DOI: 10.1016/s0022-3697(03)00105-7. Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation

Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation

10.1016/s0022-3697(03)00105-7

Crossref journal-article

Elsevier BV

Journal of Physics and Chemistry of Solids (78)

Bibliography

Bernay, C., RinguedÃ©, A., Colomban, P., Lincot, D., & Cassir, M. (2003). Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation. Journal of Physics and Chemistry of Solids, 64(9â10), 1761â1770.

Authors 5

Cécile Bernay (first)
Armelle Ringuedé (additional)
Philippe Colomban (additional)
Daniel Lincot (additional)
Michel Cassir (additional)

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Dates

Type	When
Created	22 years, 2 months ago (June 2, 2003, 4:12 p.m.)
Deposited	6 years, 5 months ago (March 20, 2019, 3:50 p.m.)
Indexed	3 weeks ago (Aug. 2, 2025, 12:10 a.m.)
Issued	21 years, 11 months ago (Sept. 1, 2003)
Published	21 years, 11 months ago (Sept. 1, 2003)
Published Print	21 years, 11 months ago (Sept. 1, 2003)

Funders 0

None

BibTeX

@article{Bernay_2003, title={Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation}, volume={64}, ISSN={0022-3697}, url={http://dx.doi.org/10.1016/s0022-3697(03)00105-7}, DOI={10.1016/s0022-3697(03)00105-7}, number={9–10}, journal={Journal of Physics and Chemistry of Solids}, publisher={Elsevier BV}, author={Bernay, Cécile and Ringuedé, Armelle and Colomban, Philippe and Lincot, Daniel and Cassir, Michel}, year={2003}, month=sep, pages={1761–1770} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        2
      ]
    ],
    "date-time": "2025-08-02T04:10:34Z",
    "timestamp": 1754107834883
  },
  "reference-count": 45,
  "publisher": "Elsevier BV",
  "issue": "9-10",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2003,
            9,
            1
          ]
        ],
        "date-time": "2003-09-01T00:00:00Z",
        "timestamp": 1062374400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2003,
        9
      ]
    ]
  },
  "DOI": "10.1016/s0022-3697(03)00105-7",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        6,
        2
      ]
    ],
    "date-time": "2003-06-02T20:12:50Z",
    "timestamp": 1054584770000
  },
  "page": "1761-1770",
  "source": "Crossref",
  "is-referenced-by-count": 54,
  "title": "Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation",
  "prefix": "10.1016",
  "volume": "64",
  "author": [
    {
      "given": "C\u00e9cile",
      "family": "Bernay",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Armelle",
      "family": "Ringued\u00e9",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Philippe",
      "family": "Colomban",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Daniel",
      "family": "Lincot",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Michel",
      "family": "Cassir",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB1",
      "series-title": "Proceedings of the Third European SOFC Forum",
      "first-page": "95",
      "author": "Bossel",
      "year": "1998"
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB2",
      "first-page": "155",
      "article-title": "Fuel cells",
      "author": "Hart",
      "year": "1998",
      "journal-title": "Financial Times Energy"
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "139",
      "DOI": "10.1016/S0378-7753(02)00029-0",
      "article-title": "Prospects of different fuel cell technologies for vehicle applications",
      "volume": "108",
      "author": "Bernay",
      "year": "2002",
      "journal-title": "J. Power Sources"
    },
    {
      "issue": "4",
      "key": "10.1016/S0022-3697(03)00105-7_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "49",
      "DOI": "10.1016/S0151-9107(01)80069-6",
      "article-title": "Reduction in the operating temperature of solid oxide fuel cells: potential use in transport applications",
      "volume": "26",
      "author": "Cassir",
      "year": "2001",
      "journal-title": "Ann. Chim. Sci. Mater."
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB5",
      "series-title": "High Conductivity Solid Ionic Conductors",
      "first-page": "402",
      "author": "Steele",
      "year": "1989"
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB6",
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    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "303",
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      "key": "10.1016/S0022-3697(03)00105-7_BIB9",
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      "doi-asserted-by": "crossref",
      "first-page": "273",
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      "first-page": "106",
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      "first-page": "79",
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      "doi-asserted-by": "crossref",
      "first-page": "3960",
      "DOI": "10.1149/1.2086337",
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      "DOI": "10.1111/j.1151-2916.1993.tb05337.x",
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      "key": "10.1016/S0022-3697(03)00105-7_BIB16",
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      "DOI": "10.1111/j.1151-2916.2001.tb00950.x",
      "article-title": "Electrical conductivity and lattice defects in nanocrystalline CeO2 thin films",
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      "key": "10.1016/S0022-3697(03)00105-7_BIB17",
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      "article-title": "Study of isostatic pressing YSZ membranes fabricated by tape casting",
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      "year": "1999"
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "443",
      "DOI": "10.1016/0167-2738(81)90129-6",
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      "journal-title": "Solid State Ionics"
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB19",
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      "author": "Suntola",
      "year": "1994"
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "23",
      "DOI": "10.1016/S0921-5107(96)01617-0",
      "article-title": "Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications",
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    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB21",
      "doi-asserted-by": "crossref",
      "first-page": "251",
      "DOI": "10.1016/S0169-4332(96)01000-8",
      "article-title": "ALE-reactor for large area depositions",
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      "year": "1997",
      "journal-title": "Appl. Surf. Sci."
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "333",
      "DOI": "10.1016/0169-4332(94)90180-5",
      "article-title": "Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor",
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    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "785",
      "DOI": "10.1016/S0965-9773(98)00003-8",
      "article-title": "Properties of (Nb1\u2212xTax)2O5 solid solutions and (Nb1\u2212xTax)2O5\u2013ZrO2 nanolaminates grown by atomic layer epitaxy",
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      "journal-title": "Nanostruct. Mater."
    },
    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "300",
      "DOI": "10.1149/1.1837399",
      "article-title": "Properties of Ta2O5-based dielectric nanolaminates deposited by atomic layer deposition",
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    {
      "key": "10.1016/S0022-3697(03)00105-7_BIB25",
      "doi-asserted-by": "crossref",
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      "DOI": "10.1002/1521-3862(200011)6:6<297::AID-CVDE297>3.0.CO;2-8",
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      "doi-asserted-by": "crossref",
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      "DOI": "10.1016/S0022-0248(01)01449-X",
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      "DOI": "10.1021/la961085d",
      "article-title": "Sequential saturating reactions of ZrCl4 and H2O vapors in the modification of silica and \u03b3-alumina with ZrO2",
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  ],
  "container-title": "Journal of Physics and Chemistry of Solids",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0022369703001057?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:S0022369703001057?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        3,
        20
      ]
    ],
    "date-time": "2019-03-20T19:50:49Z",
    "timestamp": 1553111449000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/S0022369703001057"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2003,
        9
      ]
    ]
  },
  "references-count": 45,
  "journal-issue": {
    "issue": "9-10",
    "published-print": {
      "date-parts": [
        [
          2003,
          9
        ]
      ]
    }
  },
  "alternative-id": [
    "S0022369703001057"
  ],
  "URL": "http://dx.doi.org/10.1016/S0022-3697(03)00105-7",
  "relation": {},
  "ISSN": [
    "0022-3697"
  ],
  "subject": [],
  "container-title-short": "Journal of Physics and Chemistry of Solids",
  "published": {
    "date-parts": [
      [
        2003,
        9
      ]
    ]
  }
}