DOI: 10.1016/0254-0584(82)90022-0. Effect of impurities on the grain growth of chemical vapor deposited polycrystalline silicon films

Effect of impurities on the grain growth of chemical vapor deposited polycrystalline silicon films

10.1016/0254-0584(82)90022-0

Crossref journal-article

Elsevier BV

Materials Chemistry and Physics (78)

Bibliography

Angelucci, R., Severi, M., & Solmi, S. (1983). Effect of impurities on the grain growth of chemical vapor deposited polycrystalline silicon films. Materials Chemistry and Physics, 9(1â3), 235â245.

Authors 3

R. Angelucci (first)
M. Severi (additional)
S. Solmi (additional)

References 21 Referenced 24

10.1016/0038-1101(70)90124-3 / Solid-State Electron. by Faggin (1970)
{'key': '10.1016/0254-0584(82)90022-0_BIB2', 'first-page': '125', 'volume': '52', 'author': 'Capece', 'year': '1979', 'journal-title': 'Electronics'} / Electronics by Capece (1979)
10.1063/1.321593 / J. Appl. Phys. by Seto (1975)
10.1149/1.2127785 / J. Electrochem. Soc. by Colinge (1981)
10.1109/T-ED.1981.20504 / IEEE. Trans. Electron. Devices by Mandurah (1981)
10.1109/T-ED.1981.20505 / IEEE. Trans. Electron. Devices by Mandurah (1981)
10.1149/1.2124299 / J.Electrochem. Soc. by Solmi (1982)
10.1149/1.2131593 / J. Electrochem. Soc. by Kamins (1978)
10.1149/1.2131703 / J. Electrochem. Soc. by Wada (1978)
10.1149/1.2124295 / J. Electrochem. Soc. by Mei (1982)
{'key': '10.1016/0254-0584(82)90022-0_BIB10', 'series-title': 'Grain boundary structure and properties', 'author': 'Chadwick', 'year': '1976'} / Grain boundary structure and properties by Chadwick (1976)
10.1063/1.92717 / Appl. Phys. Lett. by Angelucci (1981)
{'key': '10.1016/0254-0584(82)90022-0_BIB12', 'series-title': 'Semiconductor Silicon/1981', 'first-page': '254', 'author': 'Craven', 'year': '1981'} / Semiconductor Silicon/1981 by Craven (1981)
{'key': '10.1016/0254-0584(82)90022-0_BIB13', 'series-title': 'Grain Boundaries in Semiconductors', 'first-page': '71', 'author': 'Pollock', 'year': '1982'} / Grain Boundaries in Semiconductors by Pollock (1982)
{'key': '10.1016/0254-0584(82)90022-0_BIB14', 'series-title': 'Semiconductor Silicon/1977', 'first-page': '521', 'author': 'Patel', 'year': '1977'} / Semiconductor Silicon/1977 by Patel (1977)
10.1063/1.330646 / J. Appl. Phys. by Nobili (1982)
{'key': '10.1016/0254-0584(82)90022-0_BIB16', 'series-title': 'Grain Boundaries in Semiconductors', 'first-page': '65', 'author': 'Smith', 'year': '1982'} / Grain Boundaries in Semiconductors by Smith (1982)
10.1149/1.2124034 / J. Electrochem. Soc. by Antoniadis (1982)
10.1149/1.2134111 / J. Electrochem. Soc. by Fair (1975)
10.1149/1.2119859 / J. Electrochem. Soc. by Nobili (1983)
10.1016/0038-1101(81)90211-2 / Solid State Electron by Markino (1981)

Dates

Type	When
Created	22 years, 2 months ago (June 21, 2003, 12:20 a.m.)
Deposited	6 years, 5 months ago (March 19, 2019, 2:21 p.m.)
Indexed	1 year, 6 months ago (Feb. 5, 2024, 11:19 a.m.)
Issued	41 years, 11 months ago (Sept. 1, 1983)
Published	41 years, 11 months ago (Sept. 1, 1983)
Published Print	41 years, 11 months ago (Sept. 1, 1983)

