DOI: 10.1016/s0026-2714(99)00127-4. A new AFM-based tool for testing dielectric quality and reliability on a nanometer scale

A new AFM-based tool for testing dielectric quality and reliability on a nanometer scale

10.1016/s0026-2714(99)00127-4

Crossref journal-article

Elsevier BV

Microelectronics Reliability (78)

Bibliography

Olbrich, A., Ebersberger, B., Boit, C., Vancea, J., & Hoffmarm, H. (1999). A new AFM-based tool for testing dielectric quality and reliability on a nanometer scale. Microelectronics Reliability, 39(6â7), 941â946.

Authors 5

Alexander Olbrich (first)
Bernd Ebersberger (additional)
Christian Boit (additional)
J. Vancea (additional)
H. Hoffmarm (additional)

References 11 Referenced 8

{'key': '10.1016/S0026-2714(99)00127-4_BIB1', 'series-title': 'Semiconductor Characterization — Present status and future needs', 'first-page': '123', 'author': 'Manchanda', 'year': '1996'} / Semiconductor Characterization — Present status and future needs by Manchanda (1996)
{'key': '10.1016/S0026-2714(99)00127-4_BIB2', 'article-title': 'Instabilities in silicon devies', 'author': 'Wolters', 'year': '1996'} / Instabilities in silicon devies by Wolters (1996)
10.1109/16.8802 / IEEE Trans. Electr. Dev. by Lee (1988)
Digital instruments, Vecco Metrology group, 112 Robin Hill Road, Santa Barbara, California 93103, USA, http://www.di.com
{'key': '10.1016/S0026-2714(99)00127-4_BIB5', 'series-title': 'IEEE Proc. Int. Rel. Phys. Symp. 36th An.', 'first-page': '163', 'author': 'Olbrich', 'year': '1998'} / IEEE Proc. Int. Rel. Phys. Symp. 36th An. by Olbrich (1998)
10.1063/1.122690 / Appl. Phys. Lett. by Olbrich (1998)
{'key': '10.1016/S0026-2714(99)00127-4_BIB7', 'series-title': 'Proc. Royal Soc. London, Ser A119', 'first-page': '173', 'author': 'Fowler', 'year': '1928'} / Proc. Royal Soc. London, Ser A119 by Fowler (1928)
{'key': '10.1016/S0026-2714(99)00127-4_BIB8', 'series-title': 'Handbuch der Physik', 'author': 'Good', 'year': '1956'} / Handbuch der Physik by Good (1956)
{'key': '10.1016/S0026-2714(99)00127-4_BIB9', 'author': 'Olbrich', 'year': '1999', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B by Olbrich (1999)
Micrion Corporation, http://www.micrion.com
{'key': '10.1016/S0026-2714(99)00127-4_BIB11', 'series-title': 'Proc. Int. Rel. Phys. Symp. 34th annual', 'first-page': '163', 'author': 'Ebersberger', 'year': '1999'} / Proc. Int. Rel. Phys. Symp. 34th annual by Ebersberger (1999)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 10:37 a.m.)
Deposited	6 years, 3 months ago (April 27, 2019, 11:56 p.m.)
Indexed	2 months ago (June 23, 2025, 4:26 a.m.)
Issued	26 years, 2 months ago (June 1, 1999)
Published	26 years, 2 months ago (June 1, 1999)
Published Print	26 years, 2 months ago (June 1, 1999)

Funders 0

None

BibTeX

@article{Olbrich_1999, title={A new AFM-based tool for testing dielectric quality and reliability on a nanometer scale}, volume={39}, ISSN={0026-2714}, url={http://dx.doi.org/10.1016/s0026-2714(99)00127-4}, DOI={10.1016/s0026-2714(99)00127-4}, number={6–7}, journal={Microelectronics Reliability}, publisher={Elsevier BV}, author={Olbrich, Alexander and Ebersberger, Bernd and Boit, Christian and Vancea, J. and Hoffmarm, H.}, year={1999}, month=jun, pages={941–946} }

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