DOI: 10.1016/0250-6874(88)85018-2. Lightly-doped polysilicon bridge as a flow meter

Lightly-doped polysilicon bridge as a flow meter

10.1016/0250-6874(88)85018-2

Crossref journal-article

Elsevier BV

Sensors and Actuators (78)

Bibliography

Tai, Y.-C., & Muller, R. S. (1988). Lightly-doped polysilicon bridge as a flow meter. Sensors and Actuators, 15(1), 63â75.

Authors 2

Yu-Chong Tai (first)
Richard S. Muller (additional)

References 16 Referenced 47

{'key': '10.1016/0250-6874(88)85018-2_BIB1', 'first-page': '354', 'article-title': 'Polysilicon bridges for anemometer application', 'author': 'Tai', 'year': '471985', 'journal-title': "Digest Tech. Papers, 3rd Int. Conf. on Solid-State Sensors and Actuators (Transducers '85) Philadelphia PA"} / Digest Tech. Papers, 3rd Int. Conf. on Solid-State Sensors and Actuators (Transducers '85) Philadelphia PA / Polysilicon bridges for anemometer application by Tai (471985)
10.1016/0038-1101(78)90183-1 / Solid-State Electron / Conduction properties of lightly doped polycrystalline silicon by Korsh (1978)
{'key': '10.1016/0250-6874(88)85018-2_BIB3', 'first-page': '5247', 'article-title': 'The electrical properties of polycrystalline silicon', 'volume': '42', 'author': 'Seto', 'year': '1971', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. / The electrical properties of polycrystalline silicon by Seto (1971)
10.1149/1.2129167 / J. Electrochem. Soc. / Phosphorous doping of low pressure chemically vapor-deposited silicon films by Mandurah (1979)
10.1063/1.1659780 / J. Appl. Phys. / Hall mobility in chemically deposited polycrystalline silicon by Kamins (1971)
10.1063/1.324477 / J. Appl. Phys. / Transport properties of polycrystalline silicon films by Baccarani (1972)
10.1109/T-ED.1981.20437 / IEEE Trans. Electron Devices, ED-28 / Modeling and optimization of monolithic polycrystalline silicon resistors by Lu (1981)
{'key': '10.1016/0250-6874(88)85018-2_BIB8', 'first-page': '1163', 'article-title': 'A model for conduction in polycrstalline silicon', 'author': 'Mandurah', 'year': '1981'} / A model for conduction in polycrstalline silicon by Mandurah (1981)
10.1109/T-ED.1981.20505 / IEEE Trans. Electron Devices, ED-28 / A model for conduction in polycrystalline silicon by Mandurah (1981)
{'key': '10.1016/0250-6874(88)85018-2_BIB10', 'first-page': '256', 'author': 'Sze', 'year': '1981'} by Sze (1981)
{'key': '10.1016/0250-6874(88)85018-2_BIB11', 'first-page': '39', 'author': 'Macklen', 'year': '1979'} by Macklen (1979)
10.1109/T-ED.1986.22696 / IEEE Trans. Electron Devices, ED-33 / A monolithic gas flow sensor with polyimide as thermal insulator by Stemme (1986)
{'key': '10.1016/0250-6874(88)85018-2_BIB13', 'first-page': '639', 'article-title': 'Monolithic integrated zinc oxide on silicon pyroelectric anemometer', 'author': 'Polla', 'year': '1983', 'journal-title': 'Tech. Digest, Int. Electron Devices Meet. (IEDM), Washington, DC'} / Tech. Digest, Int. Electron Devices Meet. (IEDM), Washington, DC / Monolithic integrated zinc oxide on silicon pyroelectric anemometer by Polla (1983)
{'key': '10.1016/0250-6874(88)85018-2_BIB14', 'author': 'Cebeci', 'year': '1982'} by Cebeci (1982)
{'key': '10.1016/0250-6874(88)85018-2_BIB15', 'first-page': '233', 'article-title': 'A hot-wire air flow sensor for automotive use', 'author': 'Sakamoto', 'year': '1982', 'journal-title': 'Proc. 2nd Sensor Symp., Japan'} / Proc. 2nd Sensor Symp., Japan / A hot-wire air flow sensor for automotive use by Sakamoto (1982)
{'key': '10.1016/0250-6874(88)85018-2_BIB16', 'article-title': 'High-precision, high-performance mass-flow sensor with integrated laminar flow micro-channels, paper presented', 'author': 'Petersen', 'year': '11141985', 'journal-title': "3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA"} / 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA / High-precision, high-performance mass-flow sensor with integrated laminar flow micro-channels, paper presented by Petersen (11141985)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 5:03 a.m.)
Deposited	6 years, 3 months ago (May 4, 2019, 11:23 a.m.)
Indexed	2 months, 2 weeks ago (June 19, 2025, 5:24 a.m.)
Issued	37 years ago (Sept. 1, 1988)
Published	37 years ago (Sept. 1, 1988)
Published Print	37 years ago (Sept. 1, 1988)

Funders 0

None

BibTeX

@article{Tai_1988, title={Lightly-doped polysilicon bridge as a flow meter}, volume={15}, ISSN={0250-6874}, url={http://dx.doi.org/10.1016/0250-6874(88)85018-2}, DOI={10.1016/0250-6874(88)85018-2}, number={1}, journal={Sensors and Actuators}, publisher={Elsevier BV}, author={Tai, Yu-Chong and Muller, Richard S.}, year={1988}, month=sep, pages={63–75} }

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