DOI: 10.1016/s0038-1101(99)00031-3. Processing and characterisation of sol–gel deposited Ta2O5 and TiO2

Processing and characterisation of sol–gel deposited Ta2O5 and TiO2–Ta2O5 dielectric thin films

10.1016/s0038-1101(99)00031-3

Crossref journal-article

Elsevier BV

Solid-State Electronics (78)

Bibliography

Cappellani, A., Keddie, J. L., Barradas, N. P., & Jackson, S. M. (1999). Processing and characterisation of solâgel deposited Ta2O5 and TiO2âTa2O5 dielectric thin films. Solid-State Electronics, 43(6), 1095â1099.

Authors 4

A Cappellani (first)
J.L Keddie (additional)
N.P Barradas (additional)
S.M Jackson (additional)

References 16 Referenced 39

Kotecki DE. Semiconductor international, November 1996. p. 109.
10.1038/377194a0 / Nature by Streiffer (1995)
{'key': '10.1016/S0038-1101(99)00031-3_BIB3', 'volume': '111', 'author': 'Ohji', 'year': '1995', 'journal-title': 'IEDM'} / IEDM by Ohji (1995)
{'key': '10.1016/S0038-1101(99)00031-3_BIB4', 'volume': '12.4', 'author': 'Sun', 'year': '1994', 'journal-title': 'IEDM'} / IEDM by Sun (1994)
10.1038/377215a0 / Nature by Cava (1995)
{'key': '10.1016/S0038-1101(99)00031-3_BIB6', 'series-title': 'Sol–gel science', 'author': 'Brinker', 'year': '1990'} / Sol–gel science by Brinker (1990)
10.1364/AO.28.005215 / Appl Optics by Rehg (1989)
10.1111/j.1151-2916.1994.tb09761.x / J Am Ceram Soc by Keddie (1994)
{'key': '10.1016/S0038-1101(99)00031-3_BIB9', 'series-title': 'Simulated annealing and Boltzmann machines: a stochastic approach to combinatorial optimization and neural computing', 'author': 'Aarts', 'year': '1989'} / Simulated annealing and Boltzmann machines: a stochastic approach to combinatorial optimization and neural computing by Aarts (1989)
10.1063/1.119524 / Appl Phys Lett by Barradas (1997)
10.1016/S0168-583X(97)00808-2 / Nucl Instr Methods B by Barradas (1998)
10.1016/S0168-583X(97)00809-4 / Nucl Instr Methods B by Barradas (1998)
10.1016/S0168-583X(97)00686-1 / Nucl. Instr. Methods B by Barradas (1998)
10.1002/(SICI)1096-9918(199704)25:4<254::AID-SIA232>3.0.CO;2-F / Surf Interface Anal by Jeynes (1997)
10.1016/0040-6090(94)06322-2 / Thin Solid Films by Pignolet (1995)
10.1016/0022-3093(95)00219-7 / J Non-Cryst Solids by Burte (1995)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 11:39 a.m.)
Deposited	6 years, 4 months ago (April 26, 2019, 8:27 p.m.)
Indexed	3 months, 2 weeks ago (May 9, 2025, 9:44 a.m.)
Issued	26 years, 2 months ago (June 1, 1999)
Published	26 years, 2 months ago (June 1, 1999)
Published Print	26 years, 2 months ago (June 1, 1999)

Funders 0

None

BibTeX

@article{Cappellani_1999, title={Processing and characterisation of sol–gel deposited Ta2O5 and TiO2–Ta2O5 dielectric thin films}, volume={43}, ISSN={0038-1101}, url={http://dx.doi.org/10.1016/s0038-1101(99)00031-3}, DOI={10.1016/s0038-1101(99)00031-3}, number={6}, journal={Solid-State Electronics}, publisher={Elsevier BV}, author={Cappellani, A and Keddie, J.L and Barradas, N.P and Jackson, S.M}, year={1999}, month=jun, pages={1095–1099} }

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