DOI: 10.1016/s0040-6090(99)00022-x. ZrO 2 film growth by chemical vapor deposition using zirconium tetra- tert- butoxide

ZrO 2 film growth by chemical vapor deposition using zirconium tetra- tert- butoxide

10.1016/s0040-6090(99)00022-x

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Cameron, M. A., & George, S. M. (1999). ZrO 2 film growth by chemical vapor deposition using zirconium tetra- tert- butoxide. Thin Solid Films, 348(1â2), 90â98.

Authors 2

M.A. Cameron (first)
S.M. George (additional)

References 31 Referenced 121

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L.A. Okada, S.M. George, Appl. Surf. Sci. (1999) in press.
10.1116/1.578775 / J. Vac. Sci. Technol. A by Khawaja (1993)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 12:19 p.m.)
Deposited	6 years, 4 months ago (April 26, 2019, 1:23 a.m.)
Indexed	1 month ago (July 20, 2025, 12:12 a.m.)
Issued	26 years, 1 month ago (July 1, 1999)
Published	26 years, 1 month ago (July 1, 1999)
Published Print	26 years, 1 month ago (July 1, 1999)

Funders 0

None

BibTeX

@article{Cameron_1999, title={ZrO 2 film growth by chemical vapor deposition using zirconium tetra- tert- butoxide}, volume={348}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/s0040-6090(99)00022-x}, DOI={10.1016/s0040-6090(99)00022-x}, number={1–2}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Cameron, M.A. and George, S.M.}, year={1999}, month=jul, pages={90–98} }

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