DOI: 10.1016/s0040-6090(97)00135-1. Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

10.1016/s0040-6090(97)00135-1

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Aarik, J., Aidla, A., Kiisler, A.-A., Uustare, T., & Sammelselg, V. (1997). Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition. Thin Solid Films, 305(1â2), 270â273.

Authors 5

Jaan Aarik (first)
Aleks Aidla (additional)
Alma-Asta Kiisler (additional)
Teet Uustare (additional)
Väino Sammelselg (additional)

References 16 Referenced 251

{'key': '10.1016/S0040-6090(97)00135-1_bib1', 'first-page': '155', 'volume': '195', 'author': 'Aleskovskii', 'year': '1990', 'journal-title': 'Acta Polytechn. Scand. Chem. Techn. Ser.'} / Acta Polytechn. Scand. Chem. Techn. Ser. by Aleskovskii (1990)
10.1002/bbpc.19920960416 / Ber. Bunsenges. Phys. Chem. by Döring (1992)
10.1016/0169-4332(92)90506-S / Appl. Surf. Sci. by Lakomaa (1992)
10.1021/j100121a040 / J. Phys. Chem. by Haukka (1993)
10.1016/0040-6090(93)90172-L / Thin Solid Films by Ritala (1993)
10.1021/cm00032a023 / Chem. Mater. by Ritala (1993)
10.1016/0022-0248(94)00874-4 / J. Cryst. Growth by Aarik (1995)
10.1016/0040-6090(95)06555-5 / Thin Solid Films by Kumagai (1995)
10.1016/0040-6090(93)90557-6 / Thin Solid Films by Ritala (1993)
10.1016/0040-6090(94)90754-4 / Thin Solid Films by Ritala (1994)
10.1103/PhysRev.137.A1467 / Phys. Rev. by Cardona (1965)
{'key': '10.1016/S0040-6090(97)00135-1_bib12', 'first-page': '269', 'volume': '15', 'author': 'Valeev', 'year': '1963', 'journal-title': 'Opt. Spectrosc. (USSR)'} / Opt. Spectrosc. (USSR) by Valeev (1963)
10.1063/1.356306 / J. Appl. Phys. by Tang (1994)
10.1016/0169-4332(93)90663-V / Appl. Surf. Sci. by Radecka (1993)
10.1016/0039-6028(91)90882-S / Surf. Sci. by Halley (1991)
10.1016/S0040-6090(96)08848-7 / Thin Solid Films by Ottermann (1996)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 9:38 a.m.)
Deposited	6 years, 4 months ago (April 29, 2019, 2:30 a.m.)
Indexed	4 days, 7 hours ago (Aug. 29, 2025, 6:02 a.m.)
Issued	28 years, 1 month ago (Aug. 1, 1997)
Published	28 years, 1 month ago (Aug. 1, 1997)
Published Print	28 years, 1 month ago (Aug. 1, 1997)

