DOI: 10.1016/0168-583x(94)95192-6. Computer simulation of ion-beam assisted film growth

Computer simulation of ion-beam assisted film growth

10.1016/0168-583x(94)95192-6

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

MÃ¶ller, W. (1994). Computer simulation of ion-beam assisted film growth. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 89(1â4), 322â324.

Authors 1

Wolfhard Möller (first)

References 47 Referenced 1

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Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 9:16 p.m.)
Deposited	6 years, 5 months ago (April 3, 2019, 4:53 p.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 10:25 a.m.)
Issued	31 years, 4 months ago (May 1, 1994)
Published	31 years, 4 months ago (May 1, 1994)
Published Print	31 years, 4 months ago (May 1, 1994)

Funders 0

None

BibTeX

@article{M_ller_1994, title={Computer simulation of ion-beam assisted film growth}, volume={89}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(94)95192-6}, DOI={10.1016/0168-583x(94)95192-6}, number={1–4}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Möller, Wolfhard}, year={1994}, month=may, pages={322–324} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        6
      ]
    ],
    "date-time": "2024-02-06T15:25:37Z",
    "timestamp": 1707233137243
  },
  "reference-count": 47,
  "publisher": "Elsevier BV",
  "issue": "1-4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1994,
            5,
            1
          ]
        ],
        "date-time": "1994-05-01T00:00:00Z",
        "timestamp": 767750400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1994,
        5
      ]
    ]
  },
  "DOI": "10.1016/0168-583x(94)95192-6",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        11,
        12
      ]
    ],
    "date-time": "2002-11-12T02:16:30Z",
    "timestamp": 1037067390000
  },
  "page": "322-324",
  "source": "Crossref",
  "is-referenced-by-count": 1,
  "title": "Computer simulation of ion-beam assisted film growth",
  "prefix": "10.1016",
  "volume": "89",
  "author": [
    {
      "given": "Wolfhard",
      "family": "M\u00f6ller",
      "sequence": "first",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "483",
      "DOI": "10.1016/0257-8972(89)90085-6",
      "volume": "37",
      "author": "Moll",
      "year": "1989",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "267",
      "DOI": "10.1016/0257-8972(89)90089-3",
      "volume": "38",
      "author": "Lux",
      "year": "1989",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB3",
      "series-title": "Plasma Surface Interactions and Processing of Materials",
      "first-page": "251",
      "volume": "Vol. 176",
      "author": "Harper",
      "year": "1990"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB4",
      "series-title": "Plasma Surface Interactions and Processing of Materials",
      "first-page": "281",
      "volume": "Vol. 176",
      "author": "Greene",
      "year": "1990"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "1105",
      "DOI": "10.1116/1.576238",
      "volume": "7",
      "author": "Mattox",
      "year": "1989",
      "journal-title": "J. Vac. Sci. Technol A"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "143",
      "DOI": "10.1016/0040-6090(89)90040-0",
      "volume": "171",
      "author": "Rossnagel",
      "year": "1989",
      "journal-title": "Thin Sol. Films"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "369",
      "DOI": "10.1016/0168-583X(90)90732-A",
      "volume": "46",
      "author": "Wolf",
      "year": "1990",
      "journal-title": "Nucl. Instr. and Meth. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "119",
      "DOI": "10.1016/0040-6090(89)90818-3",
      "volume": "175",
      "author": "Oechsner",
      "year": "1989",
      "journal-title": "Thin Sol. Films"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "154",
      "DOI": "10.1016/0257-8972(90)90070-S",
      "volume": "43/44",
      "author": "Vep\u0159ek",
      "year": "1990",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "91",
      "DOI": "10.1016/0040-6090(90)90277-K",
      "volume": "191",
      "author": "Reichelt",
      "year": "1990",
      "journal-title": "Thin Sol. Films"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "920",
      "DOI": "10.1016/0257-8972(90)90032-8",
      "volume": "43/44",
      "author": "Wolf",
      "year": "1990",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "215",
      "DOI": "10.1016/0920-2307(91)90008-B",
      "volume": "6",
      "author": "Hirvonen",
