DOI: 10.1016/0924-4247(92)80085-h. A subminiature capacitive movement detector using a composite membrane suspension

A subminiature capacitive movement detector using a composite membrane suspension

10.1016/0924-4247(92)80085-h

Crossref journal-article

Elsevier BV

Sensors and Actuators A: Physical (78)

Bibliography

Puers, B., & Vergote, S. (1992). A subminiature capacitive movement detector using a composite membrane suspension. Sensors and Actuators A: Physical, 31(1â3), 90â96.

Authors 2

B. Puers (first)
S. Vergote (additional)

References 6 Referenced 15

{'key': '10.1016/0924-4247(92)80085-H_BIB1', 'first-page': '108', 'article-title': 'A capacitive pressure sensor with low impedance output and active suppression of parasitic effect', 'author': 'Puers', 'year': '25301989', 'journal-title': "Proc. 5th Int. Conf. Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland"} / Proc. 5th Int. Conf. Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland / A capacitive pressure sensor with low impedance output and active suppression of parasitic effect by Puers (25301989)
{'key': '10.1016/0924-4247(92)80085-H_BIB2', 'first-page': '97', 'article-title': 'A highly symmetrical capacitive micro-accelerometer with single degree-of-freedom response', 'author': 'Peeters', 'year': '24281991', 'journal-title': "Proc 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA"} / Proc 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA / A highly symmetrical capacitive micro-accelerometer with single degree-of-freedom response by Peeters (24281991)
10.1109/SOLSEN.1988.26452 / Tech. Digest, IEEE Conf. Solid State Sensors and Actuators, Hilton Head Island, SC, USA / A miniature silicon accelerometer with built-in damping by Terry (1988)
10.1116/1.583603 / J. Vac. Sci. Technol. B / A measurement of intrinsic SiO2 film stress resulting from low temperature thermal oxidation of Si by Kobeda (1986)
10.1016/0250-6874(89)87111-2 / Sensors and Actuators / Mechanical property measurements of thin films using load-deflection measurements of composite rectangular membranes by Tabata (1989)
10.1016/0924-4247(90)87085-W / Sensors and Actuators / Compensation structures for convex corner micromachining in silicon by Puers (1990)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 5:03 a.m.)
Deposited	6 years, 4 months ago (May 4, 2019, 10:59 a.m.)
Indexed	3 months, 2 weeks ago (May 18, 2025, 1:21 a.m.)
Issued	33 years, 6 months ago (March 1, 1992)
Published	33 years, 6 months ago (March 1, 1992)
Published Print	33 years, 6 months ago (March 1, 1992)

Funders 0

None

BibTeX

@article{Puers_1992, title={A subminiature capacitive movement detector using a composite membrane suspension}, volume={31}, ISSN={0924-4247}, url={http://dx.doi.org/10.1016/0924-4247(92)80085-h}, DOI={10.1016/0924-4247(92)80085-h}, number={1–3}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Puers, B. and Vergote, S.}, year={1992}, month=mar, pages={90–96} }

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