DOI: 10.1016/0168-9002(90)90055-b. X-ray lithography beam line BL-17C at the photon factory

X-ray lithography beam line BL-17C at the photon factory

10.1016/0168-9002(90)90055-b

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment (78)

Bibliography

Taguchi, T., Gotoh, S., Okamura, S., & Hisatsugu, T. (1990). X-ray lithography beam line BL-17C at the photon factory. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 291(1â2), 176â178.

Authors 4

Takao Taguchi (first)
Syunji Gotoh (additional)
Shigeru Okamura (additional)
Tokushige Hisatsugu (additional)

References 4 Referenced 2

10.1116/1.584026 / J. Vac. Sci. Technol. by Heuberger (1988)
10.1063/1.1140779 / Rev. Sci. Instr. by Gotoh (1989)
10.1364/JOSA.51.000123 / J. Opt. Soc. Am. by Bennett (1961)
10.1364/AO.27.000563 / Appl. Opt. by Yamagihara (1988)

Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 3:03 p.m.)
Deposited	6 years, 5 months ago (April 4, 2019, 7:26 a.m.)
Indexed	1 year, 6 months ago (Feb. 11, 2024, 1:39 a.m.)
Issued	35 years, 4 months ago (May 1, 1990)
Published	35 years, 4 months ago (May 1, 1990)
Published Print	35 years, 4 months ago (May 1, 1990)

Funders 0

None

BibTeX

@article{Taguchi_1990, title={X-ray lithography beam line BL-17C at the photon factory}, volume={291}, ISSN={0168-9002}, url={http://dx.doi.org/10.1016/0168-9002(90)90055-b}, DOI={10.1016/0168-9002(90)90055-b}, number={1–2}, journal={Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment}, publisher={Elsevier BV}, author={Taguchi, Takao and Gotoh, Syunji and Okamura, Shigeru and Hisatsugu, Tokushige}, year={1990}, month=may, pages={176–178} }

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