DOI: 10.1016/0250-6874(89)80074-5. Resonant silicon structures

Resonant silicon structures

10.1016/0250-6874(89)80074-5

Crossref journal-article

Elsevier BV

Sensors and Actuators (78)

Bibliography

Buser, R. A., & de Rooij, N. F. (1989). Resonant silicon structures. Sensors and Actuators, 17(1â2), 145â154.

Authors 2

R.A. Buser (first)
N.F. de Rooij (additional)

References 22 Referenced 51

10.1007/BF01337937 / Z. Phys. / Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung by Sauerbrey (1959)
10.1021/ac50021a007 / Anal. Chem. / Applications of the piezoelectric crystal detector in analytical chemistry by Hlavay (1977)
10.1109/FREQ.1986.200945 / 40th Annual Frequency Control Symp., Philadelphia, PA, U.S.A. / A resonator temperature transducer with no activity dips by EerNisse (1986)
10.1109/FREQ.1986.200946 / 40th Annual Frequency Control Symp., Philadelphia, PA, U.S.A. / Temperature sensor using quartz tuning fork resonator by Ueda (1986)
{'key': '10.1016/0250-6874(89)80074-5_BIB5', 'first-page': '173', 'article-title': 'Precision digital pressure transducer', 'volume': '12', 'author': 'Paros', 'year': '1973', 'journal-title': 'ISA Trans.'} / ISA Trans. / Precision digital pressure transducer by Paros (1973)
10.1088/0022-3735/18/2/002 / J. Phys. E: Sci. Instrum. / Resonator sensors — a review by Langdon (1985)
10.1016/0250-6874(83)85068-9 / Sensors and Actuators / Resonant diaphragm pressure measurement system with ZnO on Si excitation by Smits (1983)
10.1088/0022-3735/17/8/007 / J. Phys. E: Sci. Instrum. / Etched silicon vibrating sensor by Greenwood (1984)
10.1109/T-ED.1986.22519 / IEEE Trans. Electron Dev., ED-33 / Resonant-microbridge vapor sensor by Howe (1986)
10.1117/12.941086 / Fiber Optic Sensors II, SPIE / Optically excited and interrogated micromechanical silicon cantilever structure by Wölfelschneider (1987)
{'key': '10.1016/0250-6874(89)80074-5_BIB11', 'first-page': '341', 'author': 'Szabo', 'year': '1984'} by Szabo (1984)
{'key': '10.1016/0250-6874(89)80074-5_BIB12', 'article-title': 'A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation', 'author': 'Sandmaier', 'year': '251987', 'journal-title': "4th Int. Conf. on Solid-State Sensors and Actuators, (Transducers '87), Tokyo, Japan"} / 4th Int. Conf. on Solid-State Sensors and Actuators, (Transducers '87), Tokyo, Japan / A silicon based micromechanical accelerometer with cross acceleration sensitivity compensation by Sandmaier (251987)
{'key': '10.1016/0250-6874(89)80074-5_BIB13', 'first-page': '112', 'author': 'Szabo', 'year': '1984'} by Szabo (1984)
{'key': '10.1016/0250-6874(89)80074-5_BIB14', 'article-title': 'Modeling simulation of solid-state pressure sensors', 'author': 'Lee', 'year': '1982'} / Modeling simulation of solid-state pressure sensors by Lee (1982)
{'key': '10.1016/0250-6874(89)80074-5_BIB15', 'first-page': '879', 'article-title': 'Realization of a mesa array in (001) oriented silicon wafers for tactile sensing applications', 'author': 'Buser', 'year': '1986', 'journal-title': 'Ext. Abstr. Fall Meet. Electrochem. Soc., San Diego, CA, U.S.A.'} / Ext. Abstr. Fall Meet. Electrochem. Soc., San Diego, CA, U.S.A. / Realization of a mesa array in (001) oriented silicon wafers for tactile sensing applications by Buser (1986)
{'key': '10.1016/0250-6874(89)80074-5_BIB16', 'article-title': 'Interférométrie hétérodyne de speckles: Application à la mesure de vibration mécanique microscopique', 'author': 'Willemin', 'year': '1983'} / Interférométrie hétérodyne de speckles: Application à la mesure de vibration mécanique microscopique by Willemin (1983)
10.1049/el:19870670 / Electron Lett. / Nonlinear vibrations hysteresis of micromachined silicon resonators designed as frequency out sensors by Andres (1987)
10.1016/0042-207X(84)90318-X / Vacuum / A bending stretching mode crystal oscillator as a friction vacuum gauge by Kokubun (1984)
10.1016/0250-6874(83)85067-7 / Sensors and Actuators / Air and gas damping of quartz tuning forks by Christen (1983)
10.1116/1.573275 / J. Vac. Sci. Technol. / Frequency dependence of a quartz oscillator on gas pressure by Kokubun (1985)
R. Buser, to be published.
10.1063/1.1702809 / J. Appl. Phys. / Elastic moduli of silicon vs. hydrostatic pressure at 25 °C and −195 °C by McSkimin (1964)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 1:03 a.m.)
Deposited	6 years, 4 months ago (May 4, 2019, 7:24 a.m.)
Indexed	1 year, 4 months ago (April 6, 2024, 10:52 p.m.)
Issued	36 years, 4 months ago (May 1, 1989)
Published	36 years, 4 months ago (May 1, 1989)
Published Print	36 years, 4 months ago (May 1, 1989)

Funders 0

None

BibTeX

@article{Buser_1989, title={Resonant silicon structures}, volume={17}, ISSN={0250-6874}, url={http://dx.doi.org/10.1016/0250-6874(89)80074-5}, DOI={10.1016/0250-6874(89)80074-5}, number={1–2}, journal={Sensors and Actuators}, publisher={Elsevier BV}, author={Buser, R.A. and de Rooij, N.F.}, year={1989}, month=may, pages={145–154} }

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