      "year": "1991",
      "journal-title": "Mater. Sci. Rep."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "571",
      "DOI": "10.1016/0042-207X(89)90636-2",
      "volume": "39",
      "author": "Carter",
      "year": "1989",
      "journal-title": "Vacuum"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "821",
      "DOI": "10.1116/1.576925",
      "volume": "8",
      "author": "Van Vechten",
      "year": "1990",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "384",
      "DOI": "10.1016/0168-583X(90)90734-C",
      "volume": "46",
      "author": "Hubler",
      "year": "1990",
      "journal-title": "Nucl. Instr. and Meth. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "1800",
      "DOI": "10.1063/1.339560",
      "volume": "62",
      "author": "Windischmann",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "209",
      "DOI": "10.1007/BF00616596",
      "volume": "40",
      "author": "M\u00fcller",
      "year": "1986",
      "journal-title": "Appl. Phys. A"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "2803",
      "DOI": "10.1063/1.336960",
      "volume": "59",
      "author": "M\u00fcller",
      "year": "1986",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "2027",
      "DOI": "10.1116/1.585771",
      "volume": "9",
      "author": "Vancauwenberghe",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "257",
      "DOI": "10.1016/0029-554X(80)90440-1",
      "volume": "174",
      "author": "Biersack",
      "year": "1980",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB21",
      "first-page": "151",
      "volume": "Vol. 155",
      "author": "M\u00f6ller",
      "year": "1989"
    },
    {
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      "article-title": "Computer Simulation of Ion-Solid Interactions",
      "volume": "Vol. 10",
      "author": "Eckstein",
      "year": "1991"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "319",
      "DOI": "10.1016/0040-6090(93)90625-Y",
      "volume": "228",
      "author": "M\u00f6ller",
      "year": "1993",
      "journal-title": "Thin Sol. Films"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "7906",
      "DOI": "10.1103/PhysRevB.35.7906",
      "volume": "35",
      "author": "M\u00fcller",
      "year": "1987",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB25",
      "doi-asserted-by": "crossref",
      "first-page": "6443",
      "DOI": "10.1103/PhysRevB.29.6443",
      "volume": "29",
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      "year": "1984",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB26",
      "doi-asserted-by": "crossref",
      "first-page": "8950",
      "DOI": "10.1103/PhysRevB.44.8950",
      "volume": "44",
      "author": "Gilmore",
      "year": "1991",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB27",
      "doi-asserted-by": "crossref",
      "first-page": "1597",
      "DOI": "10.1116/1.578050",
      "volume": "10",
      "author": "Gilmore",
      "year": "1992",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB28",
      "doi-asserted-by": "crossref",
      "first-page": "709",
      "DOI": "10.1016/0168-583X(91)95688-A",
      "volume": "B 59/B 60",
      "author": "Averback",
      "year": "1991",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB29",
      "doi-asserted-by": "crossref",
      "first-page": "5262",
      "DOI": "10.1103/PhysRevB.31.5262",
      "volume": "31",
      "author": "Stillinger",
      "year": "1985",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB30",
      "doi-asserted-by": "crossref",
      "first-page": "543",
      "DOI": "10.1063/1.349653",
      "volume": "70",
      "author": "Pailthorpe",
      "year": "1991",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB31",
      "doi-asserted-by": "crossref",
      "first-page": "620",
      "DOI": "10.1103/PhysRevLett.68.620",
      "volume": "68",
      "author": "Kaukonen",
      "year": "1992",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB32",
      "doi-asserted-by": "crossref",
      "first-page": "5566",
      "DOI": "10.1103/PhysRevB.39.5566",
      "volume": "39",
      "author": "Tersoff",
      "year": "1989",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB33",
      "doi-asserted-by": "crossref",
      "first-page": "3183",
      "DOI": "10.1063/1.352962",
      "volume": "73",
      "author": "Kitabatake",
      "year": "1993",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB34",
      "series-title": "Proc. Int. Conf. on Computer Simulation of Radiation Effects in Solids",
