DOI: 10.1016/s0040-6090(96)09076-1. In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures

In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures

10.1016/s0040-6090(96)09076-1

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Greek, S., Ericson, F., Johansson, S., & Schweitz, J.-Ã. (1997). In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures. Thin Solid Films, 292(1â2), 247â254.

Authors 4

Staffan Greek (first)
Fredric Ericson (additional)
Stefan Johansson (additional)
Jan-Åke Schweitz (additional)

References 15 Referenced 85

10.1557/S0883769400041646 / Mater. Res. Soc. Bull. by Schweitz (1992)
{'key': '10.1016/S0040-6090(96)09076-1_bib2', 'first-page': '72', 'volume': 'Vol. 2', 'author': 'Biebl', 'year': '1995'} by Biebl (1995)
{'key': '10.1016/S0040-6090(96)09076-1_bib3', 'first-page': '96', 'volume': 'Vol. 2', 'author': 'Cunningham', 'year': '1995'} by Cunningham (1995)
10.1163/156855194X00231 / Adv. Compos. Mater. by Fukuda (1994)
{'key': '10.1016/S0040-6090(96)09076-1_bib5', 'first-page': '115', 'volume': '338', 'author': 'Scafidi', 'year': '1994'} by Scafidi (1994)
{'key': '10.1016/S0040-6090(96)09076-1_bib6', 'series-title': 'Proc. istIARP Workshop onMicroroboticsand Systems', 'first-page': '72', 'author': 'Johansson', 'year': '1993'} / Proc. istIARP Workshop onMicroroboticsand Systems by Johansson (1993)
10.1115/1.4010337 / J. Appl. Mech. by Weibull (1951)
{'key': '10.1016/S0040-6090(96)09076-1_bib8', 'first-page': '1', 'volume': '151', 'author': 'Weibull', 'year': '1939'} by Weibull (1939)
10.1016/0040-6090(94)06449-0 / Thin Solid Films by Kirsten (1995)
{'key': '10.1016/S0040-6090(96)09076-1_bib10', 'first-page': '88', 'volume': 'Vol. 2', 'author': 'Benitez', 'year': '1995'} by Benitez (1995)
{'key': '10.1016/S0040-6090(96)09076-1_bib11', 'series-title': 'Digest Tech. Papers from the 7th Int. Conf. on Solid-state Sensors and Actuators', 'first-page': '198', 'author': 'Legtenberg', 'year': '1993'} / Digest Tech. Papers from the 7th Int. Conf. on Solid-state Sensors and Actuators by Legtenberg (1993)
{'key': '10.1016/S0040-6090(96)09076-1_bib12', 'series-title': 'Digest Tech. Papers from the 6th Int. Conf. on Solid-state Sensors and Actuators', 'first-page': '63', 'author': 'Takeshima', 'year': '1991'} / Digest Tech. Papers from the 6th Int. Conf. on Solid-state Sensors and Actuators by Takeshima (1991)
{'key': '10.1016/S0040-6090(96)09076-1_bib13', 'series-title': 'Proc. IEEE Solid-state Sensor and Actuator Workshop, Hilton Head Island, SC, 6–9 June', 'first-page': '59', 'author': 'Lober', 'year': '1988'} / Proc. IEEE Solid-state Sensor and Actuator Workshop, Hilton Head Island, SC, 6–9 June by Lober (1988)
{'key': '10.1016/S0040-6090(96)09076-1_bib14', 'first-page': '84', 'volume': 'Vol. 2', 'author': 'Ericson', 'year': '1995'} by Ericson (1995)
10.1063/1.346957 / J. Appl. Phys. by Ericson (1990)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 8:51 p.m.)
Deposited	4 years, 3 months ago (May 13, 2021, 2:42 p.m.)
Indexed	2 months ago (June 25, 2025, 3:46 p.m.)
Issued	28 years, 7 months ago (Jan. 1, 1997)
Published	28 years, 7 months ago (Jan. 1, 1997)
Published Print	28 years, 7 months ago (Jan. 1, 1997)

Funders 0

None

BibTeX

@article{Greek_1997, title={In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures}, volume={292}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/s0040-6090(96)09076-1}, DOI={10.1016/s0040-6090(96)09076-1}, number={1–2}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Greek, Staffan and Ericson, Fredric and Johansson, Stefan and Schweitz, Jan-Åke}, year={1997}, month=jan, pages={247–254} }

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