DOI: 10.1016/0921-5107(90)90014-3. Characterization of boron nitride films prepared by the dual ion beam deposition technique

Characterization of boron nitride films prepared by the dual ion beam deposition technique

10.1016/0921-5107(90)90014-3

Crossref journal-article

Elsevier BV

Materials Science and Engineering: B (78)

Bibliography

Lin, W. L., Xia, Z., Liu, Y. L., & Fen, Y. C. (1990). Characterization of boron nitride films prepared by the dual ion beam deposition technique. Materials Science and Engineering: B, 7(1â2), 107â110.

Authors 4

W.L. Lin (first)
Z. Xia (additional)
Y.L. Liu (additional)
Y.C. Fen (additional)

References 16 Referenced 20

10.1116/1.572592 / J. Vac. Sci. Technol. by Wiggins (1984)
{'key': '10.1016/0921-5107(90)90014-3_BIB2', 'volume': 'Vol. 13', 'year': '1974'} (1974)
10.1016/0040-6090(80)90554-4 / Thin Solid Films by Weissmantel (1980)
10.1116/1.570719 / J. Vac. Sci. Technol. by Weissmantel (1981)
10.1016/0168-583X(85)90493-8 / Nucl. Instrum. Methods by Satou (1985)
10.1016/S0168-583X(87)80158-1 / Nucl. Instrum. Methods by Andoh (1987)
10.1016/0168-583X(88)90658-1 / Nucl. Instrum. Methods by Andoh (1988)
10.1016/0168-583X(87)90912-8 / Nucl. Instrum. Methods by Bricault (1987)
10.1016/0025-5416(87)90209-6 / Mater. Sci. Eng. by Singh (1987)
10.1103/PhysRevB.33.879 / Phys. Rev. by Parmigiani (1986)
10.1063/1.94414 / Appl. Phys. Lett. by Harper (1983)
10.1063/1.330509 / J. Appl. Phys. by Wittmer (1982)
10.1063/1.94871 / Appl. Phys. Lett. by Johansson (1984)
{'key': '10.1016/0921-5107(90)90014-3_BIB14', 'first-page': '85', 'year': '1984'} (1984)
10.1116/1.583511 / J. Vac. Sci. Technol. by Chambers (1986)
{'key': '10.1016/0921-5107(90)90014-3_BIB16', 'series-title': 'Photoelectron and Auger Spectroscopy', 'author': 'Carlson', 'year': '1975'} / Photoelectron and Auger Spectroscopy by Carlson (1975)

Dates

Type	When
Created	22 years, 5 months ago (March 14, 2003, 6:47 p.m.)
Deposited	6 years, 5 months ago (March 25, 2019, 4:20 a.m.)
Indexed	1 year, 7 months ago (Feb. 3, 2024, 11:21 a.m.)
Issued	35 years ago (Sept. 1, 1990)
Published	35 years ago (Sept. 1, 1990)
Published Print	35 years ago (Sept. 1, 1990)

Funders 0

None

BibTeX

@article{Lin_1990, title={Characterization of boron nitride films prepared by the dual ion beam deposition technique}, volume={7}, ISSN={0921-5107}, url={http://dx.doi.org/10.1016/0921-5107(90)90014-3}, DOI={10.1016/0921-5107(90)90014-3}, number={1–2}, journal={Materials Science and Engineering: B}, publisher={Elsevier BV}, author={Lin, W.L. and Xia, Z. and Liu, Y.L. and Fen, Y.C.}, year={1990}, month=sep, pages={107–110} }

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