      "author": "Gilmer",
      "year": "1992"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB35",
      "doi-asserted-by": "crossref",
      "first-page": "9458",
      "DOI": "10.1103/PhysRevB.42.9458",
      "volume": "42",
      "author": "Brenner",
      "year": "1990",
      "journal-title": "Phys. Rev. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB36",
      "doi-asserted-by": "crossref",
      "first-page": "3295",
      "DOI": "10.1063/1.352977",
      "volume": "73",
      "author": "Biswas",
      "year": "1993",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB37",
      "doi-asserted-by": "crossref",
      "first-page": "814",
      "DOI": "10.1016/0168-583X(84)90321-5",
      "volume": "2",
      "author": "M\u00f6ller",
      "year": "1984",
      "journal-title": "Nucl. Instr. and Meth. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB38",
      "doi-asserted-by": "crossref",
      "first-page": "355",
      "DOI": "10.1016/0010-4655(88)90148-8",
      "volume": "51",
      "author": "M\u00f6ller",
      "year": "1988",
      "journal-title": "Comp. Phys. Comm."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB39",
      "doi-asserted-by": "crossref",
      "first-page": "13",
      "DOI": "10.1016/S0040-6090(05)80006-9",
      "volume": "193/194",
      "author": "Nender",
      "year": "1990",
      "journal-title": "Thin Sol. Films"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB40",
      "doi-asserted-by": "crossref",
      "first-page": "21",
      "DOI": "10.1016/0168-583X(91)95167-C",
      "volume": "B 59/B 60",
      "author": "Biersack",
      "year": "1991",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB41",
      "doi-asserted-by": "crossref",
      "first-page": "229",
      "DOI": "10.1016/0168-583X(89)90711-8",
      "volume": "42",
      "author": "Konoplev",
      "year": "1989",
      "journal-title": "Nucl. Instr. and Meth. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB42",
      "doi-asserted-by": "crossref",
      "first-page": "289",
      "DOI": "10.1016/0042-207X(90)90046-2",
      "volume": "40",
      "author": "Li",
      "year": "1990",
      "journal-title": "Vacuum"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB43",
      "doi-asserted-by": "crossref",
      "first-page": "182",
      "DOI": "10.1016/0168-583X(89)90852-5",
      "volume": "39",
      "author": "Zhou",
      "year": "1989",
      "journal-title": "Nucl. Instr. and Meth. B"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB44",
      "doi-asserted-by": "crossref",
      "first-page": "73",
      "DOI": "10.1016/0257-8972(91)90208-E",
      "volume": "45",
      "author": "M\u00f6ller",
      "year": "1991",
      "journal-title": "Surf. Coat. Technol"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB45",
      "doi-asserted-by": "crossref",
      "first-page": "190",
      "DOI": "10.1016/0257-8972(92)90237-5",
      "volume": "51",
      "author": "Bouchier",
      "year": "1992",
      "journal-title": "Surf. Coat. Technol."
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB46",
      "series-title": "Low Energy Ion Beam and Plasma Modification of Materials",
      "volume": "Vol. 223",
      "author": "M\u00f6ller",
      "year": "1991"
    },
    {
      "key": "10.1016/0168-583X(94)95192-6_BIB47",
      "doi-asserted-by": "crossref",
      "first-page": "279",
      "DOI": "10.1016/0168-583X(91)95614-J",
      "volume": "53",
      "author": "Eckstein",
      "year": "1991",
      "journal-title": "Nucl. Instr. and Meth."
    }
  ],
  "container-title": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X94951926?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X94951926?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        3
      ]
    ],
    "date-time": "2019-04-03T20:53:27Z",
    "timestamp": 1554324807000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0168583X94951926"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1994,
        5
      ]
    ]
  },
  "references-count": 47,
  "journal-issue": {
    "issue": "1-4",
    "published-print": {
      "date-parts": [
        [
          1994,
          5
        ]
      ]
    }
  },
  "alternative-id": [
    "0168583X94951926"
  ],
  "URL": "http://dx.doi.org/10.1016/0168-583X(94)95192-6",
  "relation": {},
  "ISSN": [
    "0168-583X"
  ],
  "subject": [],
  "container-title-short": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "published": {
    "date-parts": [
      [
        1994,
        5
      ]
    ]
  }
}