Funders 0

None

BibTeX

@article{Angelucci_1983, title={Effect of impurities on the grain growth of chemical vapor deposited polycrystalline silicon films}, volume={9}, ISSN={0254-0584}, url={http://dx.doi.org/10.1016/0254-0584(82)90022-0}, DOI={10.1016/0254-0584(82)90022-0}, number={1–3}, journal={Materials Chemistry and Physics}, publisher={Elsevier BV}, author={Angelucci, R. and Severi, M. and Solmi, S.}, year={1983}, month=sep, pages={235–245} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        5
      ]
    ],
    "date-time": "2024-02-05T16:19:43Z",
    "timestamp": 1707149983385
  },
  "reference-count": 21,
  "publisher": "Elsevier BV",
  "issue": "1-3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1983,
            9,
            1
          ]
        ],
        "date-time": "1983-09-01T00:00:00Z",
        "timestamp": 431222400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1983,
        9
      ]
    ]
  },
  "DOI": "10.1016/0254-0584(82)90022-0",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        6,
        21
      ]
    ],
    "date-time": "2003-06-21T04:20:42Z",
    "timestamp": 1056169242000
  },
  "page": "235-245",
  "source": "Crossref",
  "is-referenced-by-count": 24,
  "title": "Effect of impurities on the grain growth of chemical vapor deposited polycrystalline silicon films",
  "prefix": "10.1016",
  "volume": "9",
  "author": [
    {
      "given": "R.",
      "family": "Angelucci",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "M.",
      "family": "Severi",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "S.",
      "family": "Solmi",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "1125",
      "DOI": "10.1016/0038-1101(70)90124-3",
      "volume": "13",
      "author": "Faggin",
      "year": "1970",
      "journal-title": "Solid-State Electron."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB2",
      "first-page": "125",
      "volume": "52",
      "author": "Capece",
      "year": "1979",
      "journal-title": "Electronics"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "5247",
      "DOI": "10.1063/1.321593",
      "volume": "46",
      "author": "Seto",
      "year": "1975",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "2009",
      "DOI": "10.1149/1.2127785",
      "volume": "128",
      "author": "Colinge",
      "year": "1981",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB5_1",
      "doi-asserted-by": "crossref",
      "first-page": "1163",
      "DOI": "10.1109/T-ED.1981.20504",
      "volume": "ED-28",
      "author": "Mandurah",
      "year": "1981",
      "journal-title": "IEEE. Trans. Electron. Devices"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB5_2",
      "doi-asserted-by": "crossref",
      "first-page": "1171",
      "DOI": "10.1109/T-ED.1981.20505",
      "volume": "ED-28",
      "author": "Mandurah",
      "year": "1981",
      "journal-title": "IEEE. Trans. Electron. Devices"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "1811",
      "DOI": "10.1149/1.2124299",
      "volume": "129",
      "author": "Solmi",
      "year": "1982",
      "journal-title": "J.Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "927",
      "DOI": "10.1149/1.2131593",
      "volume": "125",
      "author": "Kamins",
      "year": "1978",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "1499",
      "DOI": "10.1149/1.2131703",
      "volume": "125",
      "author": "Wada",
      "year": "1978",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "1791",
      "DOI": "10.1149/1.2124295",
      "volume": "129",
      "author": "Mei",
      "year": "1982",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB10",
      "series-title": "Grain boundary structure and properties",
      "author": "Chadwick",
      "year": "1976"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "346",
      "DOI": "10.1063/1.92717",
      "volume": "39",
      "author": "Angelucci",
      "year": "1981",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB12",
      "series-title": "Semiconductor Silicon/1981",
      "first-page": "254",
      "author": "Craven",
      "year": "1981"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB13",
      "series-title": "Grain Boundaries in Semiconductors",
      "first-page": "71",
      "author": "Pollock",
      "year": "1982"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB14",
      "series-title": "Semiconductor Silicon/1977",
      "first-page": "521",
      "author": "Patel",
      "year": "1977"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "1484",
      "DOI": "10.1063/1.330646",
      "volume": "53",
      "author": "Nobili",
      "year": "1982",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB16",
      "series-title": "Grain Boundaries in Semiconductors",
      "first-page": "65",
      "author": "Smith",
      "year": "1982"
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "1093",
      "DOI": "10.1149/1.2124034",
      "volume": "129",
      "author": "Antoniadis",
      "year": "1982",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "1689",
      "DOI": "10.1149/1.2134111",
      "volume": "122",
      "author": "Fair",
      "year": "1975",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "922",
      "DOI": "10.1149/1.2119859",
      "volume": "130",
      "author": "Nobili",
      "year": "1983",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0254-0584(82)90022-0_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "49",
      "DOI": "10.1016/0038-1101(81)90211-2",
      "volume": "24",
      "author": "Markino",
      "year": "1981",
      "journal-title": "Solid State Electron"
    }
  ],
  "container-title": "Materials Chemistry and Physics",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0254058482900220?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0254058482900220?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        3,
        19
      ]
    ],
    "date-time": "2019-03-19T18:21:27Z",
    "timestamp": 1553019687000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0254058482900220"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1983,
        9
      ]
    ]
  },
  "references-count": 21,
  "journal-issue": {
    "issue": "1-3",
    "published-print": {
      "date-parts": [
        [
          1983,
          9
        ]
      ]
    }
  },
  "alternative-id": [
    "0254058482900220"
  ],
  "URL": "http://dx.doi.org/10.1016/0254-0584(82)90022-0",
  "relation": {},
  "ISSN": [
    "0254-0584"
  ],
  "subject": [],
  "container-title-short": "Materials Chemistry and Physics",
  "published": {
    "date-parts": [
      [
        1983,
        9
      ]
    ]
  }
}