DOI: 10.1016/0924-4247(90)85021-u. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects

A capacitive pressure sensor with low impedance output and active suppression of parasitic effects

10.1016/0924-4247(90)85021-u

Crossref journal-article

Elsevier BV

Sensors and Actuators A: Physical (78)

Bibliography

Puers, B., Peeters, E., Van Den Bossche, A., & Sansen, W. (1990). A capacitive pressure sensor with low impedance output and active suppression of parasitic effects. Sensors and Actuators A: Physical, 21(1â3), 108â114.

Authors 4

B. Puers (first)
E. Peeters (additional)
A. Van Den Bossche (additional)
W. Sansen (additional)

References 11 Referenced 85

10.1109/TBME.1986.325849 / IEEE Trans. Biomed. Eng. / Analysis, design and performance of a capacitive pressure sensor IC by Smith (1986)
10.1109/T-ED.1979.19792 / IEEE Trans. Electron Devices / Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors by Clark (1979)
10.1109/T-ED.1982.20656 / IEEE Trans. Electron Devices / A batch-fabricated silicon capacitive pressure sensor with low temperature sensitivity by Lee (1982)
{'key': '10.1016/0924-4247(90)85021-U_BIB4', 'first-page': '406', 'article-title': 'Design and realisation of an ultra-miniature hybrid for a pressure telemetry capsule', 'author': 'Sansen', 'year': '1984', 'journal-title': 'Proc. Int. Microelectronics Conf., Tokyo, Japan'} / Proc. Int. Microelectronics Conf., Tokyo, Japan / Design and realisation of an ultra-miniature hybrid for a pressure telemetry capsule by Sansen (1984)
10.1109/PROC.1982.12331 / Proc. IEEE / Silicon as a mechanical material by Petersen (1982)
10.1016/0250-6874(89)80029-0 / Sensors and Actuators / CAD tools in mechanical sensor design by Puers (1989)
10.1063/1.1657121 / J. Appl. Phys. / Field assisted glass-metal sealing by Wallis (1969)
{'article-title': 'Capacitive mechanical sensors in silicon', 'year': '1987', 'author': 'Peeters', 'key': '10.1016/0924-4247(90)85021-U_BIB8'} / Capacitive mechanical sensors in silicon by Peeters (1987)
10.1016/0250-6874(83)85024-0 / Sensors and Actuators / A micromechanical capacitive accelerometer with a two-point inertial mass suspension by Rudolf (1983)
10.1109/PROC.1983.12700 / Proc. IEEE / Switched capacitor circuit design by Gregorian (1983)
10.1016/0250-6874(86)80066-X / Sensors and Actuators / An integrated capacitive pressure sensor with frequency-modulated output by Hanneborg (1986)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 5:05 a.m.)
Deposited	6 years, 4 months ago (May 4, 2019, 10:54 a.m.)
Indexed	1 month, 1 week ago (July 25, 2025, 6:18 a.m.)
Issued	35 years, 7 months ago (Feb. 1, 1990)
Published	35 years, 7 months ago (Feb. 1, 1990)
Published Print	35 years, 7 months ago (Feb. 1, 1990)

