DOI: 10.1016/s0040-6090(96)08934-1. Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry

Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry

10.1016/s0040-6090(96)08934-1

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Ott, A. W., Klaus, J. W., Johnson, J. M., & George, S. M. (1997). Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry. Thin Solid Films, 292(1â2), 135â144.

Authors 4

A.W. Ott (first)
J.W. Klaus (additional)
J.M. Johnson (additional)
S.M. George (additional)

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Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 7:44 a.m.)
Deposited	6 years, 4 months ago (April 26, 2019, 1:25 p.m.)
Indexed	2 days, 18 hours ago (Sept. 4, 2025, 10:14 a.m.)
Issued	28 years, 8 months ago (Jan. 1, 1997)
Published	28 years, 8 months ago (Jan. 1, 1997)
Published Print	28 years, 8 months ago (Jan. 1, 1997)

Funders 0

None

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