DOI: 10.1016/s0040-6090(97)01095-x. TEM observation of structural differences between two types of Ni silicide/Si thin films caused by FIB irradiation

TEM observation of structural differences between two types of Ni silicide/Si thin films caused by FIB irradiation

10.1016/s0040-6090(97)01095-x

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Tanaka, M., Furuya, K., & Saito, T. (1998). TEM observation of structural differences between two types of Ni silicide/Si thin films caused by FIB irradiation. Thin Solid Films, 319(1â2), 101â105.

Authors 3

Miyoko Tanaka (first)
Kazuo Furuya (additional)
Tetsuya Saito (additional)

References 15 Referenced 4

10.1063/1.98313 / Appl. Phys. Lett. by Kubena (1987)
10.1116/1.584880 / J. Vac. Sci. Technol. B by Pellerin (1990)
10.1116/1.586999 / J. Vac. Sci. Technol. B by Prewett (1935)
10.1093/oxfordjournals.jmicro.a023445 / J. Electron Microsc. by Furuya (1996)
10.1063/1.362941 / J. Appl. Phys. by Furuya (1996)
10.1016/0039-6028(89)90006-X / Surf. Sci. by Gibson (1989)
10.1016/S0168-583X(96)00859-2 / Nucl. Inst. Met. B. by Tanaka (1997)
10.1557/PROC-438-313 / Mat. Res. Soc. Symp. Proc. by Tanaka (1997)
10.1063/1.116112 / Appl. Phys. Lett. by Tanaka (1996)
10.1016/0036-9748(77)90074-6 / Scripta Met. by Barbu (1977)
10.1016/0022-3115(79)90587-7 / J. Nucl. Mater. by Okamoto (1979)
10.1016/0022-3115(79)90345-3 / J. Nucl. Mater. by Janghorban (1979)
10.1063/1.1655546 / Appl. Phys. Lett. by Chu (1975)
10.1063/1.332034 / J. Appl. Phys. by Tu (1983)
10.1063/1.90716 / Appl. Phys. Lett. by Tsaur (1979)

Dates

Type	When
Created	23 years ago (July 25, 2002, 4:51 p.m.)
Deposited	6 years, 4 months ago (April 16, 2019, 3:54 a.m.)
Indexed	1 year, 9 months ago (Nov. 18, 2023, 5:53 a.m.)
Issued	27 years, 4 months ago (April 1, 1998)
Published	27 years, 4 months ago (April 1, 1998)
Published Print	27 years, 4 months ago (April 1, 1998)

Funders 0

None

BibTeX

@article{Tanaka_1998, title={TEM observation of structural differences between two types of Ni silicide/Si thin films caused by FIB irradiation}, volume={319}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/s0040-6090(97)01095-x}, DOI={10.1016/s0040-6090(97)01095-x}, number={1–2}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Tanaka, Miyoko and Furuya, Kazuo and Saito, Tetsuya}, year={1998}, month=apr, pages={101–105} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2023,
        11,
        18
      ]
    ],
    "date-time": "2023-11-18T10:53:50Z",
    "timestamp": 1700304830009
  },
  "reference-count": 15,
  "publisher": "Elsevier BV",
  "issue": "1-2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1998,
            4,
            1
          ]
        ],
        "date-time": "1998-04-01T00:00:00Z",
        "timestamp": 891388800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1998,
        4
      ]
    ]
  },
  "DOI": "10.1016/s0040-6090(97)01095-x",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T20:51:11Z",
    "timestamp": 1027630271000
  },
  "page": "101-105",
  "source": "Crossref",
  "is-referenced-by-count": 4,
  "title": "TEM observation of structural differences between two types of Ni silicide/Si thin films caused by FIB irradiation",
  "prefix": "10.1016",
  "volume": "319",
  "author": [
    {
      "given": "Miyoko",
      "family": "Tanaka",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Kazuo",
      "family": "Furuya",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Tetsuya",
      "family": "Saito",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "1960",
      "DOI": "10.1063/1.98313",
      "volume": "51",
      "author": "Kubena",
      "year": "1987",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "1945",
      "DOI": "10.1116/1.584880",
      "volume": "8",
      "author": "Pellerin",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "2427",
      "DOI": "10.1116/1.586999",
      "volume": "11",
      "author": "Prewett",
      "year": "1935",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "291",
      "DOI": "10.1093/oxfordjournals.jmicro.a023445",
      "volume": "45",
      "author": "Furuya",
      "year": "1996",
      "journal-title": "J. Electron Microsc."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "1922",
      "DOI": "10.1063/1.362941",
      "volume": "80",
      "author": "Furuya",
      "year": "1996",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "317",
      "DOI": "10.1016/0039-6028(89)90006-X",
      "volume": "208",
      "author": "Gibson",
      "year": "1989",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "98",
      "DOI": "10.1016/S0168-583X(96)00859-2",
      "volume": "127\u2013128",
      "author": "Tanaka",
      "year": "1997",
      "journal-title": "Nucl. Inst. Met. B."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "313",
      "DOI": "10.1557/PROC-438-313",
      "volume": "438",
      "author": "Tanaka",
      "year": "1997",
      "journal-title": "Mat. Res. Soc. Symp. Proc."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "961",
      "DOI": "10.1063/1.116112",
      "volume": "68",
      "author": "Tanaka",
      "year": "1996",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "771",
      "DOI": "10.1016/0036-9748(77)90074-6",
      "volume": "11",
      "author": "Barbu",
      "year": "1977",
      "journal-title": "Scripta Met."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "2",
      "DOI": "10.1016/0022-3115(79)90587-7",
      "volume": "83",
      "author": "Okamoto",
      "year": "1979",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "719",
      "DOI": "10.1016/0022-3115(79)90345-3",
      "volume": "85\u201386",
      "author": "Janghorban",
      "year": "1979",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "454",
      "DOI": "10.1063/1.1655546",
      "volume": "25",
      "author": "Chu",
      "year": "1975",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "758",
      "DOI": "10.1063/1.332034",
      "volume": "54",
      "author": "Tu",
      "year": "1983",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0040-6090(97)01095-X_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "168",
      "DOI": "10.1063/1.90716",
      "volume": "34",
      "author": "Tsaur",
      "year": "1979",
      "journal-title": "Appl. Phys. Lett."
    }
  ],
  "container-title": "Thin Solid Films",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S004060909701095X?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S004060909701095X?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        16
      ]
    ],
    "date-time": "2019-04-16T07:54:12Z",
    "timestamp": 1555401252000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S004060909701095X"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1998,
        4
      ]
    ]
  },
  "references-count": 15,
  "journal-issue": {
    "issue": "1-2",
    "published-print": {
      "date-parts": [
        [
          1998,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "S004060909701095X"
  ],
  "URL": "http://dx.doi.org/10.1016/S0040-6090(97)01095-X",
  "relation": {},
  "ISSN": [
    "0040-6090"
  ],
  "subject": [],
  "container-title-short": "Thin Solid Films",
  "published": {
    "date-parts": [
      [
        1998,
        4
      ]
    ]
  }
}