": "10.1080/01418619608239708",
      "article-title": "Ultra-microindentation of silicon at elevated temperatures",
      "volume": "74",
      "author": "Suzuki",
      "year": "1996",
      "journal-title": "Philos. Mag. A"
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "621",
      "DOI": "10.1080/10402009608983575",
      "article-title": "Microwear mechanisms of silicon sliding against diamond in water vapor",
      "volume": "39",
      "author": "Xu",
      "year": "1996",
      "journal-title": "Tribol. Trans."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "3219",
      "DOI": "10.1557/JMR.1997.0421",
      "article-title": "Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy",
      "volume": "12",
      "author": "Koinkar",
      "year": "1997",
      "journal-title": "J. Mater. Res."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB21",
      "doi-asserted-by": "crossref",
      "first-page": "3793",
      "DOI": "10.1016/S1359-6454(98)00062-7",
      "article-title": "Micro/nanoscale friction and wear mechanisms of thin films using atomic force and friction force microscopy",
      "volume": "46",
      "author": "Bhushan",
      "year": "1998",
      "journal-title": "Acta Materilia"
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB22",
      "unstructured": "B. Bhushan, Handbook of Micro/Nanotribology, 2nd edn., CRC Press, Boca Raton, FL, 1999."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "275",
      "DOI": "10.1115/1.3101928",
      "article-title": "Contact mechanics of rough surfaces in tribology: single asperity contact",
      "volume": "49",
      "author": "Bhushan",
      "year": "1996",
      "journal-title": "Appl. Mech. Rev."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB24",
      "unstructured": "J.W. Edington, Practical Electron Microscopy in Materials Sciences, TechBooks, Herndon, VA, 1976."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB25",
      "unstructured": "D. Hull, Introduction to Dislocations, 2nd edn., Pergamon, New York, 1975."
    },
    {
      "key": "10.1016/S0043-1648(98)00302-0_BIB26",
      "doi-asserted-by": "crossref",
      "first-page": "51",
      "DOI": "10.1016/0301-679X(88)90128-4",
      "article-title": "An experimental and theoretical investigation of ploughing, cutting and wedge formation during abrasive wear",
      "volume": "21",
      "author": "Hokkirigawa",
      "year": "1988",
      "journal-title": "Tribology Int."
    }
  ],
  "container-title": "Wear",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0043164898003020?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0043164898003020?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        2,
        4
      ]
    ],
    "date-time": "2020-02-04T22:13:19Z",
    "timestamp": 1580854399000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0043164898003020"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        12
      ]
    ]
  },
  "references-count": 26,
  "journal-issue": {
    "issue": "1-2",
    "published-print": {
      "date-parts": [
        [
          1998,
          12
        ]
      ]
    }
  },
  "alternative-id": [
    "S0043164898003020"
  ],
  "URL": "http://dx.doi.org/10.1016/S0043-1648(98)00302-0",
  "relation": {},
  "ISSN": [
    "0043-1648"
  ],
  "subject": [],
  "container-title-short": "Wear",
  "published": {
    "date-parts": [
      [
        1998,
        12
      ]
    ]
  }
}