Funders 0

None

BibTeX

@article{Aarik_1997, title={Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition}, volume={305}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/s0040-6090(97)00135-1}, DOI={10.1016/s0040-6090(97)00135-1}, number={1–2}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Aarik, Jaan and Aidla, Aleks and Kiisler, Alma-Asta and Uustare, Teet and Sammelselg, Väino}, year={1997}, month=aug, pages={270–273} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        29
      ]
    ],
    "date-time": "2025-08-29T10:02:56Z",
    "timestamp": 1756461776016
  },
  "reference-count": 16,
  "publisher": "Elsevier BV",
  "issue": "1-2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1997,
            8,
            1
          ]
        ],
        "date-time": "1997-08-01T00:00:00Z",
        "timestamp": 870393600000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1997,
        8
      ]
    ]
  },
  "DOI": "10.1016/s0040-6090(97)00135-1",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T13:38:34Z",
    "timestamp": 1027604314000
  },
  "page": "270-273",
  "source": "Crossref",
  "is-referenced-by-count": 251,
  "title": "Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition",
  "prefix": "10.1016",
  "volume": "305",
  "author": [
    {
      "given": "Jaan",
      "family": "Aarik",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Aleks",
      "family": "Aidla",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Alma-Asta",
      "family": "Kiisler",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Teet",
      "family": "Uustare",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "V\u00e4ino",
      "family": "Sammelselg",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib1",
      "first-page": "155",
      "volume": "195",
      "author": "Aleskovskii",
      "year": "1990",
      "journal-title": "Acta Polytechn. Scand. Chem. Techn. Ser."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib2",
      "doi-asserted-by": "crossref",
      "first-page": "620",
      "DOI": "10.1002/bbpc.19920960416",
      "volume": "96",
      "author": "D\u00f6ring",
      "year": "1992",
      "journal-title": "Ber. Bunsenges. Phys. Chem."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "742",
      "DOI": "10.1016/0169-4332(92)90506-S",
      "volume": "60/61",
      "author": "Lakomaa",
      "year": "1992",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "5085",
      "DOI": "10.1021/j100121a040",
      "volume": "97",
      "author": "Haukka",
      "year": "1993",
      "journal-title": "J. Phys. Chem."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "288",
      "DOI": "10.1016/0040-6090(93)90172-L",
      "volume": "225",
      "author": "Ritala",
      "year": "1993",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "1174",
      "DOI": "10.1021/cm00032a023",
      "volume": "5",
      "author": "Ritala",
      "year": "1993",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "268",
      "DOI": "10.1016/0022-0248(94)00874-4",
      "volume": "148",
      "author": "Aarik",
      "year": "1995",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib8",
      "doi-asserted-by": "crossref",
      "first-page": "47",
      "DOI": "10.1016/0040-6090(95)06555-5",
      "volume": "263",
      "author": "Kumagai",
      "year": "1995",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib9",
      "doi-asserted-by": "crossref",
      "first-page": "32",
      "DOI": "10.1016/0040-6090(93)90557-6",
      "volume": "228",
      "author": "Ritala",
      "year": "1993",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib10",
      "doi-asserted-by": "crossref",
      "first-page": "155",
      "DOI": "10.1016/0040-6090(94)90754-4",
      "volume": "249",
      "author": "Ritala",
      "year": "1994",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "1467",
      "DOI": "10.1103/PhysRev.137.A1467",
      "volume": "137",
      "author": "Cardona",
      "year": "1965",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib12",
      "first-page": "269",
      "volume": "15",
      "author": "Valeev",
      "year": "1963",
      "journal-title": "Opt. Spectrosc. (USSR)"
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "2042",
      "DOI": "10.1063/1.356306",
      "volume": "75",
      "author": "Tang",
      "year": "1994",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "227",
      "DOI": "10.1016/0169-4332(93)90663-V",
      "volume": "65/66",
      "author": "Radecka",
      "year": "1993",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib15",
      "doi-asserted-by": "crossref",
      "first-page": "397",
      "DOI": "10.1016/0039-6028(91)90882-S",
      "volume": "256",
      "author": "Halley",
      "year": "1991",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/S0040-6090(97)00135-1_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "32",
      "DOI": "10.1016/S0040-6090(96)08848-7",
      "volume": "286",
      "author": "Ottermann",
      "year": "1996",
      "journal-title": "Thin Solid Films"
    }
  ],
  "container-title": "Thin Solid Films",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0040609097001351?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0040609097001351?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        29
      ]
    ],
    "date-time": "2019-04-29T06:30:28Z",
    "timestamp": 1556519428000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0040609097001351"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1997,
        8
      ]
    ]
  },
  "references-count": 16,
  "journal-issue": {
    "issue": "1-2",
    "published-print": {
      "date-parts": [
        [
          1997,
          8
        ]
      ]
    }
  },
  "alternative-id": [
    "S0040609097001351"
  ],
  "URL": "http://dx.doi.org/10.1016/S0040-6090(97)00135-1",
  "relation": {},
  "ISSN": [
    "0040-6090"
  ],
  "subject": [],
  "container-title-short": "Thin Solid Films",
  "published": {
    "date-parts": [
      [
        1997,
        8
      ]
    ]
  }
}