DOI: 10.1016/0168-583x(95)00687-7. Ion beam assisted deposition of ZrO2 thin films

Ion beam assisted deposition of ZrO2 thin films

10.1016/0168-583x(95)00687-7

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Neubeck, K., Nitsche, R., Hahn, H., Alberts, L., Wolf, G. K., & Friz, M. (1995). Ion beam assisted deposition of ZrO2 thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 106(1â4), 110â115.

Authors 6

K Neubeck (first)
R Nitsche (additional)
H Hahn (additional)
L Alberts (additional)
G.K Wolf (additional)
M Friz (additional)

References 14 Referenced 7

10.1179/095066090790323975 / Int. Mater. Rev. by Smidt (1990)
10.1016/0257-8972(93)90151-D / Surf. Coat. Technol. by Hübler (1993)
10.1364/AO.28.002779 / Appl. Optics by Hwangbo (1989)
10.1016/0040-6090(94)90848-6 / Thin Solids Films by Martin (1994)
10.1063/1.350964 / J. Appl. Phys. by Sprague (1992)
10.1364/AO.28.002466 / Appl. Optics by Motohiro (1989)
10.1116/1.579158 / J. Vac. Sci. Technol. A by Aoki (1994)
10.1063/1.106514 / Appl. Phys. Lett. by Iijima (1992)
10.1063/1.354949 / J. Appl. Phys. by Sonnenberg (1993)
10.1063/1.108277 / Appl. Phys. Lett. by Reade (1992)
10.1063/1.94485 / Appl. Phys. Lett. by Martin (1983)
10.1063/1.1142946 / Rev. Sci. Instr. by Wituschek (1992)
10.1016/0168-583X(85)90762-1 / Nucl. Instr. and Meth. B by Doolittle (1985)
10.1063/1.332871 / J. Appl. Phys. by Martin (1984)

Dates

Type	When
Created	23 years, 1 month ago (July 25, 2002, 8:03 p.m.)
Deposited	6 years, 4 months ago (April 17, 2019, 6:22 a.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 1:07 a.m.)
Issued	29 years, 8 months ago (Dec. 1, 1995)
Published	29 years, 8 months ago (Dec. 1, 1995)
Published Print	29 years, 8 months ago (Dec. 1, 1995)

Funders 0

None

BibTeX

@article{Neubeck_1995, title={Ion beam assisted deposition of ZrO2 thin films}, volume={106}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(95)00687-7}, DOI={10.1016/0168-583x(95)00687-7}, number={1–4}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Neubeck, K and Nitsche, R and Hahn, H and Alberts, L and Wolf, G.K and Friz, M}, year={1995}, month=dec, pages={110–115} }

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