DOI: 10.1016/0168-583x(93)96027-a. Sputtering yield increase with target temperature for Ag

Sputtering yield increase with target temperature for Ag

10.1016/0168-583x(93)96027-a

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Behrisch, R., & Eckstein, W. (1993). Sputtering yield increase with target temperature for Ag. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 82(2), 255â258.

Authors 2

R. Behrisch (first)
W. Eckstein (additional)

References 15 Referenced 25

10.1016/0022-3115(82)90304-X / J. Nucl. Mater. by Roth (1982)
{'key': '10.1016/0168-583X(93)96027-A_BIB2', 'series-title': 'Sputtering by Particle Bombardment III', 'first-page': '231', 'volume': '64', 'author': 'Wittmaack', 'year': '1991'} / Sputtering by Particle Bombardment III by Wittmaack (1991)
{'key': '10.1016/0168-583X(93)96027-A_BIB3', 'series-title': 'Sputtering by Particle Bombardment II', 'first-page': '217', 'volume': '52', 'author': 'Carter', 'year': '1983'} / Sputtering by Particle Bombardment II by Carter (1983)
{'key': '10.1016/0168-583X(93)96027-A_BIB4', 'series-title': 'Sputtering by Particle Bombardment II', 'first-page': '73', 'volume': '47', 'author': 'Roosendaal', 'year': '1981'} / Sputtering by Particle Bombardment II by Roosendaal (1981)
10.1080/14786436208213171 / Philos. Mag. by Nelson (1962)
{'key': '10.1016/0168-583X(93)96027-A_BIB6', 'series-title': 'Sputtering by Particle Bombardment III', 'first-page': '15', 'volume': '64', 'author': 'Hofer', 'year': '1991'} / Sputtering by Particle Bombardment III by Hofer (1991)
{'key': '10.1016/0168-583X(93)96027-A_BIB7', 'series-title': 'Le Bombardement Ionique', 'author': 'Thompson', 'year': '1962'} / Le Bombardement Ionique by Thompson (1962)
10.1007/BF00614908 / Appl. Phys. by Hofer (1983)
{'key': '10.1016/0168-583X(93)96027-A_BIB9', 'series-title': 'Sputtering by Particle Bombardment II', 'first-page': '91', 'volume': '52', 'author': 'Roth', 'year': '1983'} / Sputtering by Particle Bombardment II by Roth (1983)
{'key': '10.1016/0168-583X(93)96027-A_BIB10', 'author': 'Hultgren', 'year': '1972'} by Hultgren (1972)
{'key': '10.1016/0168-583X(93)96027-A_BIB11', 'series-title': 'Sputtering by Particle Bombardment I', 'first-page': '16', 'volume': '47', 'author': 'Sigmund', 'year': '1981'} / Sputtering by Particle Bombardment I by Sigmund (1981)
10.1007/BF00614759 / Appl. Phys. by Biersack (1984)
{'key': '10.1016/0168-583X(93)96027-A_BIB13', 'article-title': 'Computer Simulation of Ion-Solid Interaction', 'volume': 'vol. 10', 'author': 'Eckstein', 'year': '1991'} / Computer Simulation of Ion-Solid Interaction by Eckstein (1991)
{'key': '10.1016/0168-583X(93)96027-A_BIB14', 'first-page': '509', 'volume': 'B18', 'author': 'Bohdansky', 'year': '1987', 'journal-title': 'Nucl. Instr. and Meth.'} / Nucl. Instr. and Meth. by Bohdansky (1987)
10.1103/PhysRev.2.329 / Phys. Rev. by Langmuir (1913)

Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 4:16 p.m.)
Deposited	6 years, 4 months ago (April 3, 2019, 12:28 p.m.)
Indexed	2 months, 1 week ago (June 12, 2025, 8:25 a.m.)
Issued	32 years, 1 month ago (July 1, 1993)
Published	32 years, 1 month ago (July 1, 1993)
Published Print	32 years, 1 month ago (July 1, 1993)

Funders 0

None

BibTeX

@article{Behrisch_1993, title={Sputtering yield increase with target temperature for Ag}, volume={82}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(93)96027-a}, DOI={10.1016/0168-583x(93)96027-a}, number={2}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Behrisch, R. and Eckstein, W.}, year={1993}, month=jul, pages={255–258} }

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