Funders 0

None

BibTeX

@article{Puers_1990, title={A capacitive pressure sensor with low impedance output and active suppression of parasitic effects}, volume={21}, ISSN={0924-4247}, url={http://dx.doi.org/10.1016/0924-4247(90)85021-u}, DOI={10.1016/0924-4247(90)85021-u}, number={1–3}, journal={Sensors and Actuators A: Physical}, publisher={Elsevier BV}, author={Puers, B. and Peeters, E. and Van Den Bossche, A. and Sansen, W.}, year={1990}, month=feb, pages={108–114} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        25
      ]
    ],
    "date-time": "2025-07-25T10:18:51Z",
    "timestamp": 1753438731276
  },
  "reference-count": 11,
  "publisher": "Elsevier BV",
  "issue": "1-3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1990,
            2,
            1
          ]
        ],
        "date-time": "1990-02-01T00:00:00Z",
        "timestamp": 633830400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1990,
        2
      ]
    ]
  },
  "DOI": "10.1016/0924-4247(90)85021-u",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        25
      ]
    ],
    "date-time": "2002-07-25T09:05:13Z",
    "timestamp": 1027587913000
  },
  "page": "108-114",
  "source": "Crossref",
  "is-referenced-by-count": 85,
  "title": "A capacitive pressure sensor with low impedance output and active suppression of parasitic effects",
  "prefix": "10.1016",
  "volume": "21",
  "author": [
    {
      "given": "B.",
      "family": "Puers",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "E.",
      "family": "Peeters",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "A.",
      "family": "Van Den Bossche",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "W.",
      "family": "Sansen",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "163",
      "DOI": "10.1109/TBME.1986.325849",
      "article-title": "Analysis, design and performance of a capacitive pressure sensor IC",
      "volume": "BME-33",
      "author": "Smith",
      "year": "1986",
      "journal-title": "IEEE Trans. Biomed. Eng."
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "1887",
      "DOI": "10.1109/T-ED.1979.19792",
      "article-title": "Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors",
      "volume": "ED-26",
      "author": "Clark",
      "year": "1979",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "42",
      "DOI": "10.1109/T-ED.1982.20656",
      "article-title": "A batch-fabricated silicon capacitive pressure sensor with low temperature sensitivity",
      "volume": "ED-29",
      "author": "Lee",
      "year": "1982",
      "journal-title": "IEEE Trans. Electron Devices"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB4",
      "first-page": "406",
      "article-title": "Design and realisation of an ultra-miniature hybrid for a pressure telemetry capsule",
      "author": "Sansen",
      "year": "1984",
      "journal-title": "Proc. Int. Microelectronics Conf., Tokyo, Japan"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "420",
      "DOI": "10.1109/PROC.1982.12331",
      "article-title": "Silicon as a mechanical material",
      "volume": "70",
      "author": "Petersen",
      "year": "1982",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "423",
      "DOI": "10.1016/0250-6874(89)80029-0",
      "article-title": "CAD tools in mechanical sensor design",
      "volume": "17",
      "author": "Puers",
      "year": "1989",
      "journal-title": "Sensors and Actuators"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "3946",
      "DOI": "10.1063/1.1657121",
      "article-title": "Field assisted glass-metal sealing",
      "volume": "40",
      "author": "Wallis",
      "year": "1969",
      "journal-title": "J. Appl. Phys."
    },
    {
      "article-title": "Capacitive mechanical sensors in silicon",
      "year": "1987",
      "author": "Peeters",
      "key": "10.1016/0924-4247(90)85021-U_BIB8"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "191",
      "DOI": "10.1016/0250-6874(83)85024-0",
      "article-title": "A micromechanical capacitive accelerometer with a two-point inertial mass suspension",
      "volume": "4",
      "author": "Rudolf",
      "year": "1983",
      "journal-title": "Sensors and Actuators"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "941",
      "DOI": "10.1109/PROC.1983.12700",
      "article-title": "Switched capacitor circuit design",
      "volume": "71",
      "author": "Gregorian",
      "year": "1983",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "10.1016/0924-4247(90)85021-U_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "345",
      "DOI": "10.1016/0250-6874(86)80066-X",
      "article-title": "An integrated capacitive pressure sensor with frequency-modulated output",
      "volume": "9",
      "author": "Hanneborg",
      "year": "1986",
      "journal-title": "Sensors and Actuators"
    }
  ],
  "container-title": "Sensors and Actuators A: Physical",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:092442479085021U?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:092442479085021U?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        5,
        4
      ]
    ],
    "date-time": "2019-05-04T14:54:57Z",
    "timestamp": 1556981697000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/092442479085021U"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1990,
        2
      ]
    ]
  },
  "references-count": 11,
  "journal-issue": {
    "issue": "1-3",
    "published-print": {
      "date-parts": [
        [
          1990,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "092442479085021U"
  ],
  "URL": "http://dx.doi.org/10.1016/0924-4247(90)85021-U",
  "relation": {},
  "ISSN": [
    "0924-4247"
  ],
  "subject": [],
  "container-title-short": "Sensors and Actuators A: Physical",
  "published": {
    "date-parts": [
      [
        1990,
        2
      ]
    ]
  }
}