DOI: 10.1016/s0040-6090(03)01096-4. Structure-hardness relations in sputtered Ti–Al–V

Structure-hardness relations in sputtered Ti–Al–V–N films

10.1016/s0040-6090(03)01096-4

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

PolÃ¡kovÃ¡, H., Musil, J., VlÄek, J., Allaart, J., & Mitterer, C. (2003). Structure-hardness relations in sputtered TiâAlâVâN films. Thin Solid Films, 444(1â2), 189â198.

Authors 5

H Poláková (first)
J Musil (additional)
J Vlček (additional)
J Allaart (additional)
C Mitterer (additional)

References 20 Referenced 55

10.1116/1.581977 / J. Vac. Sci. Technol. by Vepřek (1999)
10.1016/S0257-8972(99)00586-1 / Surf. Coat. Technol. by Musil (2000)
10.1016/S0257-8972(01)01139-2 / Surf. Coat. Technol. by Musil (2001)
10.1016/S0257-8972(01)01200-2 / Surf. Coat. Technol. by Musil (2001)
10.1016/S0257-8972(01)00989-6 / Surf. Coat. Technol. by Musil (2001)
10.1016/S0257-8972(01)01250-6 / Surf. Coat. Technol. by Regent (2001)
10.1016/S0257-8972(00)00560-0 / Surf. Coat. Technol. by Musil (2000)
10.1116/1.580055 / J. Vac. Sci. Technol. by Musil (1996)
{'year': '1987', 'series-title': 'Binary Alloy Phase Diagrams', 'author': 'Massalski', 'key': '10.1016/S0040-6090(03)01096-4_BIB9'} / Binary Alloy Phase Diagrams by Massalski (1987)
10.1016/S0257-8972(02)00819-8 / Surf. Coat. Technol. by Musil (2003)
10.1179/sur.1991.7.3.207 / Surf. Eng. by Leyland (1991)
10.1063/1.371273 / J. Appl. Phys. by Vlček (1999)
{'year': '1994', 'series-title': 'Principles of Plasma Discharges and Materials processing', 'author': 'Lieberman', 'key': '10.1016/S0040-6090(03)01096-4_BIB13'} / Principles of Plasma Discharges and Materials processing by Lieberman (1994)
J. Musil, H. Poláková, J. Šůna, J. Vlček, Effect of ion bombardment on properties of hard reactively sputtered films, Invited paper at the international Conference on Metallurgical Coatings and Thin Films (ICMCTF 2003) April 28–May 2, 2003, San Diego, California, USA, paper No. B7-1
10.1016/S0257-8972(98)00618-5 / Surf. Coat. Technol. by Vepřek (1998)
10.1016/S0257-8972(99)00451-X / Surf. Coat. Technol. by Niederhofer (1999)
10.4028/www.scientific.net/KEM.230-232.613 / Key Eng. Mater. / Hard nanocomposite coatings prepared by magnetron sputtering by Musil (2002)
10.1016/S0257-8972(01)01714-5 / Surf. Coat. Technol. by Musil (2002)
10.1557/PROC-383-447 / Mater. Res. Soc. Symp. Proc. by Tsui (1995)
10.1016/S0040-6090(02)00357-7 / Thin Solid Films by Musil (2002)

Dates

Type	When
Created	21 years, 10 months ago (Oct. 11, 2003, 12:49 a.m.)
Deposited	3 years, 2 months ago (June 24, 2022, 10:17 p.m.)
Indexed	1 month ago (Aug. 2, 2025, 12:13 a.m.)
Issued	21 years, 10 months ago (Nov. 1, 2003)
Published	21 years, 10 months ago (Nov. 1, 2003)
Published Print	21 years, 10 months ago (Nov. 1, 2003)

Funders 1

Ministerstvo Školství, Mládeže a Tělovýchovy 10.13039/501100001823
Region: Europe
gov (National government)
Labels4
1. The Ministry of Education, Youth and Sports
2. MŠMT
3. MŠMT
4. MEYS
Awards3
1. MSM 235200002
2. ME 529
3. 21p3

BibTeX

@article{Pol_kov__2003, title={Structure-hardness relations in sputtered Ti–Al–V–N films}, volume={444}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/s0040-6090(03)01096-4}, DOI={10.1016/s0040-6090(03)01096-4}, number={1–2}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Poláková, H and Musil, J and Vlček, J and Allaart, J and Mitterer, C}, year={2003}, month=nov, pages={189–198} }

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