DOI: 10.1016/0304-3991(92)90223-7. Investigation of surface amorphization of silicon wafers during ion-milling

Investigation of surface amorphization of silicon wafers during ion-milling

10.1016/0304-3991(92)90223-7

Crossref journal-article

Elsevier BV

Ultramicroscopy (78)

Bibliography

Schuhrke, T., MÃ¤ndl, M., Zweck, J., & Hoffmann, H. (1992). Investigation of surface amorphization of silicon wafers during ion-milling. Ultramicroscopy, 41(4), 429â433.

Authors 4

T. Schuhrke (first)
M. Mändl (additional)
J. Zweck (additional)
H. Hoffmann (additional)

References 8 Referenced 27

{'key': '10.1016/0304-3991(92)90223-7_BIB1', 'first-page': '169', 'author': 'Anstis', 'year': '1983', 'journal-title': 'Inst. Phys. Conf. Ser. 68'} / Inst. Phys. Conf. Ser. 68 by Anstis (1983)
10.1016/0040-6090(87)90250-1 / Thin Solid Films by Ivey (1987)
{'year': '1975', 'series-title': 'Ion Implantation Range and Energy Deposition Tables, Vol. 2, Low Incident Ion Energies', 'author': 'Winterbon', 'key': '10.1016/0304-3991(92)90223-7_BIB3'} / Ion Implantation Range and Energy Deposition Tables, Vol. 2, Low Incident Ion Energies by Winterbon (1975)
{'volume': 'I', 'year': '1981', 'key': '10.1016/0304-3991(92)90223-7_BIB4'} (1981)
{'issue': '10', 'key': '10.1016/0304-3991(92)90223-7_BIB5', 'first-page': '1', 'volume': '36', 'author': 'Lindhard', 'year': '1968', 'journal-title': 'Mat. Fys. Medd. Dan. Vid. Selsk.'} / Mat. Fys. Medd. Dan. Vid. Selsk. by Lindhard (1968)
{'year': '1985', 'series-title': 'The Stopping and Range of Ions in Solids', 'author': 'Ziegler', 'key': '10.1016/0304-3991(92)90223-7_BIB6'} / The Stopping and Range of Ions in Solids by Ziegler (1985)
10.1016/0042-207X(73)92418-4 / Vacuum by Crockett (1972)
GATAN Instruction Manual Duo Mill Model 600DIF.

Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 7:43 p.m.)
Deposited	6 years, 4 months ago (April 5, 2019, 12:53 a.m.)
Indexed	11 months ago (Sept. 15, 2024, 10:02 p.m.)
Issued	33 years, 2 months ago (June 1, 1992)
Published	33 years, 2 months ago (June 1, 1992)
Published Print	33 years, 2 months ago (June 1, 1992)

Funders 0

None

BibTeX

@article{Schuhrke_1992, title={Investigation of surface amorphization of silicon wafers during ion-milling}, volume={41}, ISSN={0304-3991}, url={http://dx.doi.org/10.1016/0304-3991(92)90223-7}, DOI={10.1016/0304-3991(92)90223-7}, number={4}, journal={Ultramicroscopy}, publisher={Elsevier BV}, author={Schuhrke, T. and Mändl, M. and Zweck, J. and Hoffmann, H.}, year={1992}, month=jun, pages={429–433} }

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