DOI: 10.1016/0924-4247(92)80050-d. Microactuators with moving magnets for linear, torsional or multiaxial motion

Microactuators with moving magnets for linear, torsional or multiaxial motion

10.1016/0924-4247(92)80050-d

Crossref journal-article

Elsevier BV

Sensors and Actuators A: Physical (78)

Bibliography

Wagner, B., Benecke, W., Engelmann, G., & Simon, J. (1992). Microactuators with moving magnets for linear, torsional or multiaxial motion. Sensors and Actuators A: Physical, 32(1â3), 598â603.

Authors 4

B. Wagner (first)
W. Benecke (additional)
G. Engelmann (additional)
J. Simon (additional)

References 13 Referenced 30

10.1016/0250-6874(89)87001-5 / Sensors and Actuators / A vibrating cantilever magnetic field sensor by Hetrick (1989)
{'key': '10.1016/0924-4247(92)80050-D_BIB2', 'first-page': '94', 'article-title': 'Tuning forks in silicon', 'author': 'Buser', 'year': '1989', 'journal-title': 'Proc. MEMS Workshop, Salt Lake City, UT, USA'} / Proc. MEMS Workshop, Salt Lake City, UT, USA / Tuning forks in silicon by Buser (1989)
10.1016/0924-4247(90)85028-3 / Sensors and Actuators / Silicon pressure sensor integrates resonant strain gauge on diaphragm by Ikeda (1990)
10.1016/0250-6874(89)80012-5 / Sensors and Actuators / An optically-addressed silicon strain sensor by Naden (1989)
10.1016/0924-4247(90)80047-9 / Sensors and Actuators A / The design and fabrication of a magnetically actuated micromachined flow valve by Smith (1990)
{'key': '10.1016/0924-4247(92)80050-D_BIB6', 'first-page': '27', 'article-title': 'Microfabricated actuator with moving permanent magnet', 'author': 'Wagner', 'year': '1991', 'journal-title': 'Proc. MEMS Workshop, Nara, Japan'} / Proc. MEMS Workshop, Nara, Japan / Microfabricated actuator with moving permanent magnet by Wagner (1991)
{'key': '10.1016/0924-4247(92)80050-D_BIB7', 'first-page': '120', 'article-title': 'Magnetic micro-actuator', 'author': 'Yanagisawa', 'year': '1991', 'journal-title': 'Proc. MEMS Workshop, Nara, Japan'} / Proc. MEMS Workshop, Nara, Japan / Magnetic micro-actuator by Yanagisawa (1991)
{'key': '10.1016/0924-4247(92)80050-D_BIB8', 'first-page': '614', 'article-title': 'Electromagnetic microactuators with multiple degrees of freedom', 'author': 'Wagner', 'year': '23271991', 'journal-title': "Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA"} / Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA / Electromagnetic microactuators with multiple degrees of freedom by Wagner (23271991)
{'key': '10.1016/0924-4247(92)80050-D_BIB9', 'first-page': '435', 'article-title': 'Development of a fine pitch bumping process', 'author': 'Engelmann', 'year': '1990'} / Development of a fine pitch bumping process by Engelmann (1990)
{'key': '10.1016/0924-4247(92)80050-D_BIB10', 'article-title': 'High depth to width aspect ratio in thick positive photoresist layers using near UV lithography', 'author': 'Engelmann', 'year': '1992', 'journal-title': 'Microcircuit Engineering 91, Rome, Italy, 1991; Microelectron. Eng.'} / Microcircuit Engineering 91, Rome, Italy, 1991; Microelectron. Eng. / High depth to width aspect ratio in thick positive photoresist layers using near UV lithography by Engelmann (1992)
{'key': '10.1016/0924-4247(92)80050-D_BIB11', 'first-page': '315', 'article-title': 'Plating of microstructures for sensors', 'author': 'Simon', 'year': '1991', 'journal-title': 'Microsystem Technologies 91, Berlin, FRG, 1991, VDE Verlag'} / Microsystem Technologies 91, Berlin, FRG, 1991, VDE Verlag / Plating of microstructures for sensors by Simon (1991)
10.1016/0167-9317(89)90048-8 / Microelectron. Eng. / Multi electron beam lithography: fabrication of a control unit by Schnakenberg (1989)
ANSYS Program, Swanson Analysis Systems Inc., Houston, PA, USA.

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 5:03 a.m.)
Deposited	6 years, 4 months ago (May 4, 2019, 11:20 a.m.)
Indexed	2 months ago (July 4, 2025, 7:25 a.m.)
Issued	33 years, 5 months ago (April 1, 1992)
Published	33 years, 5 months ago (April 1, 1992)
Published Print	33 years, 5 months ago (April 1, 1992)

Funders 0

None

BibTeX

@article{Wagner_1992, title={Microactuators with moving magnets for linear, torsional or multiaxial motion}, volume={32}, ISSN={0924-4247}, url={http://dx.doi.org/10.1016/0924-4247(92)80050-d}, DOI={10.1016/0924-4247(92)80050-d}, number={1–3}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Wagner, B. and Benecke, W. and Engelmann, G. and Simon, J.}, year={1992}, month=apr, pages={598–603} }

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