DOI: 10.1016/s0013-4686(99)00067-5. Integrated electroless metallization for ULSI

Integrated electroless metallization for ULSI

10.1016/s0013-4686(99)00067-5

Crossref journal-article

Elsevier BV

Electrochimica Acta (78)

Bibliography

Shacham-Diamand, Y., & Lopatin, S. (1999). Integrated electroless metallization for ULSI. Electrochimica Acta, 44(21â22), 3639â3649.

Authors 2

Yosi Shacham-Diamand (first)
Sergey Lopatin (additional)

References 18 Referenced 93

{'key': '10.1016/S0013-4686(99)00067-5_BIB1', 'series-title': 'Proceedings of the Advanced Metallization Conference in 1998 Japan/Asia Session, University of Tokyo, 3–4 September, Tokyo, Japan', 'article-title': 'ULSI scaling: an interconnect technology', 'author': 'Kikkawa', 'year': '1998'} / Proceedings of the Advanced Metallization Conference in 1998 Japan/Asia Session, University of Tokyo, 3–4 September, Tokyo, Japan / ULSI scaling: an interconnect technology by Kikkawa (1998)
10.1016/0040-6090(95)05836-2 / Thin Solid Films by Shacham-Diamand (1995)
10.1016/S0167-9317(96)00030-5 / Journal of Microelectronics Engineering by Shacham-Diamand (1997)
10.1149/1.1837505 / The Journal of Electrochemical Society by Dubin (1997)
{'key': '10.1016/S0013-4686(99)00067-5_BIB5', 'series-title': 'Proceedings of the Fall MRS Meeting, Boston, 2–5 December', 'author': 'Lopatin', 'year': '1996'} / Proceedings of the Fall MRS Meeting, Boston, 2–5 December by Lopatin (1996)
{'key': '10.1016/S0013-4686(99)00067-5_BIB6', 'series-title': 'Proceedings of 191st Meeting of the Electrochemical Society, Inc., Montreal, Symposium F1, Canada', 'author': 'Lopatin', 'year': '1997'} / Proceedings of 191st Meeting of the Electrochemical Society, Inc., Montreal, Symposium F1, Canada by Lopatin (1997)
{'key': '10.1016/S0013-4686(99)00067-5_BIB7', 'series-title': 'Proceedings of VLSI Multilevel Interconnection Conference, Santa Clara, CA, May', 'author': 'Lopatin', 'year': '1997'} / Proceedings of VLSI Multilevel Interconnection Conference, Santa Clara, CA, May by Lopatin (1997)
10.1016/S0167-9317(97)00096-8 / Journal of Microelectronics Engineering by Shacham-Diamand (1997)
10.1149/1.1837750 / J. Electrochem. Soc. by Smy (1997)
10.1088/0960-1317/1/1/012 / J. Micromec. Microeng. by Shacham-Diamand (1991)
{'key': '10.1016/S0013-4686(99)00067-5_BIB11', 'first-page': '57', 'volume': 'vol. 3', 'author': 'Okinaka', 'year': '1994'} by Okinaka (1994)
10.1063/1.114750 / Applied Phys. Letters by Angyal (1995)
V. Dubin, Y. Shacham-Diamand, B. Zhao, P.K. Vasudev, C. Ting, US Patent 5695810 1997 (10.1002/chin.199726278)
10.1016/0040-6090(93)90211-7 / Thin Solid Films by Dubin (1993)
10.1149/1.2059246 / J. of Electrochemical Society by Krasteva (1994)
10.1016/S1044-5803(96)00089-7 / Materials Characterization by Bangqei (1996)
10.1149/1.2085925 / J. Electrochemical Society by Georgiou (1991)
{'key': '10.1016/S0013-4686(99)00067-5_BIB18', 'series-title': 'Proceedings of the Advanced Metallization Conference, San-Diego, October', 'author': 'Lopatin', 'year': '1997'} / Proceedings of the Advanced Metallization Conference, San-Diego, October by Lopatin (1997)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 10:55 a.m.)
Deposited	6 years, 4 months ago (April 27, 2019, 3:53 p.m.)
Indexed	11 months, 4 weeks ago (Aug. 30, 2024, 9:10 p.m.)
Issued	26 years, 2 months ago (June 1, 1999)
Published	26 years, 2 months ago (June 1, 1999)
Published Print	26 years, 2 months ago (June 1, 1999)

Funders 0

None

BibTeX

@article{Shacham_Diamand_1999, title={Integrated electroless metallization for ULSI}, volume={44}, ISSN={0013-4686}, url={http://dx.doi.org/10.1016/s0013-4686(99)00067-5}, DOI={10.1016/s0013-4686(99)00067-5}, number={21–22}, journal={Electrochimica Acta}, publisher={Elsevier BV}, author={Shacham-Diamand, Yosi and Lopatin, Sergey}, year={1999}, month=jun, pages={3639–3649} }

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